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4.2 × 10 –5Magnetic energy (Em) Magnetic (J) energy (Em) Inductance (J) (L) (nH) Inductance (L) (nH)3.9 × 10 –53.6 × 10 –5Inductance (L)3.3 × 10 –53.2 × 10 –54.2 × 10 –52.7 × 10 –53.9 × 10 –52.4 × 10 –53.6 × 10 –5Inductance (L)3.3 × 10 –5 20 40 60803.2 2.2 × 10 –5Width of coil (µm)2.7 10 –52.0 × 10 –51.8 × 10 –5Magnetic energy (Em)2.4 × 10 –5 20 40 60801.6 × 10 –52.2 × 10 –5Width of coil (µm)1.4 × 10 –52.0 101.2 × 10 –51.8 × 10 –520 40Magnetic energy (Em)60801.6 × 10 –5Width of coil (µm)1.4 × 10 –51.2 × 10 –5 20 40 6080Width of coil (µm)2.7 × 10 –6Magnetic flux density (B)Magnetic flux density Magnetic (B) (T) flux density (B) (T)2.4 × 10 –62.7 × 10 –6Magnetic flux density (B)2.1 × 10 –62.4 × 10 –61.8 × 10 –62.1 × 10 –610 20 30 40 50 60 70 80 90Width of coil (µm)Figure 1.8 × 10 3. –6 Inductance, magnetic energy and magnetic flux density against width of coil.10 20 30 40 50 60 70Width of coil (µm)80 90
N. Sulaiman and B.Y. Majlis: Physical Characteristics of Three-dimensional Coil Structure for MEMS MagnetometerFigure 4. Magnetic flux density simulated point.Table 3. Distance between successive coil simulation settings.ItemDescriptionWidth of coil Constant at 20 µmDistance between successive coils Varying dimensions (20, 30, 40, 50, 60, 70, 80) µmGap between top and bottom coil Constant at 40 µmCurrentConstantly at 1 ATable 4. Gap between top and bottom coil simulation settings.ItemDescriptionWidth of coil Constant at 20 µmDistance between successive coils Constant at 50 µmGap between top and bottom coil Varying dimensions (20, 30, 40, 50, 60, 70, 80) µmCurrentConstantly at 1 A33
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