12.07.2015 Views

Review on bolometer technologies - APC

Review on bolometer technologies - APC

Review on bolometer technologies - APC

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Hot electr<strong>on</strong> <strong>bolometer</strong>s (HEB)TiN, NbN, NbSi…Energy is directly absorbed by the electr<strong>on</strong>s of the sensor without ph<strong>on</strong><strong>on</strong> mediati<strong>on</strong>.Electr<strong>on</strong>-ph<strong>on</strong><strong>on</strong> decoupling is weak enough at low temperatures to replace membrane decoupling.Advantages:Simplificati<strong>on</strong> and reliability of fabricati<strong>on</strong> process with high number of pixels.Nb x Si 1-x (CSNSM France)Coupled to antennas ordirectly absorbing incident radiati<strong>on</strong> (Absorpti<strong>on</strong>-Temperature measure-Decoupling in the same material)G is proporti<strong>on</strong>al to NbSi dimensi<strong>on</strong>s100µm x 100µm x 0.1µmNbSi sensorPlanckdecouplingDirect absorbti<strong>on</strong>: R square→377Ω (vacuum impedance)adjusted by the thickness and compositi<strong>on</strong> x of Nb xSi 1-xNEP performances will be so<strong>on</strong> tested at 40mK

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