20 - Kleindiek Nanotechnik - Agar Scientific

20 - Kleindiek NanotechnikKleindiek Nanotechnik is a leading supplier of micro- and nanopositioningproducts for electron microscopy, light microscopy andlife science applications. With more than 15 years experience,Kleindiek’s products are focused on providing complete andinnovative solutions for applications in both research and industry.The range of modular systems and accessories provides flexible andcustomisable platforms for high precision micro-manipulation,maximising manoeuvrability in a compact design. Kleindiek’sproducts are available with a variety of adaptor plates, offeringstraightforward integration into a wide range of imaging systems.All products are delivered as complete solutions that are simpleto install, use and maintain. Kleindiek’s systems include highlysophisticated control electronics and user friendly software, offeringcutting edge nanotechnology in an easy-to-use package.SystemsLift-out ShuttleIn situ lift-out (INLO) techniques remain considerably more expensive than ex situ lift-out,requiring valuable time on the FIB. Time and cost pressures call for faster, simpler procedures,without reducing the reliability of the technique. The Lift-out Shuttle is Kleindiek’s answer tothis problem; a simple and efficient tool offering reliable results with increased samplethroughput by reducing FIB time.The Lift-out Shuttle is a dedicated lift-out system for both in situ or ex situ lift-out procedures.The system is comprised of a three-axis substage mounted on a load-lock compatibleplatform. Either a microgripper or a probe tip can then be mounted above the substage tofacilitate the lift-out. The system includes control electronics, a joypad, two microgrippers,SEMGLU, sample probe tips, a vacuum flange and a vacuum feedthrough.Optional extras include a camera for a side view of the sample at surface level and a fourthaxis for rotation of the stub.LOSLift-out ShuttleProbeWorkstationThe ProbeWorkstation is a powerful system designed specifically for electrical characterisationof semiconductor devices and advanced materials in SEM and FIB. Combining Kleindiek’snanomanipulation and probing products with a Keithley parameter analyser provides aversatile, integrated solution for failure analysis and R & D applications requiring stable lowcurrent measurements.A powerful, dedicated tool for in situ or ex situ probing which interfaces with most SEM/FIBinstruments for sub-nanometre resolution (down to 0.25 nm) over an extensive working area(100 cm 3 ). The system is comprised of four of the latest generation micromanipulatorsmounted on a load-lock compatible platform, four integrated low-current measurement kits,a vacuum flange, a vacuum feedthrough, a safe tip approach module, an EBIC/RCI amplifier,an electronics rack, a Keithley 4200 parameter analyser with four Source Measure Units(SMUs), iProbe software, a laptop and 50 probe tips with 100 nm tip radius.PWProbeWorkstation363

Kleindiek NanotechnikNanoWorkstationThe NanoWorkstation is a powerful and versatile nanomanipulation and characterisationsystem for electron microscopy. It combines small size with high practicality for the effortlesscontrol of multiple manipulators. With rapid set-up and removal, the NanoWorkstation canbe integrated into most commercially available SEMs and FIBs.The system is comprised of four MM3A-EM micromanipulators, two rotational tips, a forcemeasurement system, two microgrippers, a mounting solution for the microscope, a vacuumflange, a vacuum feedthrough, iProbe software, a laptop, an electronics rack, SEMGLU,50 probe tips with 100 nm tip radius, and 20 force sensors.As with the Lift-out Shuttle and ProbeWorkstation, a number of modular components can beused to enhance the functionality of the NanoWorkstation, including the MM3A-EMmicromanipulator. Further accessories can then be added to the micromanipulator, such asthe ROTIP-EM, a rotational axis plug-in providing a fourth degree of freedom for SEM and FIBapplications; the MGS2-EM microgripper, for transport and assembly functions; and theFMS-EM module, for force measurement and nano- indentation applications.NWNanoWorkstationnCount ShuttleThe innovative nCount Shuttle is an intuitive and cost-effective navigation and countingsystem for arrays of periodical structures. It offers greater reliability and higher throughputthan conventional techniques.The system is comprised of a three-axis substage mounted on a load-lock compatible platform.The substage is driven by innovative PC compatible control software which automates theentire process. The system includes control electronics, a joypad, a vacuum flange, a vacuumfeedthrough and a framegrabber.NCSnCount ShuttleSuperFlat Atomic Force MicroscopeThe SuperFlat Atomic Force Microscope (SF-AFM) is an addition to the range of load-lockabletools which offers a high resolution AFM solution for work inside an SEM. Based on theShuttle platform used by the Prober Shuttle, the SF-AFM consists of a next generationnanomanipulator in combination with a super flat piezo scanner. The manipulator is used forcoarse positioning of the cantilever tip. Once the area of interest has been located with thehelp of the SEM, and the cantilever has been brought into position, scanning is performedusing the piezo scanner to which the sample is mounted. By using a compact and flexible AFMinside the SEM, information on lateral dimensions from SEM inspection can be complementedby precise topographical and force information.Shuttle platformDiameter : 100 mm (4")Height : 10 mm + dovetail/stage adaptorWeight : 100 gPiezo scannerTravel : X, Y 14 µm, Z 4 µmResolution: X, Y, Z 0.5 nmNext generation manipulatorsTravel : X 10 mm, Y 5 mm, Z 90°Resolution : X, Y 0.25 nm, Z 3 nmSF-AFMSuperFlat Atomic Force Microscope.Tel: +44 (0)1279 813519 Fax: +44 (0)1279 815106 Email: sales@agarscientific.com www.agarscientific.com 364

