Vacuum Pump Systems RUTA

Vacuum Pump SystemsRUTA250 - 13 000 m 3 x h -1 (147 to 765 cfm)173.02.02Excerpt from the Oerlikon Leybold Vacuum Full Line CatalogProduct Section C08Edition May 2007

ContentsGeneralOverview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C08.03Types of Pumps Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C08.04ProductsPump Systems (Global Versions)Three-Stage RUTA Pump Systemswith Two-Stage TRIVAC Backing PumpsAdaptor Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C08.06Frame Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C08.08Two-Stage RUTA Pump Systemswith Single-Stage SOGEVAC Backing PumpsAdaptor Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C08.10Frame Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C08.12Two- and Three-Stage RUTA Pump Systemswith Single- and Two-StageRotary Piston Vacuum Pumps as Backing Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C08.14Dry Compressing Vacuum Pump System RUTAwith SCREWLINE SP630 Backing PumpAdaptor Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C08.16Frame Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C08.18RUVAC RAV Roots Vacuum Pumps with Pre-Admission Cooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C08.20Pump Systems RUTA RAVwith RUVAC RAV Roots Vacuum PumpsTwo- Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C08.22Three-Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C08.24TVD Pump Systemsfor Drying, Evaporation and Distillation Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C08.26Pump Systems (Only available for purchase in North and South America)RBS - B/BCS Roots Pump Systemswith Two-Stage TRIVAC Backing Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C08.28HTS Close-Coupled Pump Systemswith Single-Stage SOGEVAC Backing Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C08.32SP Close-Coupled Pump Systemswith SCREWLINE Dry Compressing Backing Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C08.36AccessoriesSound Proofing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C08.40Isolation against Vibrations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C08.40Dust Separators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C08.40Frequency Inverter RUVATRONIC RT 5 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C08.40Electric Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C08.41Pressure Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C08.41Dust Filter F-xxx-C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C08.42MiscellaneousChecklist for Inquiries (Fax Form) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C08.44C08 02Oerlikon Leybold Vacuum Full Line Catalog

The operating pressure ranges of thepump systems depend on the numberof Roots vacuum pumps, but willextend in any case without interruptionsto atmospheric pressure.Already in connection with one Rootspump, pump systems with aSCREWLINE pump are capable ofattaining base pressures of< 1 x 10 -3 mbar (7.5 x 10 -4 Torr).Single-stage RAV combinations attainan ultimate pressure of 150 mbar(112.5 Torr) and twostage combinations50 mbar (37.5 Torr).Multi-stage combinations with Rootsvacuum pumps of all systems arecapable of attaining pressures below10 -4 mbar (7.5 x 10 -5 Torr).RUTA Custom Pump SystemsMost users will be able to select theright pump system for their applicationfrom our range of standard pumpsystems. In special cases a customdesign may be required for specialprocesses and high pumpingspeeds.We are prepared to design andmanufacture custom pump systemsaccording to customers specifications.If required we will use - besidesoil-sealed and dry-compressingbacking pumps - liquid ring andejector pumps.RUTA Pump Systems for theMetal Producing andProcessing IndustryIn common vacuum furnace processessuch as hardening, annealing,brazing, melting and casting, preferablyoil-sealed or dry compressingstandard vacuum pump systems areusually used. The oil-sealed systemsconsist of a combination of Rootsvacuum pumps with a single or twostagerotary vane or rotary pistonpump.In the dry compressing systems ourscrew vacuum pump SCREWLINE isused as the backing pump.The vacuum pumps are mounted in arugged frame. The design of thepump systems is service-friendly,modular and can be easily upgradedwith additional equipment.On smaller furnaces RUVAC WAURoots vacuum pumps are the mostsuitable because these may be cut-inat a higher operating pressure, whileon larger furnaces and particularlywhere short pump-down cycles arerequired, the use of RUVAC RA Rootsvacuum pumps with suitably sizedbacking pumps is advisable. Forspecial processes, e.g. fusion ordegassing of molten masses, due tothe high dust contents, the additionaluse of a dust separator is required aswell as equipping the backing pumpswith oil filtering units.RUTA Pump Systems for theChemical IndustryIn chemical processes it is oftennecessary to remove corrosive, condensableand reactive gases andvapors. Oerlikon Leybold Vacuumdesigns and manufactures custombuiltpump systems for specific processapplications. Depending on thetype of application, either a rotary vanepump, or a dry compressing screwvacuum pump (SCREWLINE, forexample), a liquid ring pump or a combinationof gas jet pump and liquid ringpump may be used as the backingpump.To ensure dependable monitoring ofthe system, the following monitoringdevices, among others, may beinstalled:- Temperature sensors to monitorthe gas temperatures between thepump stages and the pump bodytemperature,- Water flow monitors for the coolingwater supply to pumps and condensers,- Differential pressure indicator withcontrol setpoint to monitor theexhaust filters of the rotary vanevacuum pump.Pump Systems for Drying,Evaporation and DistillationApplications (TVD)More and more vacuum applicationsare finding their way into the areas ofenvironmental protection, recyclingand waste disposal. “Waste disposalof used oil and aromatic compounds”and “Cleaning processes in metalprocessingfactories” demonstratethat the combination of vacuumknow-how, innovative engineeringand applications know-how is indispensablefor the successful applicationof vacuum technology in mostwidely differing applications.The product is no longer in the foreground,solutions to problems aredemanded instead.TVD pump system, mobile with control cabinetOerlikon Leybold Vacuum has developedsome continuously operatingvacuum pump systems for theseapplications. These systems basicallyconsist of a rotary vane pump witha condenser unit. Upon request thecondenser arrangement may also beequipped with a cold water set. Thisversion will then be independent ofany cooling water connections and –being a mobile system – it is well-suitedfor operation at varying locations.Oerlikon Leybold Vacuum Full Line Catalog05C08

ProductsThree-Stage RUTA Pump Systemswith Two-Stage TRIVAC Backing Pumps,Adaptor VersionRUTA WAU 501/D65B/AStandard Equipment- Exhaust filter- Oil collecting pan- Manually operated gas ballast- Crane eyes on the frame- Floor mounting- The oil is supplied with the pump- CE approvalOptions- Frequency inverterRUVATRONIC RT for controllingthe speed of the Roots pump- Oil filter- 24 V DC gas ballast valve- Sound proofing box- Vibration absorbers- Castors- Different types of floor mounts- Oil drain valve on each pump- Exhaust filter with oil return line- Special motors- Electric control systemsl 1b 1l 2b 2DN 1DN 2hh 1lcbRUTA 251/D40B/A 251/D65B/A 501/D65B/ARUVAC WA/WAU/WS/WSU P2 251 251 501Backing pump TRIVAC P1 D 40 B D 65 B D 65 BDN 1 63 ISO-K 63 ISO-K 63 ISO-KDN 2 40 ISO-KF 40 ISO-ISO-KF 40 ISO-KFl 1000 (39.37) 1000 (39.37) 1000 (39.37)l 1 375 (14.76) 375 (14.76) 375 (14.76)l 2 234(9.21) 234 (9.21) 234 (9.21)b 600 (23.62) 600 (23.62) 600 (23.62)b 1 350 (13.78) 350 (13.78) 350 (13.78)b 2 40 (1.57) 40 (1.57) 40 (1.57)h 854 (33.62) 854 (33.62) 894 (35.20)h 1 488 (19.21) 488 (19.21) 488 (19.21)c 100 (3.94) 100 (3.94) 100 (3.94)Dimensional drawing for the pump systems with TRIVAC D40/65 B backing pumps on pallet; dimensions in brackets ( ) are in inchC08 06Oerlikon Leybold Vacuum Full Line Catalog

Technical Data, 50 HzRUTA WAU251/D40B/A 251/D65B/A 501/D65B/A251 251 501RUVAC (WA/WAU/WS/WSU possible) P2Outlet port DN 2 40 ISO-KF 40 ISO-KF 40 ISO-KFBacking pump TRIVACP1D 40 B D 65 B D 65 BPumping speed, 50 Hz at 10 -1 mbar(7.5 x 10 -2 Torr) m 3 x h -1 (cfm) 200.0 (117.8) 210.0 (123.7) 380.0 (223.8)Ultimate partial pressure mbar (Torr) < 2 x 10 -5 (< 1.5 x 10 -5 ) < 2 x 10 -5 (< 1.5 x 10 -5 ) < 2 x 10 -5 (< 1.5 x 10 -5 )Ultimate total pressurewith gas ballastmbar (Torr) < 8 x 10 -4 (< 6 x 10 -4 ) < 8 x 10 -4 (< 6 x 10 -4 ) < 8 x 10 -4 (< 6 x 10 -4 )Installed motor powerkW (hp)2.6 (3.5) 3.3 (4.5) 4.4 (6.0)Power consumptionat 10 -1 mbar (7.5 x 10 -2 Torr) kW (hp)2.0 (2.7) 2.5 (3.4) 2.7 (3.7)Noise level to DIN 45 635max.dB(A)64 65 67without gas ballastat 1 mbar (0.75 Torr)dB(A)62 63 63Oil filling, total, approx.l (qt)3.3 (3.49) 4.0 (4.23) 4.3 (4.55)Weight, total, approx.kg (lbs) 245.0 (540.2) 260.0 (573.3) 305.0 (627.5)Connecting flangeInlet port DN 163 ISO-K 63 ISO-K 63 ISO-KOrdering InformationRUVAC (WA/WAU/WS/WSU possible)Backing pump TRIVACP2P1RUTA WAU251/D40B/A 251/D65B/A 501/D65B/AWAU 251 WAU 251 WAU 501D 40 B D 65 B D 65 BPump system, complete (adaptor version),pallet mounted,with Roots vacuum pump RUVAC WAUFrequency inverter RUVATRONIC(see description in Section“Accessories”)Part No. 023 06 Part No. 023 07 Part No. 023 08RT 5/251 RT 5/251 RT 5/501Part No. 500 001 381 Part No. 500 001 381 Part No. 500 001 382mbarWAU 251 +D40BWAU 251 +D65B10 2WAU 501 +D65B10 110 010 -1 864210 -20 2 4 6 8 10min10 3 Pump-down timePressure75010 2Torr10 110 010 -110 -210 3m 3 x h -1Pumping speed10 210 1 864210 010 -5 -4 -3 -2 -1 01 Torr10 10 10 10 10 102 4 6810 -4WAU 251 +D 40 BWAU 251 +D 65 BWAU 501 +D 65 BWAU 1001+D 65 B10 -5 10 -3 10 -2 10 -1 10 0 10 1mbar10 3Total pressurePressurePartial pressure750500cfm100501051Pump-down time diagram for a 10 m 3 tank at 50 HzPumping speed diagram at 50 HzOerlikon Leybold Vacuum Full Line Catalog07C08

