Brooks® QUANTIM® Low Flow Coriolis Precision Mass Flow ...
Brooks® QUANTIM® Low Flow Coriolis Precision Mass Flow ...
Brooks® QUANTIM® Low Flow Coriolis Precision Mass Flow ...
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Section 5 SpecificationsQmB Series IP40, IP65, IP65XPGas <strong>Flow</strong> LimitsAir, 70 o F (21 o C), 14.5 psi (1 bar) pressure drop100,000Size 4 MeterSize 4 ControllerInstallation and Operation ManualX-CM-QmB-engPart Number: 541B029AHGJune, 2008<strong>Flow</strong> rate (sccm)10,0001,000Size 3 MeterSize 3 ControllerSize 2 MeterSize 2 Controller10050 100 200 500 1000 1500Inlet Pressure (psig)Accuracy (5)+ measurement accuracy % of rate or [(zero stability/flowrate) x 100] % of rate, which ever is greaterMeasurement AccuracySensor TubeMaterialStainlessSteelHastelloyZero StabilitiesFluid TypeStandard <strong>Flow</strong>MeasurementAccuracy (% of rate)Optional <strong>Flow</strong>MeasurementAccuracy (% of rate)Liquid 0.2% 0.5%Gas 0.5% 1.0%Liquid 0.5% 1.0%Gas 0.5% 1.0%Sensor TubeMaterialStainless SteelHastelloyTube SizeZero Stability(Kg/hr)Zero Stability(Lb/hr)2 0.00013 0.00033 0.0010 0.00224 0.0040 0.00882 0.0002 0.00043 0.0015 0.00334 0.0120 0.0265Standard Measurement Accuracy vs <strong>Flow</strong> Rate Chart, Tube Size 25-2
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