Kleindiek NanotechnikPlug-in toolsMicrogripperThe MGS2-EM is a microgripper plug-in for the MM3A-EM micromanipulator, providing ahigh resolution gripping function for transport and assembly of micro-scale objects. Thegripper arms are piezo controlled with tungsten probe tips, and allow a step size of 20 nm.Custom shaped gripper tips are also available on request.MGS2-EMMicrogripper for MM3A-EM micromanipulatorRotational tipThe ROTIP-EM is a rotational axis plug-in tool for the MM3A-EM micromanipulator, providinga fourth degree of freedom for numerous SEM and FIB applications. Standard tungsten tipscan be rotated to give 360° unlimited axial rotation of the tip holder, allowing techniquessuch as lathe milling, tomography and STEM. The ROTIP can also be combined with theMGS2-EM microgripper, for rotation of gripped objects. The tip comes with a control moduleand a TEM grid holder.ROTIP-EMRotational tip for MM3A-EM micromanipulatorLow current measurement kitThis kit includes a low resistance, low noise probe tip holder for use with the MM3A-EMmicromanipulator, allowing low capacitance, low current measurements on conductivesamples. Typical applications include failure analysis, low current transistor measurements,EBIC/RCI analysis and various other electrical characterisation techniques. Standard tungstenprobe tips can be inserted into the LCMK-EM tip holder. Triax cabling and feedthroughs carrythe electrical signals to an adapter which fits all conventional parameter analysers. Each kitconsists of a probe tip holder, vacuum and air-side triax cabling and a vacuum feedthrough.A vacuum flange is also included. One kit required per MM3A-EM micromanipulator.LCMK-EMLow current measurement kit for MM3A-EM micromanipulatorA thermally insulated low current measurement kit allowing measurements on conductivesamples with a temperature of up to 200 °C is also available.LCMKH-EM Thermally insulated low current measurement kit for MM3A-EM micromanipulatorTel: +44 (0)1279 813519 Fax: +44 (0)1279 815106 Email: sales@agarscientific.com www.agarscientific.com 366

Kleindiek NanotechnikMicroinjection systemThe MIS-EM is a microvalve plug-in system for the MM3A-EM micromanipulator, allowingmicroinjection of various liquids and gases onto samples in low vacuum SEM. A femtolitremicrovalve is used for stable and reproducible delivery of fluids in a temperature range of273 to 350 K, achieving dispense volumes as low as 100 µm (dependent on fluid viscosity).The system includes a microvalve, a control module, a power supply, a vacuum flange andall the necessary cabling and tubing with relevant feedthroughs.MIS-EMMicroinjection system for MM3A-EM micromanipulatorForce measurement systemThis is a compact force readout tool for the MM3A-EM micromanipulator, allowing theoperator to perform force measurement and nano-indentation experiments. Two sensorsystems are available: the FMT-400 and FMT-120, both with the same tip dimensions, butdiffering maximum tip forces, tip force constants and sensitivity. The system offers a completeforce measurement solution including software for data acquisition, visualisation and export.The controller offers easy operation, zero adjustment at the touch of a button and a USBinterface. The novel software features a calibration wizard and is capable of recordingforce-time curves.FMS-400FMS-120Low force measurement system for MM3A-EM micromanipulatorHigh force measurement system for MM3A-EM micromanipulatorCapres A/S micro four-point probeThe M4PP is a microprobe plug-in for the MM3A-EM micromanipulator manufactured byCapres, allowing four point electrical characterisation to be performed with a singlemicromanipulator. In combination with high resolution SEM or FIB imaging, the M4PP is apowerful tool for analysing the local electrical properties of materials and devices, with ultralow contact force probes to ensure non destructive measurements. The system comescomplete with measurement control electronics, a power supply, a holder for the probeswhich can be inserted into the MM3A-EM manipulator, three probes, an alignment tool,mounting tweezers and a test resistor.M4PPMicro four-point probe for MM3A-EM micromanipulatorStand-alone toolsSEM-CCD TeleCameraThis small CCD camera can be mounted inside an SEM chamber as a stand-alone tool, or usedin conjunction with a MM3A-EM manipulator system. With a 3 mm field of view and an LEDspecialised light source, this tool makes approaching sample surfaces with probe tips easier.The camera views the tip from the side as opposed to the ‘bird's-eye view’ given by the SEM,therefore the approach can be made in under 30 seconds. The camera features adjustablefocus and view angle. A monitor and a mounting foot are included.SEMCAMSEM-CCD camera367