Three-Stage RUTA Pump Systemswith Two-Stage TRIVAC Backing Pumps,Frame VersionRUTA WAU 501/D65B/GStandard Equipment- Exhaust filter- Oil collecting pan- Manually operated gas ballast- Crane eyes on the frame- Floor mounting- The oil is supplied with the pump- CE approvalOptions- Frequency inverterRUVATRONIC RT for controllingthe speed of the Roots pump- Oil filter- 24 V DC gas ballast valve- Sound proofing box- Vibration absorbers- Castors- Different types of floor mounts- Oil drain valve on each pump- Exhaust filter with oil return line- Special motors- Electric control systemsl 1b 1l 2DN 1DN 2b 2h 1hh 2lcbRUTA 251/D40B/G 251/D65B/G 501/D65B/G 1001/D65B/GRUVAC WA/WAU/WS/WSU P2 251 251 501 1001Backing pump TRIVAC P1 D 40 B D 65 B D 65 B D 65 BDN 1 63 ISO-K 63 ISO-K 63 ISO-K 100 ISO-KDN 2 40 ISO-KF 40 ISO-KF 40 ISO-KF 40 ISO-KFl 1000 (39.37) 1100 (43.31) 1150 (45.28) 1300 (51.18)l 1 400 (15.75) 480 (18.90) 480 (18.90) 480 (18.90)l 2 234 (9.21) 314 (12.36) 314 (12.36) 314 (12.36)b 560 (22.05) 560 (22.05) 560 (22.05) 600 (23.62)b 1 280 (11.02) 280 (11.02) 280 (11.02) 280 (11.02)b 2 59 (2.32) 59 (2.32) 59 (2.32) 59 (2.32)h 977 (38.46) 977 (38.46) 1017 (40.04) 1067 (42.01)h 1 488 (19.21) 488 (19.21) 488 (19.21) 488 (19.21)h 2 677 (26.65) 677 (26.65) 677 (26.65) 671 (26.42)c 100 (3.94) 100 (3.94) 100 (3.94) 100 (3.94)Dimensional drawing for the pump systems with TRIVAC D40/65 B backing pumps in a frame; dimensions in brackets ( ) are in inchC08 08Oerlikon Leybold Vacuum Full Line Catalog

Technical Data, 50 HzRUTA WAU251/D40B/G 251/D65B/G 501/D65B/G 1001/D65B/G251 251 501 1001RUVAC (WA/WAU/WS/WSU possible) P2Outlet port DN 2 40 ISO-KF 40 ISO-KF 40 ISO-KF 40 ISO-KFBacking pump TRIVACP1 D 40 B D 65 B D 65 B D 65 BPumping speed, 50 Hz at 10 -1 mbar(7.5 x 10 -2 Torr) m 3 x h -1 (cfm) 185.0 (109.0) 205.0 (120.7) 340.0 (200.3) 620.0 (365.2)Ultimate partial pressurembar < 2 x 10 -5 < 2 x 10 -5 < 2 x 10 -5 < 2 x 10 -5 )(Torr) (< 1.5 x 10 -5 ) (< 1.5 x 10 -5 ) (< 1.5 x 10 -5 ) (< 1.5 x 10 -5 )Ultimate total pressurewith gas ballastmbar < 8 x 10 -4 < 8 x 10 -4 < 8 x 10 -4 < 8 x 10 -4(Torr) (< 6 x 10 -4 ) (< 6 x 10 -4 ) (< 6 x 10 -4 ) (< 6 x 10 -4 )Installed motor powerkW (hp) 2.6 (3.5) 3.3 (4.5) 4.4 (6.0) 6.2 (8.4)Power consumptionat 10 -1 mbar (7.5 x 10 -2 Torr) kW (hp) 2.0 (2.7) 2.5 (3.4) 2.7 (3.7) 3.0 (4.1)Noise level to DIN 45 635max.dB(A)64 65 67 77without gas ballastat 1 mbar (0.75 Torr)dB(A)62 63 63 70Oil filling, total, approx.l (qt) 3.3 (4.5) 4.0 (4.23) 4.3 (4.55) 5.3 (5.60)Weight, total, approx.kg (lbs) 280.0 (617.4) 310.0 (683.6) 350.0 (771.8) 460.0 (1014.3)Connecting flangeInlet port DN 1 63 ISO-K 63 ISO-K 63 ISO-K 100 ISO-KOrdering InformationRUVAC (WA/WAU/WS/WSU possible) P2Backing pump TRIVACP1Pump system, complete (frame version),frame mounted,with Roots vacuum pump RUVAC WAUFrequency inverter RUVATRONIC(see description in Section“Accessories”)RUTA WAU251/D40B/G 251/D65B/G 501/D65B/G 1001/D65B/GWAU 251 WAU 251 WAU 501 WAU 1001D 40 B D 65 B D 65 B D 65 BPart No. 023 16 Part No. 023 17 Part No. 023 18 Part No. 023 19RT 5/251 RT 5/251 RT 5/501 RT 5/1001Part No. 500 001 381 Part No. 500 001 381 Part No. 500 001 382 Part No. 500 001 383mbarWAU 251 +D40BWAU 251 +D65B10 2WAU 501 +D65BWAU 1001+D65B10 110 010 -1 864210 -20 2 4 6 8 10min10 3 Pump-down timePressure75010 2Torr10 110 010 -110 -210 3m 3 x h -1Pumping speed10 210 1 864210 -5 -4 -3 -2 -1 01 Torr10 10 10 10 10 10WAU 251 +D 40 BWAU 251 +D 65 BWAU 501 +D 65 BWAU 1001+D 65 B10 010 -5 2 4 6810 -4 10 -3 10 -2 10 -1 10 0 10 1mbar10 3PressureTotal pressurePartial pressure750500cfm100501051Pump-down time diagram for a 10 m 3 tank at 50 HzPumping speed diagram at 50 HzOerlikon Leybold Vacuum Full Line Catalog09C08

Two-Stage RUTA Pump Systemswith Single-Stage SOGEVAC Backing Pumps,Adaptor VersionRUTA WAU 1001/SV200/AStandard Equipment- Exhaust filter with oil return line- Oil filter- Oil collecting pan- Manually operated gas ballast- Floor mounting- The oil is supplied with the pump- CE approvalOptions- Frequency inverterRUVATRONIC RT for controllingthe speed of the Roots pump- 24 V DC gas ballast valve- Sound proofing box- Vibration absorbers- Castors- Different types of floor mounts- Oil drain valve on each pump- Special motors- Electric control systemsl2l 1DN 2bb 1hl 1DN 2l 2DN 1bh2b 1l 2cDN 11h 1chblbRUTA 501/SV 200/A 1001/SV 200/A 1001/SV 300/A 2001/SV 630F/ARUVAC WA/WAU/WS/WSU P2 501 1001 1001 2001Backing pump SOGEVAC P1 SV 200 SV 200 SV 300 SV 630DN 1 63 ISO-K 100 ISO-K 100 ISO-K 160 ISO-KDN 2 2" 2" 2" 100 ISO-Kl 962 (37.87) 1050 (41.34) 1082 (42.60) 1800 (70.87)l 1 242 (9.53) 303 (11.93) 303 (11.93) 820 (32.28)l 2 70 (2.76) 77 (3.03) 77 (3.03) 35 (1.38)b 700 (27.56) 700 (27.56) 700 (27.56) 1000 (39.37)b 1 230 (9.06) 230 (9.06) 230 (9.06) 450 (17.72)b 2 499 (19.65) 499 (19.65) 499 (19.65) 764 (30.08)h 873 (34.37) 923 (36.34) 923 (36.34) 1402 (55.20)h 1 468 (18.43) 468 (18.43) 468 (18.43) 805 (31.69)c 100 (3.94) 100 (3.94) 100 (3.94) 100 (3.94)Dimensional drawing for the pump systems with SOGEVAC SV 200 and 300 backing pumps [left], SOGEVAC SV 630 F [right]; dimensions in brackets ( ) are in inchC08 10Oerlikon Leybold Vacuum Full Line Catalog

Technical Data, 50 HzRUTA WAU501/SV200/A 1001/SV200/A 1001/SV300/A 2001/SV630F/A501 1001 1001 2001RUVAC (WA/WAU/WS/WSU possible) P2Outlet port DN 2 2" 2" 2" 100 ISO-KBacking pump SOGEVACP1 SV 200 SV 200 SV 300 SV 630 FPumping speed, 50 Hz at 10 -1 mbar(7.5 x 10 -2 Torr) m 3 x h -1 (cfm) 365.0 (215.0) 715.0 (421.0) 730.0 (430.0) 1690.0 (995.4)Ultimate partial pressurembar < 8 x 10 -3 < 8 x 10 -3 < 8 x 10 -3 < 8 x 10 -3(Torr) (< 6 x 10 -3 ) (< 6 x 10 -3 ) (< 6 x 10 -3 ) (< 6 x 10 -3 )Ultimate total pressurewith gas ballastmbar < 4 x 10 -2 < 4 x 10 -2 < 4 x 10 -2 < 4 x 10 -2(Torr) (< 3 x 10 -2 ) (< 3 x 10 -2 ) (< 3 x 10 -2 ) (< 3 x 10 -2 )Installed motor powerkW (hp) 6.2 (8.4) 8.0 (10.9) 9.5 (12.9) 22.5 (30.6)Power consumptionat 10 -1 mbar (7.5 x 10 -2 Torr) kW (hp) 3.0 (4.1) 3.5 (4.8) 4.0 (5.4) 16.5 (22.4)Noise level to DIN 45 635without gas ballastat 10 -1 mbar (7.5 x 10 -2 Torr) dB(A) 70 75 76 80Oil filling, total, approx.l (qt) 6.0 (6.34) 7.0 (7.4) 11.0 (11.63) 39.0 (41.23)Weight, total, approx.kg (lbs) 335.0 (738.7) 430.0 (948.2) 480.0 (1058.4) 1140.0 (2513.7)Connecting flangeInlet port DN 1 63 ISO-K 100 ISO-K 100 ISO-K 160 ISO-KOrdering InformationRUVAC (WA/WAU/WS/WSU possible) P2Backing pump SOGEVACP1Pump system, complete (adaptor version),pallet mounted,with Roots vacuum pump RUVAC WAUFrequency inverter RUVATRONIC(see description in Section“Accessories”)RUTA WAU501/SV200/A 1001/SV200/A 1001/SV300/A 2001/SV630F/AWAU 501 WAU 1001 WAU 1001 WAU 2001SV 200 SV 200 SV 300 SV 630 FPart No. 022 06 Part No. 022 08 Part No. 022 09 Part No. 022 11RT 5/501 RT 5/1001 RT 5/1001 RT 5/2001Part No. 500 001 382 Part No. 500 001 383 Part No. 500 001 383 Part No. 500 001 384Pressure10 3mbar10 2WAU 501 + SV200WAU 1001 + SV200WAU 1001 + SV300WAU 2001 + SV630F10 110 0 864210 -10 4 8 12 16 20minPump-down time750Torr10101010210-1m 3 x h -110 3WAU 2001+SV 630F10 2 WAU 1001+SV 3008WAU 1001+SV 2006WAU 501 +SV 2004210 110 -32 4 68 10 -2 10 -1 10 0 10 1 10 2 mbar10 310 4 PressureTotal pressurePartial pressurePumping speed-3 -2 -1 0 1 Torr10 10 10 10 10 7505000cfm10005001005010Pump-down time diagram for a 10 m 3 tank at 50 HzPumping speed diagram at 50 HzOerlikon Leybold Vacuum Full Line Catalog11C08

