TEOS thin film deposition - Nectec
TEOS thin film deposition - Nectec
TEOS thin film deposition - Nectec
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Outline• Thin <strong>film</strong> technology• LPCVD system• <strong>TEOS</strong> <strong>thin</strong> <strong>film</strong> <strong>deposition</strong>• Characteristics of <strong>TEOS</strong> <strong>thin</strong> <strong>film</strong>s• Conclusion
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