Kleindiek NanotechnikSafe Tip Approach toolThe Safe Tip Approach tool (STA) is a control module for simplified, fast and secure tipapproach for the MM3-EM manipulator and LCMK-EM low current measurement plug-in.The STA increases throughput and greatly reduces the risk of damaging the probe tip and thesample when approaching a region of interest, even for inexperienced users.STASafe Tip Approach tool for MM3A-EM micromanipulatorEBIC/RCI amplifierThe EBIC/RCI is an amplifier system for electron beam induced current and resistive contrastimaging and is an add-on tool for use with MM3A-EM micromanipulators that are fittedwith the LCMK-EM measurement kit. It connects the signal from a LCMK-EM to the videoinput of the electron microscope. Applications include open detection in integrated circuits,visualisation of p-n junctions and localisation of resistivity changes in via chains. Thoughprimarily developed for semiconductor failure analysis, this tool can be used for anyapplication that requires accurate measurement of low currents.EBIC-RCIEBIC/RCI amplifierRotational axis for STEMThe RT-STEM is a rotational axis for stand-alone use, or use in conjunction with an existingMM3A-EM micromanipulator, offering a fourth degree of freedom that is invaluable for manySEM and FIB applications. A TEM grid holder or large sample can be inserted into the rotationalaxis and rotated with a resolution of 10 -7 rad per step, allowing applications such as true FIBlathe milling, tomography and STEM to be performed with ease.RT-STEMRotational axis for STEMRoStubA rotational axis that provides an additional degree of freedom for all substages and for the Lift-out Shuttle. It allows 360° unlimited rotationof a sample stub.RSRoStubRoTip shuttleA rotational axis mounted on a load-lock compatible platform. It allows 360° unlimited axial rotation of small samples and TEM grids.The system includes control electronics, TEM grid holders, a vacuum flange and a vacuum feedthrough.RTSRoTip shuttleTel: +44 (0)1279 813519 Fax: +44 (0)1279 815106 Email: sales@agarscientific.com www.agarscientific.com 368

Kleindiek NanotechnikSubstagesA range of X, Y and X, Y, Z substages is available to provide orthogonal positioning capability in atmospheric, SEM/FIB, UHV and lowtemperature applications. The compact and flexible design of Kleindiek substages ensures compatibility with a wide range of opticalsystems and features pioneering cabling technology with a compact vacuum feedthrough. Substages are controlled using NanoControlelectronics via an intuitive interface.Substage with 30 mm travelThe LT12830 X, Y substage is primarily used in SEM/FIB to enhance the accuracy andfunctionality of the standard microscope stage, offering an economical and technically superioralternative to laser interferometer stages. It is built specifically for lithography, cell counting andfailure analysis applications, and has two integrated optical positional encoders per axis forautomatic yaw error compensation.LT12830Substage with 30 mm travelSubstages with 20 mm travelThe LT6820 substage is similar to the LT12830, with 20 mm travel for electron microscopyapplications and featuring integrated optical positional encoders. The system includes controlelectronics, a joypad, PC software with a three-point alignment tool, a vacuum flange and avacuum feedthrough. This stage is also available as an X, Y, Z substage with encoders on justthe X and Y axes or with encoders on all three axes.LT6820Substage with 20 mm travelThe LT6620 substage is ideal for applications in extreme environments, eg. UHV and lowtemperature applications, and is designed for large range and high precision. Not fitted withpositional encoders, it represents an economical alternative to the LT6820 substage forapplications where repeatability or automation is not required. This substage is available as anX, Y stage or as an X, Y, Z stage. The EM systems include control electronics, a joypad, PCsoftware, a vacuum flange for UHV applications and a vacuum feedthrough.LT6620Substage with 20 mm travel for UHV applicationsSubstage with 10 mm travelThe LT3310 substage is available in various forms depending on the type of application. Thereis an EM version, a UHV version and also a low temperature version. This 10 mm substage isavailable in X, Y or X, Y, Z options, and is mainly used to enhance the accuracy and functionalityof the standard microscope stage. Its smooth motion and rotational axis make it ideal forapplications such as cell counting. In addition, the LT3310 is designed for nano-manipulationapplications where weight and space are highly restricted.LT3310Substage with 10 mm travel369