Two-Stage RUTA Pump Systemswith Single-Stage SOGEVAC Backing Pumps,Frame VersionRUTA WAU 2001/SV300/GStandard Equipment- Exhaust filter with oil return line- Oil filter- Oil collecting pan- Manually operated gas ballast- Crane eyes on the frame- Floor mounting- The oil is supplied with the pump- CE approvalOptions- Frequency inverterRUVATRONIC RT for controlling thespeed of the Roots pump- 24 V DC gas ballast valve- Sound proofing box- Vibration absorbers- Castors- Different types of floor mounts- Oil drain valve on each pump- Special motors- Electric control systemsl 1b1DN 1b 2DN 2h 1h 2hhh2l 2l 1b1DN1DN 2b2l 2h1lcbRUTA 1001/SV300/G 2001/SV300/G 3001/SV630F/G 5001/SV630F/G 7001/SV1200/GRUVAC RA P2 – – 3001 5001 7001RUVAC WA/WAU/WS/WSU P2 1001 2001 – – –Backing pump SOGEVAC P1 SV 300 SV 300 SV 630 SV 630 SV 1200DN 1 100 ISO-K 160 ISO-K 250 ISO-K 250 ISO-K 250 ISO-KDN 2 2" 2" 100 ISO-K 100 ISO-K 160 ISO-Kl 1340 (52.76) 1340 (52.76) 2150 (84.65) 2150 (84.65) 2325 (91.54)l 1 380 (14.96) 380 (14.96) 950 (37.40) 950 (37.40) 975 (38.39)l 2 110 (4.33) 110 (4.33) 165 (6.5) 165 (6.5) 405 (15.94)b 710 (27.95) 780 (30.71) 1100 (43.31) 1100 (43.31) 1360 (53.54)b 1 250 (9.84) 320 (12.60) 500 (19.69) 500 (19.69) 580 (22.83)b 2 191 (7.52) 191 (7.52) 285 (11.22) 285 (11.22) 158 (6.22)h 1176 (46.30) 1259 (49.57) 1792 (70.55) 1896 (74.65) 2580 (101.58)h 1 518 (20.39) 518 (20.39) 745 (29.33) 745 (29.33) 1020 (40.16)h 2 780 (30.71) 729 (28.70) 1177 (46.34) 1151 (45.31) 1835 (72.24)c 100 (3.94) 100 (3.94) 100 (3.94) 100 (3.94) 100 (3.94)Dimensional drawing for the pump systems with SOGEVAC SV 300 and 630 F backing pumps [left], SOGEVAC SV 1200 [right]; dimensions in brackets ( ) are in inchclbC08 12Oerlikon Leybold Vacuum Full Line Catalog

Technical Data, 50 HzRUTA1001/SV300/G 2001/SV300/G 3001/SV630F/G 5001/SV630F/G 7001/SV1200/G– – 3001 5001 7001RUVAC RAP2Outlet port DN 2 2" 2" 100 ISO-K 100 ISO-K 160 ISO-KRUVAC (WA/WAU/WS/WSU possible) P2 1001 2001 – – –Backing pump SOGEVACP1 SV 300 SV 300 SV 630 F SV 630 F SV 1200Pumping speed, 50 Hz at 10 -1 mbar(7.5 x 10 -2 Torr) m 3 x h -1 (cfm) 730 (430) 1445 (850) 3090 (1818) 4210 (2478) 5520 (3250)Ultimate partial pressurembar < 8 x 10 -3 < 8 x 10 -3 < 8 x 10 -3 < 8 x 10 -3 < 8 x 10 -3(Torr) (< 6 x 10 -3 ) (< 6 x 10 -3 ) (< 6 x 10 -3 ) (< 6 x 10 -3 ) (< 68 x 10 -3 )Ultimate total pressurewith gas ballastmbar < 4 x 10 -2 < 4 x 10 -2 < 4 x 10 -2 < 4 x 10 -2 < 4 x 10 -2(Torr) (< 3 x 10 -2 ) (< 3 x 10 -2 ) (< 3 x 10 -2 ) (< 3 x 10 -2 ) (< 3 x 10 -2 )Installed motor powerkW (hp) 9.5 (12.9) 13.0 (17.7) 26.0 (35.4) 30.0 (40.8) 33.5 (45.6)Power consumptionat 10 -1 mbar (7.5 x 10 -2 Torr) kW (hp) 4.0 (5.4) 4.5 (6.1) 17.0 (23.1) 17.5 (23.8) 18.0 (24.5)Noise level to DIN 45 635without gas ballastat 10 -1 mbar (7.5 x 10 -2 Torr) dB(A) 75 79 82 80 82Oil filling, total, approx.l (qt) 11.0 (11.63) 13 42 47 62Weight, total, approx.kg (lbs) 560.0 (1234.8) 740.0 (1631.7) 1750.0 (3858.8) 1900.0 (4189.5) 3000.0 (6615)Connecting flangeInlet port DN 1 100 ISO-K 160 ISO-K 250 ISO-K 250 ISO-K 250 ISO-KOrdering InformationRUVACRUVAC (WA/WAU/WS/WSU possible)Backing pump SOGEVACPump system, complete (frame version),frame mounted,with Roots vacuum pumpRUVAC RARUVAC WAUFrequency inverter RUVATRONIC(see description in Section“Accessories”)P2P2P1RUTA1001/SV300/G 2001/SV300/G 3001/SV630F/G 5001/SV630F/G 7001/SV1200/G– – RA 3001 RA 5001 RA 7001WAU 1001 WAU 2001 – – –SV 300 SV 300 SV 630 F SV 630 F SV 1200– – Part No. 022 35 Part No. 022 37 Part No. 022 39Part No. 022 31 Part No. 022 33 – – –RT 5/1001 RT 5/2001 RT 5/3001 RT 5/5001 RT 5/7001Part No. Part No. Part No. Part No. Part No.500 001 383 500 001 384 500 001 385 1) 500 001 386 1) 500 001 387 1)1) With this combination, continouos operation of the Roots pump is not possible at atmospheric pressure10 3 min750-3-2 -1 01 Torr10 10 10 10 10 750Pressurembar10 210 110 0 8642WAU1001 + SV300WAU2001 + SV300RA3001 + SV630FRA5001 + SV630FRA7001 + SV1200101010Torr210Pumping speedm 3 x h -110 310 2 8642WAU 1001+SV 300WAU 2001+SV 300RA 3001 +SV 630FRA 5001 +SV 630FRA 7001 +SV 120050005010cfm100050010010 4 mbar10 -102 4 6 8 1014Pump-down time10-110 110 -32 4 68 10 -2 10 -1 10 0 10 1 10 2 10 3Total pressure PressurePartial pressurePump-down time diagram for a 10 m 3 tank at 50 HzPumping speed diagram at 50 HzOerlikon Leybold Vacuum Full Line Catalog13C08

Dry-Compressing Vacuum Pump System RUTAwith SCREWLINE SP630 Backing Pump,Adaptor VersionRUTA WSU 2001/SP630/AStandard Equipment- Silencer- SP Guard- Manually operated gas ballast- Gear oil collecting pan integratedwithin the SCREWLINE- Gear oil supplied with the pump- CE approvalOptions- Frequency inverterRUVATRONIC RT for controlling thespeed of the Roots pump- Condensate drain valve at thesilencer- Sound proofing box- Vibration absorbers- SCREWLINE with water cooling- Castors- Different types of floor mounts- Oil drain valve on each pump- Electric control systemsbl1b1b2DN1DN2hh1l2lb3b4* 1)RUTA2001/SP630/ARUVAC WA/WAU/WS/WSU P2 2001Backing pump SCREWLINE P1 SP630DN 1160 ISO-KDN 2100 ISO-Kl 1850 (72.84)l 1 380 (14.96)l 2 892 (35.12)b 1064 (41.89)b 1 400 (15.75)b 2 554 (21.81)b 3 800 (31.50)b 4 70 (2.76)h 1518 (59.76)h 1 1380 (54.33)1) Clearance for maintenanceDimensional drawing of the pump systems with dry compressing SCREWLINE SP630 backing pump,adapter version; dimensions in brackets ( ) are in inchC08 16Oerlikon Leybold Vacuum Full Line Catalog

2001Technical Data, 50 HzRUTA WAU2001/SP630/ARUVAC (WA/WAU/WS/WSU possible) P2Outlet port DN 2 100 ISO-KBacking pump SCREWLINEP1SP630Pumping speed, 50 Hz at 10 -1 mbar(7.5 x 10 -2 Torr) m 3 x h -1 (cfm)1780 (1050)Ultimate total pressurewithout gas ballastmbar (Torr)< 1 x 10 -3 (< 7.5 x 10 -4 )Installed motor powerkW (hp)22.5 (30.0)Electrical power consumptionat 10 -1 mbar (7.5 x 10 -2 Torr) kW (hp)11.7 (15.7)Noise level to DIN 45 635 with silencerat 10 -1 mbar (7.5 x 10 -2 Torr) dB(A)79Weight, total, approx.kg (lbs)1100 (2430)Connecting flangeInlet port DN 1160 ISO-KOrdering InformationRUVAC (WA/WAU/WS/WSU possible)Backing pump SCREWLINEP2P1RUTA WAU2001/SP630/AWAU 2001SP630Pump system, complete (adaptor version),pallet mounted,with Roots vacuum pumpRUVAC WAUFrequency inverter RUVATRONIC(see description in Section“Accessories”)Part No. 500 740RT 5/2001Part No. 500 001 38410 3mbar10 2Presure10 110 0 8642WAU2001 + SP630Pumping speedm 3 . h -110 310 2 864210 4 mbarWAU2001 + SP63010 -102 4 6 min 8Pump-down time10 110 -32 4 68 10 -2 10 -1 10 0 10 1 10 2 10 3PressurePump-down time diagram for a 10 m 3 tank at 50 HzPumping speed diagram at 50 HzOerlikon Leybold Vacuum Full Line Catalog17C08

