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Review on bolometer technologies - APC

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SCUBA 2 TES imager. (450µm and 850µm)Studies of stars, planets, galaxy formati<strong>on</strong> in the early universeLarge-area surveys4 × 1280 pixel sub-arraysMoAu TES <strong>on</strong> Si 3N 4membrane (100mK).NEP 3·10 -17 W/√Hz and 15·10 -17 W/√Hz (@ 850 and 450µm)Time-domain multiplexing1280-pixel array chipOptimized absorpti<strong>on</strong> usingquarter wave Si slabSi slab

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