Kleindiek NanotechnikAccessoriesTEM grid holdersA TEM grid holder to hold one or three grids suitable for use with the MM3A-EM manipulator,ROTIP-EM, RT-STEM or RoTip Shuttle.TGH-1TEM grid holder for one gridTGH-3TEM grid holder for three gridsTEM grid holder on a stubThis is a standard sample stub that has been cut on one side and fitted with a clip to allow TEM grids to be inserted perpendicular to thesample surface.TGH-STEM grid holder on a stubPipette pullerA vertical glass pipette puller to enable fine glass tips to be prepared from glass capillaries.PPPipette pullerElectronics rackThis electronics rack offers improved logistics for control of Kleindiek systems, reducing thespace required and allowing rapid switching between microscope instruments. The smallrack is designed for desktop use, while the large rack is floor standing with extra capacity forfuture upgrades of the system. Systems specified with a control rack are delivered assembled,wired and tested.Height Width Depth(cm) (cm) (cm)Small rack 60 56 50Large rack 107 56 50R-SR-LElectronics rack, smallElectronics rack, largeTel: +44 (0)1279 813519 Fax: +44 (0)1279 815106 Email: sales@agarscientific.com www.agarscientific.com 370

Kleindiek NanotechnikSoftwareiProbeiProbe software provides intuitive and efficient PC-compatible control for up to four MM3Amicromanipulators. Straightforward three dimensional control using the mouse for X and Ymovements, and a jog dial for Z movements, offers precision micromanipulation through sixorders of magnitude. Computer not included.IPROBEiProbe softwareConsumablesTungsten probe tipsThese tips have a 0.5 mm shaft diameter.Packed in protective atmosphere.PT-100 Probe tips (tip radius 100 nm). Pack of 25PT-100F FIB-cleaned probe tips (tip radius 100 nm). Pack of 15PT-30F FIB-cleaned probe tips (tip radius 30 nm). Pack of 10Micro force sensorsForce sensors in ceramic supports for the FMS-EM.FMT-120 120 µm force sensors. Pack of 10FMT-400 400 µm force sensors. Pack of 10FMT-M 120 µm and 400 µm force sensors. Pack of 10 (5 of each)Glass pipettesGlass pipettes with 1.5 mm shaft diameter and approximately 1 µm tip radiusGP Glass pipettes. Pack of 10Capres A/S probes for the M4PPM4PP-5 Micro four-point probes (5 µm spacing). Pack of 5M4PP-10 Micro four-point probes (10 µm spacing). Pack of 5M4PP-15 Micro four-point probes (15 µm spacing). Pack of 5M4PP-20 Micro four-point probes (20 µm spacing). Pack of 5M4PP-25 Micro four-point probes (25 µm spacing). Pack of 5M4PP-30 Micro four-point probes (30 µm spacing). Pack of 5371

Kleindiek NanotechnikMicro four-point probe selectionThree Capres probes for the M4PP (spacing 5 µm, 15 µm and 25 µm), mounting tweezers, a test resistor and a probe adaptor.M4PP-PSCapres micro four-point probe selection for M4PPMicroinjector pipettePipette for the MIS-EM with 150 µm outer diameter and 50 µm inner diameter.MIPMicroinjector pipette for MIS-EMPicoprobesFine tungsten tips for use in most standard commercial micropositioners for in situ lift-out, manipulation ofsamples, or for probing integrated circuits, pads or lines.T5110-10 Picoprobe, 1 mm length, 10 µm diameter,