Dry-Compressing Vacuum Pump System RUTAwith SCREWLINE SP630 Backing Pump,Frame VersionRUTA WAU 2001/SP630/GStandard Equipment- Silencer- SP Guard- Manually operated gas ballast- SECUVAC valve 24 V DC- Gear oil collecting pan integratedwithin the SCREWLINE- Crane eyes on the frame- Floor mounting- Gear oil supplied with the pump- CE approvalOptions- Frequency inverterRUVATRONIC RT for controlling thespeed of the Roots pump- Condensate drain valve at thesilencer- Sound proofing box- Vibration absorbers- SCREWLINE with water cooling- Castors- Different types of floor mounts- Oil drain valve on each pump- Electric control systemsbl1b1b2DN1DN2hh2h1l2lb3b4* 1)RUTA 2001/SP630/G 3001/SP630/G 5001/SP630/G 7001/SP630/G 9001/SP630/GRUVAC RA P2 – 3001 5001 7001 9001RUVAC WA/WAU/WS/WSU P2 2001 – – – –Backing pump SCREWLINE P1 SP630 SP630 SP630 SP630 SP630DN 1 160 ISO-K 250 ISO-K 250 ISO-K 250 ISO-K 320 ISO-KDN 2 100 ISO-K 100 ISO-K 100 ISO-K 100 ISO-K 100 ISO-Kl 2200 (86.62) 2200 (86.62) 2400 (94.49) 2400 (94.49) 2400 (94.49)l 1 600 (23.62) 600 (23.62) 720 (28.35) 720 (28.35) 720 (28.35)l 2 892 (35.12) 892 (35.12) 1012 (39.84) 1012 (39.84) 1012 (39.84)b 1064 (41.89) 1064 (41.89) 1129 (44.45) 1129 (44.45) 1129 (44.45)b 1 400 (15.75) 400 (15.75) 465 (18.31) 465 (18.31) 465 (18.31)b 2 554 (21.81) 554 (21.81) 554 (21.81) 554 (21.81) 554 (21.81)b 3 800 (31.50) 800 (31.50) 930 (36.61) 930 (36.61) 930 (36.61)b 4 70 (2.76) 70 (2.76) – – –h 1789 (70.43) 2030 (79.92) 2220 (87.40) 2220 (87.40) 2300 (90.55)h 1 1380 (54.33) 1380 (54.33) 1440 (56.69) 1440 (56.69) 1440 (56.69)1) Clearance for maintenance h 2 1259 (49.57) 1415 (55.71) 1475 (58.07) 1475 (58.07) 1475 (58.07)Dimensional drawing of the pump systems with dry compressing SCREWLINE SP630 backing pump, frame version; dimensions in brackets ( ) are in inchC08 18Oerlikon Leybold Vacuum Full Line Catalog

RUVAC RAV Roots Vacuum Pumpswith Pre-Admission CoolingTypical Applications- Short pump-down cycles on largevolumes- Oil-free compression of highvolume flows of gases and vaporsagainst atmospheric pressure- Single-stage (G) or in combinationwith RAV F as backing pump- Operating pressures in the roughvacuum range- CE approvalAdvantages to the User- RUVAC RAV GOperating pressure range of150 mbar (112.5 Torr) againstatmospheric pressure;total leak rate < 10 -1 mbar x l x s -1(7.5 x 10 -2 Torr x l x s -1 )- RUVAC RAV FIn combination with backingpumps the attainable operatingpressures extend down into themedium vacuum range;leak rate < 10 -2 mbar x l x s -1(7.5 x 10 -3 Torr x l x s -1 )- When series-connected theoperating pressures extend downinto the medium vacuum range:- two-stages to 25 mbar(18.75 Torr)- multiple stage to 10 -3 mbar(7.5 x 10 -4 Torr)- Motors for special supply voltagesand frequencies or protectedtypes are available- Pre-admission silencer and filterfor the cooling gas inlet as well assilencers for the exhaust side(option/single-stage)- Downstream gas cooler (option/multistage)- C version (chemical version/option)- Special materials (option)- Pressure burst resistant version(option)lbl 1l 6hh110b 21DN 1l 2l 3DNDNbb 3l 4l 5dCooling water connection forRAV 4000 F, RAV 8000 FDN DN 1 Type F Type GRUVAC RAV DIN 2533 DIN 2533 l l 1 l 2 l 3 l 4 l 5 l 6 b b 1 b 2 b 3 d d h h 10250 F/G mm 80 50 529 283 90 100 125 50 5 321 332 34 300 25 k6 28 k6 313 132in. 80 50 20.83 11.14 3.54 3.94 4.92 1.97 0.20 12.64 13.07 1.34 11.81 0.98 k6 1.10 k6 12.32 5.200500 F/G mm 100 50 604 324 120 100 150 70 5 321 390 42.6 350 25 k6 38 k6 370 160in. 100 50 23.78 12.76 4.72 3.94 5.91 2.76 0.20 12.64 15.35 1.68 13.78 0.98 k6 1.50 k6 14.57 6.301000 F/G mm 100 80 705 380 125 115 210 90 5 427 440 53.3 400 42 k6 45 k6 410 180in. 100 80 27.76 14.96 4.92 4.53 8.27 3.54 0.20 16.81 17.32 2.10 15.75 1.65 k6 1.77 k6 16.14 7.092000 F/G mm 150 100 806 423 160 130 270 80 5 476 570 67.6 510 42 k6 55 k6 450 200in. 150 100 31.73 16.65 6.30 5.12 10.63 3.15 0.20 18.74 22.44 2.66 20.08 1.65 k6 2.17 k6 17.72 7.874000 F/G mm 250 1) 150 1143 610 250 200 410 95 5 682 800 106 720 55 k6 70 m6 680 315in. 250 1) 150 45.0 24.02 9.84 7.87 16.14 3.74 0.20 26.85 31.50 4.17 28.35 2.17 k6 2.76 m6 26.77 12.408000 F/G mm 300 1) 200 1) 1337 717 300 230 525 100 8 954 910 135 830 70 k6 90 m6 760 355in. 300 1) 200 1) 52.64 28.23 11.81 9.06 20.67 3.94 0.31 37.56 35.83 5.31 32.68 2.76 k6 3.54 m6 29.92 13.981) DIN 2532 DN 1 = Pre-inletDimensional drawing for the RUVAC RAV pumpsC08 20Oerlikon Leybold Vacuum Full Line Catalog

Technical Data, 50 HzPumping speed 1)Ordering Informationm 3 x h -1 (cfm)Nominal speedmin -1 (rpm)Max. permissible pressure difference 2)mbar (Torr)Connecting flangeMax. permissible motor powerfor direct drivefor belt driveWeightRoots vacuum pump RUVAC RAV GDNkW (hp)kW (hp)kg (lbs)RUVAC RAV250 G 500 G 1000 G 2000 G 4000 G 8000 G250 (147) 500 (295) 1000 (589) 2000 (1178) 3700 (2179) 8100 (4771)3000 (3000) 3000 (3000) 3000 (3000) 3000 (3000) 1500 (1500) 1500 (1500)850 (637) 850 (637) 850 (637) 850 (637) 850 (637) 850 (637)80 100 100 150 250 30011.0 (15.0) 18.5 (25.2) 30.0 (40.8) 55.0 (74.8) 95.0 (129.3) 200.0 (272.1)11.0 (15.0) 18.5 (25.2) 30.0 (40.8) 55.0 (74.8) 95.0 (129.3) 200.0 (272.1)95 (210) 160 (353) 225 (496) 310 (684) 720 (1588) 1230 (2712)RUVAC RAV250 G 500 G 1000 G 2000 G 4000 G 8000 Gupon request upon request upon request upon request upon request upon requestTechnical Data, 50 HzRUVAC RAV250 F 500 F 1000 F 2000 F 4000 F 8000 F250 (147) 500 (295) 1000 (589) 2000 (1178) 3700 (2179) 8100 (4771)Pumping speed 1)m 3 x h -1 (cfm)Cooling water requirement, approx. l x h -1 – – – – 60 60Nominal speedmin -1 (rpm) 3000 (3000) 3000 (3000) 3000 (3000) 3000 (3000) 1500 (1500) 1500 (1500)Max. permissible pressure difference 2)mbar (Torr) 850 (637) 850 (637) 850 (637) 850 (637) 850 (637) 850 (637)Connecting flangeDN 80 100 100 150 250 300Max. permissible motor powerfor direct drivekW (hp) 11.0 (15.0) 18.5 (25.2) 30.0 (40.8) 55.0 (74.8) 95.0 (129.3) 200.0 (272.1)for belt drivekW (hp) 4.0 (5.4) 4.0 (5.4) 7.5 (10.2) 15.0 (20.4) 37.0 (50.3) 75 (102.0)Gear oil, approx.l (qt) 0.9 (0.95) 1.1 (1.6) 1.5 (1.59) 2.5 (2.64) 12.0 (12.68) 11.0 (11.63)Weight, approx.kg (lbs) 95 (210) 160 (353) 225 (496) 310 (684) 720 (1588) 1230 (2712)Cooling water connection,fitting for tube– – – – 10 x 1 10 x 1Ordering InformationRoots vacuum pump RUVAC RAV F1) To DIN 28 400 and following numbers2) RUVAC RAV G and RAV F with direct driveRUVAC RAV250 F 500 F 1000 F 2000 F 4000 F 8000 Fupon request upon request upon request upon request upon request upon request10 4Pumping speed10 3 864210 2 500Torr750500010 22 10m x h -1 4 83RAV 8000 GRAV 4000 GcfmRAV 2000 GRAV 1000 GRAV 500 GRAV 250 G10001002Pressure6mbar10 3Pumping speed diagram of RUVAC RAV at 50 HzOerlikon Leybold Vacuum Full Line CatalogOperating diagram of RUVAC RAV vacuum pumpswith pre-admission cooling21C08

RUTA RAV Pump Systemswith RUVAC RAV Roots Vacuum Pumps,Two-StageStandard Equipment- Roots vacuum pumps with preadmissioncooling- One or two RAV F pumps areconnected upstream of the RUVACRAV G pump operating as abacking pump- Ultimate pressures below 50 mbar(37.5 Torr) can be attained- Gas cooler, pre-admission silencerand filter- Non-return flap- Exhaust silencer- CE approvalb 1h3h4h4DN 1hDN DN 2h2h1h1h 2 h 2h3l 2b 2l 2l 1lbl 1lRUTA 500 F/250 G 1000 F/500 G 2000 F/1000 G 4000 F/2000 G 8000 F/4000 GRUVAC RAV P2 500 F 1000 F 2000 F 4000 F 8000 FRUVAC RAV P1 250 G 500 G 1000 G 2000 G 4000 GDN 1 100 (3.94) 100 (3.94) 150 (5.91) 250 (9.84) 300 (11.81)DN 2 80 (3.15) 100 (3.94) 100 (3.94) 150 (5.91) 250 (9.84)l 1290 (50.79) 1560 (61.42) 1830 (72.03) 2400 (94.49) 2790 (109.84)l 1 420 (16.54) 480 (18.90) 570 (22.44) 800 (31.50) 950 (37.40)l 2 1050 (41.34) 1100 (43.31) 1300 (51.18) 1650 (64.96) 2150 (84.65)b 1300 (51.18) 1500 (59.06) 1680 (66.14) 2050 (80.71) 2600 (102.36)b 1 1050 (41.34) 1180 (46.46) 1300 (51.18) 1550 (61.02) 2100 (82.68)b 2 400 (15.75) 400 (15.75) 450 (17.72) 500 (19.69) 700 (27.56)h 1550 (61.02) 1700 (66.93) 1930 (75.98) 2550 (100.39) 3100 (122.05)h 1 720 (28.35) 820 (32.28) 1000 (39.37) 1100 (43.31) 1200 (47.24)h 2 500 (19.69) 570 (22.44) 750 (29.53) 700 (27.56) 700 (27.56)h 3 1180 (46.46) 1340 (52.76) 1540 (60.63) 1750 (68.90) 2100 (82.68)h 4 1370 (53.94) 1520 (59.84) 1750 (68.90) 2210 (87.01) 2500 (98.43)Dimensional drawing for two-stage RUTA RAV pump systems; dimensions in brackets ( ) are in inchC08 22Oerlikon Leybold Vacuum Full Line Catalog

