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Rodel ® <strong>IC1000</strong> <strong>CMP</strong> <strong>Pad</strong>BENEFITSAs the industry standard pad for <strong>CMP</strong>, Rodel ® <strong>IC1000</strong> offerslocalized uniformity, excellent removal rate and nonuniformity,and low defectivity.DESCRIPTIONThe Rodel ® <strong>IC1000</strong> <strong>CMP</strong> pad is made of a rigid,microporous polyurethane material. This attribute allowsthe material to planarize across wide gaps, providingexcellent removal rates and localized uniformity. The smallpore structure works effectively with slurries to minimizemicroscratching and provide optimum polishingperformance. The Rodel ® <strong>IC1000</strong> <strong>CMP</strong> pad can beperforated or grooved depending upon the process beingused.TYPICAL PROPERTIES• Rodel ® <strong>IC1000</strong> pads are available in standard diameterswith thicknesses of 50 and 80 mils.• Rodel ® <strong>IC1000</strong> pads are available in different styles andspecific gravity ranges to meet the needs of differentprocesses.STYLE MAXIMUMDIAMETERSPECIFIC GRAVITY(G/CM 3 )A1 26” (66 CM) 0.63 – 0.80A2 26” (66 CM) 0.74 – 0.85A3 30” (76 CM) 0.70 – 0.85A4 32” (81 CM) 0.63 –0.80THICKNESS:50 mils (1270 µm)HARDNESS: 57 (Shore D)COMPRESSIBILITY: 2.25%Removal Rate (Å/min)Removal Rate (A/min)450040003500300025002000150010003500300025002000150010005000PERFORMANCE<strong>IC1000</strong> MarathonSpeedFam Auriga PolisherNew Slurry LotAverage Removal Rate = 3,944 Å/min.Average WIWNU (5mm) = 3.47%0 200 400 600 800Wafer NumberWafer Type: 200 mm PETEOS Downforce: 370 lbs.Speeds: 35 rpm table/45 rpm carrier/0.6" per sec. oscillationSlurry: Fumed silicaFlow Rate: 750 ml/minPolish Time: 120 sec. Other: I.D./O.D. = 10.6"/12.8"<strong>IC1000</strong> BaselineIPEC 676 PolisherAverage Removal Rate = 3.090 A/min.Average WIWNU (3mm) = 3.65%0 100 200 300 400Wafer NumberWafer Type: 200 mm PETEOS Downforce: 6 psiSpeeds: 400 orbits/min. Slurry: Klebosol 1501Flow Rate: 150 mL/min. Polish Time: 150 sec.Other: Edge gap 0.967" - New conditioning hardware151050151050WIWNU (5mm, % 1 sigma)WIWNU (3mm, % 1 sigma)Note:The above charts are typical examples under different processconditions and are not intended to be used to compare polisherperformance.
SHIPPING,HANDLING ANDSTOR<strong>AG</strong>ERodel ® <strong>IC1000</strong> <strong>Pad</strong>s are packed in Rodelstandard Clean Pack:• Double bagged• Pressure sensitive adhesive (PSA)backed with non-particulate releaseliner• Details furnished upon requestIt is recommended that this product bemaintained at temperatures in the range of50°F - 75°F and
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