TEOS thin film deposition - Nectec

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Structure of LPCVD TEOS furnaceComputer Control TEOS liquid sourceQuartz Boat Gas cabinet & Vacuum System
Outline• Thin film technology• LPCVD system• TEOS thin film deposition• Characteristics of TEOS thin films• Conclusion
Page 1 and 2: Characterization of LPCVD TEOS Thin
Page 3 and 4: THIN FILM DEPOSITION FOR BASIC ETCH
Page 5 and 6: Outline• Thin film technology•
Page 7 and 8: Type of Deposition MethodsPhysical
Page 9 and 10: Low Pressure CVD (LPCVD)Advantage-
Page 11: SVG LPCVD furnace THERMCO TMX2603at
Page 15 and 16: Oxide (SiO2) Films Deposition- Sila
Page 17 and 18: ~0.5cm ~1cmUniformity (%) = [Standa
Page 20: Process C: C Wafer spacingTechnique
Page 23 and 24: Map TEOS filmELLIPSOMETERThin Film
Page 25 and 26: Properties of TEOS Films by LPCVDPr
Page 27 and 28: Outline• Thin film technology•
Page 29 and 30: AcknowledgementsI would like to giv

TEOS thin film deposition - Nectec

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