Technical Data, 50 HzRUVAC RAVP2RUVAC RAVP1Pumping speed, 50 hzat 200 mbar (150 Torr) m 3 x h -1 (cfm)at 100 mbar (75 Torr) m 3 x h -1 (cfm)Ultimate total pressurembar (Torr)(other motors are required)Cut-in pressureP2 1)mbar (Torr)P1mbar (Torr)Installed motor powerkW (hp)Power consumptionat 200 mbar (150 Torr)kW (hp)Cooling water consumption(T < 30°, ΔT < 10 K), max.(gas coolers and pumps) m 3 x h -1 (cfm)Noise level to DIN 45 635with pre-inlet andpulsation silencers andpump exhaust leading outside dB(A)plus additional sound proofing boxdB(A)(a further reduction is possible)Gear oil, approx.l (qt)Total weight, incl. silencers for preadmissionand exhaust, approx. kg (lbs)Connecting flange(pipe connection) 2)Inlet port DN 1Outlet port DN 2Gas admission port without filter DNOrdering InformationPump system500 F/250 G1000 F/500 GRUTA RAV2000 F/1000 G4000 F/2000 G8000 F/4000 G500 F 1000 F 2000 F 4000 F 8000 F250 G 500 G 1000 G 2000 G 4000 G322.0 (189.7) 708.0 (417.0) 1518.0 (894.1) 2685.0 (1581.5) 5821.0 (3428.6)– – – – –< 50.0 (< 37.5) < 50.0 (< 37.5) < 50.0 (< 37.5) < 50.0 (< 37.5) < 50.0 (< 37.5)576.0 (432.0) 538.0 (403.5) 548.0 (411.0) 630.0 (472.5) 502.0 (376.5)1013.0 (760.0) 1013.0 (760.0) 1013.0 (760.0) 1013.0 (760.0) 1013.0 (760.0)15.0 (20.4) 22.0 (29.9) 44.0 (59.9) 82.0 (111.6) 165.0 (224.5)7.8 (10.6) 15.8 (21.5) 31.5 (42.9) 56.4 (76.7) 122.0 (166.0)0.5 (0.3) 1.0 (0.6) 2.0 (1.2) 3.0 (1.8) 7.0 (4.1)86 88 93 104 10672 74 80 84 862.0 (2.11) 2.5 (2.64) 4.0 (4.23) 14.5 (15.33) 23.0 (24.31)1000 (2205) 1600 (3528) 2200 (4851) 4000 (8820) 7500 (16538)100 100 150 250 30080 100 100 150 25050 50 80 100 150500 F/250 G1000 F/500 GRUTA RAV2000 F/1000 G4000 F/2000 G8000 F/4000 Gupon request upon request upon request upon request upon request1) With exhaust flap and bypass line 1013 mbar (760 Torr)2) to DIN 25 3310 3mbarPressure64750Torr21210 2 5 4 310 20 10 min 20 5 RAV 8000 F + RAV 4000 G4 RAV 4000 F + RAV 2000 GTime3 RAV 2000 F + RAV 1000 G2 RAV 1000 F + RAV 500 G1 RAV 500 F + RAV 250 Gm3 x h-1Pumping speed10 41Torr10 10275054310 3 86242110 2 2 4 6 810 110 2 mbarPressure10 35000cfm10005001005 RAV 8000 F + RAV 4000 G4 RAV 4000 F + RAV 2000 G3 RAV 2000 F + RAV 1000 G2 RAV 1000 F + RAV 500 G1 RAV 500 F + RAV 250 G5 RAV 8000 F + RAV 4000 G4 RAV 4000 F + RAV 2000 G3 RAV 2000 F + RAV 1000 G2 RAV 1000 F + RAV 500 G1 RAV 500 F + RAV 250 GPump-down time diagram for a 50 m 3 tankfor RAV F+G at 50 HzPumping speed diagram of RAV F + G at 50 HzOerlikon Leybold Vacuum Full Line Catalog23C08

RUTA RAV Pump Systemswith RUVAC RAV Roots Vacuum Pumps,Three-StageStandard Equipment- Roots vacuum pumps with preadmissioncooling- Two RAV F pumps are connectedupstream of the RUVAC RAV Gpump operating as a backingpump- CE approval- Ultimate pressures below 10 mbar(7.5 Torr) can be attained- Gas cooler, pre-admission silencerand filter- Non-return flap- Exhaust silencerb 1b 1h4hDN 1h3DN 1h4DN 2hh 2h1b 2l 2bl 1lbb 2RUTA 1000 F/500 F/250 G 2000 F/1000 F/500 G 4000 F/2000 F/1000 G 8000 F/4000 F/2000 GRUVAC RAV P3 1000 F 2000 F 4000 F 8000 FRUVAC RAV P2 500 F 1000 F 2000 F 4000 FRUVAC RAV P1 250 G 500 G 1000 G 2000 GDN 1 100 (3.94) 150 (5.91) 250 (9.84) 300 (11.81)DN 2 80 (3.15) 100 (3.94) 100 (3.94) 150 (5.91)l 1560 (61.42) 1830 (72.05) 2400 (94.49) 2790 (109.84)l 1 480 (18.90) 570 (22.44) 800 (31.50) 950 (37.40)l 2 1050 (41.34) 1100 (43.31) 1350 (53.15) 1650 (64.96)b 2170 (85.43) 2400 (94.49) 2850 (112.20) 3400 (133.86)b 1 1850 (72.83) 2000 (78.74) 2400 (94.49) 2950 (116.14)b 2 400 (15.75) 400 (15.75) 450 (17.72) 500 (19.69)h 1720 (67.72) 1950 (76.77) 2550 (100.39) 3000 (118.11)h 1 800 (31.5) 1000 (39.37) 1150 (45.28) 1200 (47.24)h 2 600 (23.62) 750 (29.53) 850 (33.46) 850 (33.46)h 3 1280 (50.39) 1500 (59.06) 1700 (66.93) 1830 (72.05)h 4 1520 (59.84) 1750 (68.90) 2210 (87.01) 2500 (98.43)Dimensional drawing for three-stage RUTA RAV pump systems; dimensions in brackets ( ) are in inchC08 24Oerlikon Leybold Vacuum Full Line Catalog

Technical Data, 50 HzRUVAC RAVP3RUVAC RAVP2RUVAC RAVP1Pumping speed, 50 Hzat 200 mbar (150 Torr) m 3 x h -1 (cfm)at 100 mbar (075 Torr) m 3 x h -1 (cfm)Ultimate total pressurembar (Torr)(other motors are required)Cut-in pressureP3 1)mbar (Torr)P2 1)mbar (Torr)P1mbar (Torr)Installed motor powerkW (hp)Power consumptionat 100 mbar (75 Torr)kW (hp)Cooling water consumption(T < 30°, ΔT < 10 K), max.(gas coolers and pumps) m 3 x h -1 (cfm)Noise level to DIN 45 635with pre-inlet andpulsation silencers andpump exhaust leading outside dB(A)plus additional sound proofing boxdB(A)(a further reduction is possible)Gear oil, approx.l (qt)Total weight, incl. silencers for preadmissionand exhaust, approx. kg (lbs)Connecting flange (pipe connection) 2)Inlet port DN 1Outlet port DN 2Gas admission port without filter DN1000 F/500 F/250 G2000 F/1000 F/500 GRUTA RAV4000 F/2000 F/1000 G8000 F/4000 F/2000 G1000 F 2000 F 4000 F 8000 F500 F 1000 F 2000 F 4000 F250 G 500 G 1000 G 2000 G– – – –741.0 (436.4) 1573.0 (926.5) 2862.0 (1685.7) 6243.0 (3677.1)< 10.0 (< 7.5) < 10.0 (< 7.5) < 10.0 (< 7.5) < 10.0 (< 7.5)278.0 (208.5) 265.0 (198.8) 312.0 (234.0) 289.0 (216.8)576.0 (432.0) 538.0 (403.5) 548.0 (411.0) 630.0 (472.5)1013.0 (760.0) 1013.0 (760.0) 1013.0 (760.0) 1013.0 (760.0)22.5 (30.6) 37.0 (50.3) 62.5 (85.0) 157.0 (213.6)12.0 (16.3) 24.4 (33.2) 42.3 (57.6) 90.6 (123.3)1.0 (0.6) 2.0 (1.2) 4.0 (2.4) 8.0 (4.7)88 95 106 10875 77 86 883.5 (3.70) 5.0 (5.29) 16.0 (16.91) 25.0 (26.43)2000 (4410) 3000 (6615) 5000 (11025) 8500 (18743)100 150 250 30080 100 100 15050 50 80 100Ordering InformationPump system1000 F/500 F/250 G2000 F/1000 F/500 GRUTA RAV4000 F/2000 F/1000 G8000 F/4000 F/2000 Gupon request upon request upon request upon request1) With exhaust flap and bypass line 1013 mbar (760 Torr)2) to DIN 25 337501Torr10 10275010 3mbarTorr10 210 286142210 1 3410 14 RAV 8000 F + RAV 4000 F +0 10 min 20 RAV 2000 GTime3 RAV 4000 F + RAV 2000 F +RAV 1000 G2 RAV 2000 F + RAV 1000 F +RAV 500 G1 RAV 1000 F + RAV 500 F +RAV 250 GPressurePump-down time diagram for a 50 m 3 tankfor RAV F, F + G at 50 Hz10 4m3 x h-1 4310 3 28614210 2 2 4 6 810 110 2 mbarPressurePumping speedPumping speed diagram of RAV F, F + G at 50 Hz10 35000cfm10005001004 RAV 8000 F + RAV 4000 F +RAV 2000 G3 RAV 4000 F + RAV 2000 F +RAV 1000 G2 RAV2000F+RAV1000 F +4 RAV 8000 F + RAV 4000 F +RAV 2000 G3 RAV 4000 F + RAV 2000 F +RAV 1000 G2 RAV 2000 F + RAV 1000 F +RAV 500 G1 RAV 1000 F + RAV 500 F +RAV 250 GOerlikon Leybold Vacuum Full Line Catalog25C08

TVD Pump Systems for Drying, Evaporationand Distillation ApplicationsTVD 200Advantages to the User- Operating agent may be reused,for example by returning cleanedwater to the process- Reduction of the quantities whichneed to be disposed of by 80%- Low temperature distillation/drying- Condensate may be drainedduring vacuum operation- CE approvalTypical Applications- Drying of powders and solids,for example- Cleaning of waste water- Vacuum distillationStandard Equipment- Condenser at the intake side- Receiver with condensate levelindicator- Manually operated valves on thereceiver- SOGEVAC rotary vane pump withintegrated exhaust filters, antisuckbackvalve and gas ballastvalveDN3l 1Hand Handventil valveDN 63 ISO-KDN1b1b2Options- Valve between condenser androtary vane pumpDN 3DN 2h1hDN 3h2clbDN 1 DN 2 DN 3 l l 1 b b 1 b 2 h h 1 h 2 cTVD 040 mm 63 ISO-K 1 1/4" 1" 1000 590 700 160 445 1000 785 341 100in. 63 ISO-K 1 1/4" 1" 39.37 23.23 27.56 6.30 17.52 39.37 30.91 13.43 3.94TVD 065 mm 63 ISO-K 1 1/4" 1" 1280 755 700 160 445 1165 950 341 100in. 63 ISO-K 1 1/4" 1" 50.39 29.72 27.56 6.30 17.52 45.87 33.46 13.43 3.94TVD 100 mm 100 ISO-K 2" 1" 1400 755 940 160 561 1165 950 345 100in. 100 ISO-K 2" 1" 55.12 29.72 37.01 6.30 22.09 45.87 33.46 13.58 3.94TVD 200 mm 100 ISO-K 2" 1" 1800 765 940 150 501 1175 960 473 100in. 100 ISO-K 2" 1" 70.87 30.12 37.01 6.30 19.72 46.25 37.80 18.62 3.94- Pressure gauge for checking thecondensate pressure- Solenoid valves at the receiver- Receiver with proximity switch formonitoring the condensate level- Electric control for automaticoperation of the pump system- Mobile pallet with castors- Cold water replacement for mobileapplicationsDimensional drawing for the TVD pump systemsC08 26Oerlikon Leybold Vacuum Full Line Catalog

Technical Data, 50 Hz TVD 40 TVD 65 TVD 100 TVD 200Condenser,effective surface area, approx. m 21 2 3 5Receiver, usable volumeRotary vane vacuum pumpNominal pumping speedPumping speed at 50 Hzfor airfor water vaporat 50 mbar (37.5 Torr)Ultimate total pressurewith standard gas ballastNoise level to DIN 45 635 1)l (qt)SOGEVACm 3 x h -1 (cfm)m 3 x h -1 (cfm)m 3 x h -1 (cfm)mbar (Torr)dB(A)30.0 (31.71) 50.0 (52.85) 50.0 (52.85) 50.0 (52.85)SV 40 SV 65 SV 100 SV 20046.0 (27.1) 65.0 (38.3) 100.0 (58.9) 180.0 (106.0)46.0 (27.1) 53.0 (31.2) 94.0 (55.4) 170.0 (100.1)280.0 (165.0) 560.0 (330.0) 840.0 (495.0) 1400.0 (825.0)< 1.5 (< 1.1) < 1.5 (< 1.1) < 1.5 (< 1.1) < 0.7 (< 0.53)63 64 70 69Condensing capacity for water l x h -110 20 30 50Installed motor powerkW (hp)1.1 (1.5) 1.5 (2.0) 2.2 (3.0) 4.0 (4.2)1) Operating at ultimate pressure with gas ballastTechnical Data, 50 HzSV 40 SV 65 SV 100 SV 200125 (276) 150 (331) 200 (441) 300 (662)Weight (with oil filling), approx. kg (lbs)Outlet port DN 2 1 1/4" 1 1/4" 2" 2"Oil fillingl (qt) 2.0 (2.11) 2.0 (2.11) 3.5 (3.70) 5.0 (5.29)Connecting flangesInlet port DN 1 63 ISO-K 63 ISO-K 100 ISO-K 100 ISO-KOrdering InformationTVD 40 TVD 65 TVD 100 TVD 200Pump system Part No. 021 01 Part No. 021 02 Part No. 021 03 Part No. 021 04Oerlikon Leybold Vacuum Full Line Catalog27C08

Pump Systems (Only available for purchasein North and South America)RBS - B/BCS Roots Pump Systemswith Two-Stage TRIVAC Backing PumpsRBS - B/BCS Roots pumping system, shown with optional AF exhaust filterStandard Equipment- System consists of TRIVAC dualstage B or BCS direct drive vanepump and RUVAC blower- Complete air cooled system- 18“ wide frame base equippedwith caster wheels and levelingpads- Compact construction with quietoperation- Manual operation of gas ballast- Close-coupled RUVAC blower withANSI inlet langeOptions- All TRIVAC accessories, Exhaustfilter, 24 V DC gas ballast valve,chemical oil filter, and electricallimit switch system- Full frame drip pan- Oil drain valves- Special motor voltages and frequencies- Special oil for unique applications- Full electrical controls for controlstart/stop and monitoring ofsystem300cfm501/D65BPumping Speed200100501/D40B251/D65B251/D40B010 -4 2 4 6 810 -3 10 -2 10 -1 10 0 10 1 10 2 TorrTotal Pressure10 3Pumping speed diagram for the RBS systems with WSU series Roots blowers at 60 HzC08 28Oerlikon Leybold Vacuum Full Line Catalog

lbll 1l 2b 2h 1hl 1l 2SystemClose-coupled b b 1 b 2 h h 1 l l 1 l 2D 40 B/BCSWSU 251 18 (457) 8 (203) 7 (178) 33 3/16 (853) 17 15/16 (456) 32 3/4 (832) 14 (356) 34 (864)WSU 501 18 (457) 8 (203) 7 (178) 34 3/4 (883) 17 15/16 (456) 33 13/16 (859) 14 (356) 34 (864)D 65 B/BCSWS/WSU 251 18 (457) 8 (203) 7 (178) 33 3/16 (853) 17 15/16 (456) 34 3/4 (883) 16 (406) 34 (864)WS/WSU 501 18 (457) 8 (203) 7 (178) 34 3/4 (883) 17 15/16 (456) 35 13/16 (910) 16 (406) 34 (864)Dimensional drawing for the RBS - B/BCS Roots pumping pystems 18“ with TRIVAC D 40/65 B backing pumps, close-coupled package;dimensions in brackets ( ) are in mmOerlikon Leybold Vacuum Full Line Catalog29C08

Technical DataRUVAC (WA/WAU/WS/WSU possible)TRIVAC backing pumpPumping speed @ 0.1 Torr cfm (m 3 x h -1 )RBS - B/BCS Roots Pump Systems251/D40B 251/D65B 501/D40B 501/D65B251 251 501 501D 40 B/BCS D 65 B/BCS D 40 B/BCS D 65 B/BCS140 (237) 150 (254) 232 (394) 267 (453)Ultimate total pressureConnecting flangesInlet portWSUOutlet portOperating voltagePhase / Frequency 1)Full load amps 2)RUVAC WSUTRIVACTorr(mbar)DNDNV– / Hz2 x 10 -4 2 x 10 -4 2 x 10 -4 2 x 10 -4(< 4 x 10 -4 ) (< 4 x 10 -4 ) (< 4 x 10 -4 ) (< 4 x 10 -4 )3" ANSI 3" ANSI 3" ANSI 3" ANSI40 ISO-KF 40 ISO-KF 40 ISO-KF 40 ISO-KF208/230/460 208/230/460 208/230/460 208/230/4603 / 60 3 / 60 3 / 60 3 / 605.5/5.5/3.2 5.5/5.5/3.2 9.0/9.0/5.2 9.0/9.0/5.29.0/8.8/4.5 9.0/8.8/4.5 9.0/8.8/4.5 9.0/8.8/4.5DisplacementRUVAC cfm (m 3 x h -1 )TRIVAC cfm (m 3 x h -1 )179 (304) 179 (304) 357 (606) 357 (606)32 (54) 53 (90) 32 (54) 53 (90)Maximum differential pressureNormal starting pressure 3)Oil capacityRUVAC WSUTRIVACTorr (mbar)Torr (mbar)qt (l)qt (l)60 (80) 60 (80) 60 (80) 60 (80)20 (27) 30 (40) 12 (16) 16 (21)0.75 (0.7) 0.75 (0.7) 1.10 (1.0) 1.10 (1.0)2.70 (2.6) 3.40 (3.2) 2.70 (2.6) 3.40 (3.2)Nominal rotation speedRUVAC rpm (min -1 )TRIVAC rpm (min -1 )3600 (3600) 3600 (3600) 3600 (3600) 3600 (3600)1800 (1800) 1800 (1800) 1800 (1800) 1800 (1800)Motor powerRUVAC WSUTRIVACOrdering InformationRBS - B/BCS Roots pump system(supplied with hydrocarbon oil)hp (kW)hp (kW)1.9 (1.4) 1.9 (1.4) 3.3 (2.4) 3.3 (2.4)3.0 (2.2) 3.0 (2.2) 3.0 (2.2) 3.0 (2.2)RBS - B/BCS Roots Pump Systems251/D40B 251/D65B 501/D40B 501/D65BOrdering Information see right page1) For 50 Hz systems, consult the factory2) Determined by operating voltage3) WSU pumps permit start-up at atmospheric pressure (760 Torr)C08 30Oerlikon Leybold Vacuum Full Line Catalog

Ordering Information Part No. 180037V- 0Blower / TRIVAC pumpWSU 251 / D 40 BWSU 251 / D 40 BCS-PFPEWSU 251 / D 65 BWSU 251 / D 65 B-PFPEWSU 501 / D 40 BWSU 501 / D 40 BCS-PFPEWSU 501 / D 65 BWSU 501 / D 65 BCS-PFPEReservedElectrical Control PanelNone208 V230 V460 V243526375465566700123Oerlikon Leybold Vacuum Full Line Catalog31C08

Pump Systems (Only available for purchasein North and South America)HTS Close-Coupled Systemswith Single-Stage SOGEVAC Backing PumpsHTS close-coupled systemStandard Equipment- System consists of single stageSOGEVAC vane pump- Complete air cooled system- Close-coupled RUVAC blower- Compact construction with quietoperation- Manual operation of gas ballast- Spin-on type oil filterOptions- SOGEVAC accessories: oil levelmonitoring, exhaust case gauge,24 V DC gas ballast purge, watercooling- Frame base mounted casterwheels- Frame base mounted levelingpads- Oil drain valves- Inlet dust filter- External OF3000 oil filter- Special motor voltages andfrequencies- Special oil for unique applications- Full NEMA12 electrical controls forstand/stop operation and monitoringof system from remote andlocal locations- 24 V DC gas ballast valve6001400cfm5001001/SV300cfm2001/SV630Pumping Speed400300200501/SV200501/SV3001001/SV200Pumping Speed10008006004001001/SV630100200010 -3 2 4 6 810 -2 10 -1 10 0 10 1 10 2 TorrTotal Pressure10 3010 -3 2 4 6 810 -2 10 -1 10 0 10 1 10 2 TorrTotal Pressure10 3Pumping speed diagram for the HTS close-coupled systemswith WSU series Roots blowers and SOGEVAC SV 200/300 at 60 HzPumping speed diagram for the HTS close-coupled systemswith WSU series Roots blowers and SOGEVAC SV 630 at 60 HzC08 32Oerlikon Leybold Vacuum Full Line Catalog

l 1T SIDE VIEWDimensions for SV 200 and SV 300 onlyl 1l 2w 2w 3h 1h 2w 1FRONT VIEWDimensions for SV 630 onlyl 1l 2W 2 W 3h 1l 3h 2l 6W 1l 5Roots Pump Vane Pump h 1 h 2 l 1 l 2 l 3 l 5 l 6 w 1 w 2 w 3WSU 501 SV 200 29 7/16 (748) 12 17/32 (318) – 9 17/32 (242) – – – 21 11/16 (551) 6 1/8 (156) 10 19/32 (269)WSU 501 SV 300 29 7/16 (748) 12 17/32 (318) – 9 17/32 (242) – – – 21 11/16 (551) 6 1/8 (156) 10 19/32 (269)WSU 1001 SV 200 31 7/16 (799) 12 17/32 (318) – 11 15/16 (303) – – – 21 1/16 (535) 5 1/2 (140) 10 19/32 (269)08.03.M.019-E (WAU/WSU+SV)WSU 1001 SV 300 31 7/16 (799) 12 17/32 (318) – 11 15/16 (303) – – – 22 13/16 (579) 7 1/4 (184) 10 19/32 (269)WSU 2001 SV 630 48 5/16 (1227) 23 13/16 (605) 50 3/16 (1275) – 14 9/16 (370) 60 3/4 (1543) 2 1/2 (64) 34 15/16 (887) 13 7/8 (352) 12 13/32 (315)Dimensional drawing for the HTS close-coupled system with single-stage SOGEVAC backing pumps; dimensions in brackets ( ) are in mmOerlikon Leybold Vacuum Full Line Catalog33C08

Technical DataRUVACSOGEVACPumping speed @ 0.1 Torr cfm (m 3 x h -1 )HTS Close-Coupled Systems501/SV200 501/SV300 1001/SV200 1001/SV300WSU 501 WSU 501 WSU 1001 WSU 1001SV 200 SV 300 SV 200 SV 300277 (470) 285 (483) 504 (855) 545 (925)Ultimate total pressureConnecting flangesInlet port WSUExhaust port SOGEVACOperating voltagePhase / Frequency 1)Full load amps 2)RUVAC WSUSOGEVACTorr(mbar)DNDNV– / Hz< 8 x 10 -3 < 8 x 10 -3 < 8 x 10 -3 < 8 x 10 -3(< 1 x 10 -2 ) (< 1 x 10 -2 ) (< 1 x 10 -2 ) (< 1 x 10 -2 )3" ANSI 3" ANSI 4" ANSI 4" ANSI2" NPT 2" NPT 2" NPT 2" NPT208/230/460 208/230/460 208/230/460 208/230/4603 / 60 3 / 60 3 / 60 3 / 607.8/10.0/5.8 7.8/10.0/5.8 13.0/14.7/8.5 13.0/14.7/8.521.0/18.0/9.0 29.0/25.0/12.5 21.0/18.0/9.0 29.0/25.0/12.5DisplacementRUVAC cfm (m 3 x h -1 )SOGEVAC cfm (m 3 x h -1 )357 (606) 357 (606) 707 (1200) 707 (1200)130 (606) 200 (340) 130 (606) 200 (340)Oil capacityRUVAC WSUSOGEVACqt (l)qt (l)1.10 (1.00) 1.10 (1.00) 2.10 (2.00) 2.10 (2.00)5.30 (5.00) 9.00 (8.50) 5.30 (5.00) 9.00 (8.50)Nominal rotation speedRUVAC WAU/WSU rpm (min -1 )SOGEVAC rpm (min -1 )3600 (3600) 3600 (3600) 3600 (3600) 3600 (3600)1800 (1800) 1800 (1800) 1800 (1800) 1800 (1800)Motor powerRUVAC WSUSOGEVACOrdering InformationHTS - close-coupled systems1) For 50 Hz systems, consult the factory2) Determined by operating voltagehp (kW)hp (kW)3.3 (2.4) 3.3 (2.4) 6.0 (4.4) 6.0 (4.4)7.5 (5.5) 10.0 (7.4) 7.5 (5.5) 10.0 (7.4)HTS Close-Coupled Systems501/SV200 501/SV300 1001/SV200 1001/SV300Ordering Information see right pageC08 34Oerlikon Leybold Vacuum Full Line Catalog

Technical DataRUVACSOGEVACPumping speed @ 0.1 Torr cfm (m 3 x h -1 )HTS Close-Coupled Systems1001/SV6302001/SV6301001 2001SV 630 SV 630610 (1035) 1186 (2031)Ultimate total pressureConnecting flangesInlet port WSUOutlet portOperating voltagePhase / Frequency 1)Full load amps 2)RUVAC WSUSOGEVACTorr(mbar)DNDNV– / Hz< 8 x 10 -3 < 8 x 10 -3(< 1 x 10 -2 ) (< 1 x 10 -2 )4" ANSI 6" ANSI4" ANSI 4" ANSI460 4603 / 60 3 / 608.5 5.029.5 29.5DisplacementRUVAC cfm (m 3 x h -1 )SOGEVAC cfm (m 3 x h -1 )707 (1200) 1449 (2460)495 (840) 495 (840)Oil capacityRUVAC WSUSOGEVACqt (l)qt (l)2.10 (2.0) 4.20 (4.0)37.0 (35.0) 37.0 (35.0)Nominal rotation speedRUVAC WSU rpm (min -1 )SOGEVAC rpm (min -1 )3600 (3600) 3600 (3600)1170 (1170) 1170 (1170)Motor powerRUVAC WSUSOGEVAChp (kW)hp (kW)6.1 (4.5) 11.4 (8.4)25.0 (13.4) 25.0 (13.4)Ordering Information Part No. 180036V-Blower / TRIVAC pumpWSU 501 / SV 200WSU 501 / SV 300WSU 1001 / SV 200WSU 1001 / SV 300WSU 1001 / SV 630WSU 2001 / SV 630Casters & Levelers (SV 200 & SV 300 only)NoneCasters & LevelersCasters onlyLevelers onlyElectrical Control PanelNone208 V (SV 200 & SV 300 only)230 V (SV 200 & SV 300 only)460 V52531213162601230123Oerlikon Leybold Vacuum Full Line Catalog35C08

Pump Systems (Only available for purchasein North and South America)SP Close-Coupled Systems withSCREWLINE Dry Compressing Backing PumpsSP close-coupled systemAdvantages to the User- Reduced maintenance and loweroperating costs- Compact close-coupled designwithout frame- Oil free compression in multiplepump stages- Optimum leak tightness withWSU boosters- Air-cooled- Assembled and testedStandard Equipment- SP630 / WSU1001 close-coupledpump system offering 645 ACFMat 0.3 Torr vacuum- SP630 / WSU2001 close-coupledpump system offering 1235 ACFMat 0.3 Torr vacuumOptions- Electrical controls- Exhaust silencer (loose)- Inlet filter (loose)The new SCREWLINE SP630 drycompressing screw-type vacuumpump is an environmentally friendlyalternative to traditional oil-sealedrotary piston and vane vacuumpumps. This innovative and robustvacuum pump produces a pumpingspeed of 371 cfm and better than0.0075 Torr vacuum. SP630 majoradvantages include improved environment,reduced maintenance,lower operating costs through lessdisposal and the elimination of expensivewater cooling all with no oilcontamination as the need for lubricatingoil in the pumps' compressionstage has been eliminated.When used in conjunction with theOerlikon Leybold Vacuum WSUbooster pumps, pumping speedscan be significantly increased whileachieving oil-free compression inmultiple vacuum pump stages.Oerlikon Leybold Vacuum WSUboosters offer a canned motor design,which eliminates the need forshaft seals and flanged-on motors.A vacuum tight can separates themotor rotor and stator coils. This uniqueOerlikon Leybold Vacuum designprovides the advantage of a moreleak tight vacuum system. The WSUver-sion booster incorporates a bypassvalve feature, which allows forautomatic adjustment to varyingpressure differentials between theinlet and outlet of the pump. Theresult is elimination of costly pressureswitches / amplifiers and faster pumpdown while starting at atmosphericpressure with the aforementionedSP630 vacuum pump.C08 36Oerlikon Leybold Vacuum Full Line Catalog

l 1l 2l 3lw 1ww 2AvailableExhaustSilencerhh 1h 2w 3w 4Roots Pump Vane Pump h h 1 h 2 l l 1 l 2WSU 1001 SP630 50 1/4 (1276) 47 7/8 (1216) 12 7/16 (316) 68 1/2 (1740) 32 3/16 (818) 20 1/4 (514)WSU 2001 SP630 53 25/32 (1366) 47 7/8 (1216) 12 7/16 (316) 71 5/32 (1807) 34 13/16 (884) 20 1/4 (514)Roots Pump Vane Pump l 3 w w 1 w 2 w 3 w 4WSU 1001 SP630 27 3/4 (705) 37 31/32 (964) 12 (305) 21 21/32 (550) 25 7/8 (657) 36 29/32 (937)WSU 1001 SP630 27 3/4 (705) 41 31/32 (1066) 16 (406) 21 21/32 (550 25 7/8 (657) 36 29/32 (937)Dimensional drawing for the SP close-coupled system with SCREWLINE SP630 dry-compressing backing pumps10 410 4cfmcfmPumping speedPumping Speed10 310 2 864210 1WSU 1001 + SP 630SP 63010 -32 4 68 10 -2 10 -110 0 10 1HV PressureTorr10 3Pumping speed SpeedWSU 2001 + SP 63010 3SP 63010 2 864210 110 -32 4 68 10 -2 10 -1 10 0 10 1HV PressureTorr10 3 37Pumping speed diagram for the SP close-coupled systemwith WSU 1001 Roots blower and SCREWLINE SP630 at 60 HzPumping speed diagram for the SP close-coupled systemwith WSU 2001 Roots blower and SCREWLINE SP630 at 60 HzOerlikon Leybold Vacuum Full Line Catalog37C08

Technical Data, 60 HzSP Close-Coupled Systems1001 20011001/SP6302001/SP630RUVAC (WSU possible)P2Outlet port DN 2 100 ISO-K 100 ISO-KBacking pump SCREWLINEP1SP630SP630Pumping speed60 Hz at 0.3 Torr m 3 x h -1 (cfm)645 (380) 1235 (727)Ultimate total pressurewithout gas ballastmbar (Torr) < 1 x 10 -3 (< 7.5 x 10 -4 ) < 1 x 10 -3 (< 7.5 x 10 -4 )Installed motor powerkW (hp)16.2 (21.6) 22.5 (30.0)Noise level to DIN 45 635 with silencerat 10 -1 mbar (7.5 x 10 -2 Torr) dB(A)78 79Weight, total, approx.kg (lbs)870 (1922) 1100 (2430)Connecting flangeInlet port DN 1160 ISO-K 160 ISO-KOrdering InformationRUVAC (WA/WAU/WS/WSU possible)P2SP Close-Coupled Systems1001/SP6302001/SP630WSU 1001 WSU 2001Backing pump SCREWLINEP1SP630SP630Pump system, complete (adaptor version),pallet mounted,with Roots vacuum pumpRUVAC WAUPart No. 180038V1600Part No. 180038V2600C08 38Oerlikon Leybold Vacuum Full Line Catalog

NotesOerlikon Leybold Vacuum Full Line Catalog39C08

AccessoriesSound ProofingA sound proofing box is available asan optional extra so as to reduce thenoise down to the permissible level.Depending on the size of the pumpingsystem, noise reductions between15 and 20 dB(A) are obtained usingour standard soundproofing arrangements.Custom designs of the sound proofingbox allow the noise level to bereduced by up to 35 dB(A).The maintenance side is designed asa door component. A window insertmay be provided in the door or in theside walls to facilitate checking of theoil levels.Ventilation is performed by means ofan electric fan, the fresh air and exhaustducts are located within thesound proofing box. Further optionalextras which may be fitted includeclosed air circulation with integrated,water-cooled heat exchanger and aconnection port for a central exhaustsystem.Dust SeparatorsVacuum processes where largeamounts of particles or dusts arecontributed by the process requirespecial devices to protect thevacuum pumps.Oerlikon Leybold Vacuum has developed– even for high flow rate applications– special dust separators,which can be installed ahead of theintake of the RUTA vacuum pumpsystems. The dust separators havetwo stages. The first stage is a cyclonethat collects dust particles ofcoarse and medium size, the finedust are trapped in filter elements.Dust separators are customdesignedfor the specific process and therequired pumping speed.Dust Filter without CycloneSee below.Diagrammatic section through a dust separatorFiltering surface m 2 0.2 0.5 1.0 2.0 3.0 5.0suitable for pumping speedsmin. m 3 x h -1 (cfm) 100 (58.9) 300 (176.7) 600 (353.4) 1000 (589) 1500 (883.5) 3000 (1767)max. m 3 x h -1 (cfm) 300 (176.7) 800 (471.2) 1500 (883.5) 3000 (1767) 4000 (2356) 8000 (4712)Reduction of pumping speed at< 01 mbar (< 0.75 Torr) % 11 11 11 11 11 11< 06 mbar (< 4.5 Torr) % 9 9 9 9 9 9< 20 mbar (< 15 Torr) % 5 5 5 5 5 5without dust loadC08 40RUTA RA 3001/S630F/G with sound proofing boxIsolation against VibrationsRUTA vacuum pump systems produceonly slight vibrations. To reducethese vibrations even further, vibrationabsorbers can be fitted underthe pump system.Frequency InverterRUVATRONIC RT 5The electronic frequency invertersRUVATRONIC RT 5/251 to 5/16000have been designed specially for usein connection with Oerlikon LeyboldVacuum Roots pumps of the RUVACtype.For each Roots vacuum pump size,a matching frequency inverter isavailable.The main characteristics of theRUVATRONIC RT 5 are:Simulation of a pressure equalisationlineThe software of the frequencyinverters is adapted to each pumpand ensures that the risk of mechanicallyoverloading the pump can beexcluded. In the case of too highpressure differences, the rotationalspeed will be decreased automaticallyuntil the load is reduced towithin the pump’s limits.RUVAC Roots vacuum pumps of thetypes WA, WS and RA (withoutpressure equalisation line) can beswitched on together with the forepumpat atmospheric pressure.Through this, the pumpdown timecan be reduced drastically. Theminimum pumping speed of thebacking pump needs to be consideredin this case.PumpWA/WS 0251WA/WS 0501WA/WS 1001WA/WS 2001RA 3001RA 5001RA 7001RA 9001Required pumping speedfor the backing pump0050 m 3 /h (0029 cfm)0100 m 3 /h (0059 cfm)0200 m 3 /h (0118 cfm)0410 m 3 /h (0241 cfm)0650 m 3 /h (0383 cfm)0930 m 3 /h (0547 cfm)1250 m 3 /h (0736 cfm)3240 m 3 /h (1907 cfm)Oerlikon Leybold Vacuum Full Line Catalog

Operation at up to 3 predefinedspeedsVia floating contacts, the pump canbe operated at one of the 3 predefinedspeeds. Switching over to anotherpre-defined speed is possibleduring operation.Operation at any rotational speedWith a 0 to 10 V signal, any speedcan be pre-defined to operate thepump between the minimum andmaximum rotational speed. Thesoftware reliably ensures that therotational speed cannot drop belowthe minimum speed or exceed themaximum speed.Increase in the pumping speedBy operating the Roots vacuumpumps at frequencies over 50 Hz, thenominal pumping speed of thepumps can be increased. Dependingon the type of pump, an increasebetween 20 and 100% is possible.NotePlease enquire about possibleapplication limitations (processdependent).Electric ControllerIn order to drive all electrical applianceswithin the pump systems, thepump systems may be equipped withstandard control cabinets whichcontain:- Motor protection switch (rated forthe pumps used in each case)- Contactors- Main switch interlocked inaccordance with VDE 0113- Relays for necessary control/sub-systems- ON/OFF push-button for eachpump- Power supply for the installedmonitoring facilities- Fault indicators arranged on alamp panel- Switch-over (through an externalcontact) from local to remoteoperation.The control cabinet may be fittedeither to the frame of the pumpsystem or it may be wallmounted.Beside the standard systems, wemanufacture control systems formuch more complex systems:- Remote control module as a 19"rack module (1/4 width, 3 HU).The start/stop push-buttons andthe related indicators for operationand fault are located on the frontpanel- Pre- and post-operation control- Pressure dependant control- Time-dependant control- Program control- Control for explosion hazard areas- Combinations of the aforementionedversions- Programmable control (PC)- Vacuum gauge with pressureread-out in the control cabinet.Pressure ControlBasically there are several ways inwhich to control the pressure.The equipment which is supplied asstandard for the DOWNSTREAM orBYPASS control systems selected byOerlikon Leybold Vacuum consists of:- Pressure measurement- Controller with control unit- Control valve with position indicator- Engineering.The Downstream Control Systemthrottles the pumping speed of thevacuum pump by changing theconductance of the valve.Control panel on RUTA WAU1001/SV200/GThe advantages offered by thisarrangement are:- No supply of other gases- Closed system- The intake pressure of the pumpsystem is lower than its operatingpressure (thus saving energy,among other things).The second method is the BypassControl System. Here the pressure ismaintained at a constant level by admittingan additional quantity of gas.The advantages offered by thisarrangement are:- Simple design- Much smaller valve- No reduction of the intermediatepressure within the pump.In order to design a pressure controlsystem we need the following information:- Amount of gas- Type of gas- Pressure- Length of the piping- Type of auxiliary energy (electric/pneumatic)- Explosion protection requiredyes/noAdditional complex control arrangementsare available, for example with:- Adjustable pressure characteristic- Adjustable timing- Speed control- Combination with other controlfacilities.Oerlikon Leybold Vacuum Full Line Catalog41C08

Dust Filter F-xxx-CThe highly efficient dust filtersF-xxx-C are fitted to the inlet of theRUVAC pumps. The filter protects theRoots vacuum pumps against theintake of dust.Clearance forServicefilter replacementarea neededCGFThe dust filters are equipped with aneasy to replace filter element. In thecase of the filters F-1001-C or larger,the gas enters into the housing abovethe filter element. Thus the likelihoodof puncturing the filter is reduced.AEDNDIn the case of the dust filter F-501-C,the filter element is protected by abaffle.BDNAll vacuum dust filters are rated forpressures up to 1200 mbar (900 Torr)abs. max.Typ DN A B C D E F GF-501-C mm 65 1) 267 32 222 140 32 194 235in. 10.51 1.26 8.74 5.51 1.26 7.64 9.25F-1001-C mm 100 1) 692 76 356 470 76 310 508in. 27.24 2.99 14.02 18.50 2.99 12.20 20.00F-2001-C mm 150 1) 740 102 470 521 102 406 381in. 29.13 4.02 18.50 20.51 4.02 15.98 15.00F-2001-C plus mm 150 1) 740 102 470 521 102 406 508in. 29.13 4.02 18.50 20.51 4.02 15.98 20.00F-5001-C mm 200 2) 965 102 572 648 102 508 508in. 37.99 4.02 22.52 25.51 4.02 20.00 20.00F-7001-C mm 250 2) 1461 102 672 1143 102 610 838in. 57.52 4.02 26.46 45.00 4.02 24.02 32.99F-9001-C mm 300 2) 1461 102 672 1143 102 610 838in. 57.52 4.02 26.46 45.00 4.02 24.02 32.99F-13001-C mm 300 2) 1765 102 672 1448 102 610 635in. 69.49 4.02 26.46 57.01 4.02 24.02 25.001) The hole pattern corresponds to PN 6 and may be connected by using collar flanges to ISO-Kcomponents2) The hole pattern corresponds to PN 10Dimensional drawing for the dust filters F-xxx-CC08 42Oerlikon Leybold Vacuum Full Line Catalog

Technical DataDust filter F-xxx-CDust FilterSeparation at 10 μm %Separation at 05 μm %Separation at 02 μm %TemperatureDust filter forWA/WS/WAU/WSU 501WA/WS/WAU/WSU 1001WA/WS/WAU/WSU 2001RA 3001 und RA 5001RA 7001RA 9001RA 13000°C (°F)Polyester filter cartridge> 99.9> 99–-25 to +100 (-13 to +212)F-501-CF-1001-CF-2001-C / F-2001-C plusF-5001-CF-7001-CF-9001-CF-13001-CPaper filter cartridge–> 99.9> 99-25 to +100 (-13 to +212)F-501-CF-1001-CF-2001-C / F-2001-C plusF-5001-CF-7001-CF-9001-CF-13001-CTechnical DataSurface area, approx.Polyester m 2Paper m 2Weight, approx.kg (lbs)Dust filterF-501-C F-1001-C F-2001-C F-2001-C plus0.4 1.0 1.5 2.61.3 3.0 4.0 6.37.0 (15.45) 29.0 (64.02) 50.0 (110.38) 51.0 (112.58)Technical DataSurface area, approx.Polyester m 2Paper m 2Weight, approx.kg (lbs)Dust filterF-5001-C F-7001-C F-9001-C F-13001-C4.5 9.0 9.0 14.011.5 26.0 26.0 37.083.0 (138.22) 171.0 (377.48) 171.0 (377.48) 209.0 (461.37)Ordering InformationDust FilterF-501-CReplacement filter element FE-501-CF-1001-CReplacement filter element FE-1001-CF-2001-CReplacement filter element FE-2001-CF-2001-C plus 1)Replacement filter element FE-2001-C plusF-5001-CReplacement filter element FE-5001-CF-7001-CReplacement filter element FE-7001/9001-CF-9001-CReplacement filter element FE-7001/9001-CF-13001-CReplacement filter element FE-13001-CDust filter F-xxx-CPolyester filter elementPaper filter elementPart No. 500 001 403 Part No. 500 001 404Part No. 500 005 629 Part No. 500 005 630Part No. 500 000 301 Part No. 500 000 302Part No. 500 000 313 Part No. 500 000 314Part No. 500 000 303 Part No. 500 000 304Part No. 500 000 315 Part No. 500 000 316Part No. 500 001 367 Part No. 500 001 368Part No. 500 005 631 Part No. 500 005 632Part No. 500 000 305 Part No. 500 000 306Part No. 500 000 317 Part No. 500 000 318Part No. 500 000 307 Part No. 500 000 308Part No. 500 000 319 Part No. 500 000 320(2 pieces are required)Part No. 500 000 309 Part No. 500 000 310Part No. 500 000 319 Part No. 500 000 320(2 pieces are required)Part No. 500 000 311 Part No. 500 000 312Part No. 500 000 321 Part No. 500 000 322(2 pieces are required) (2 pieces are required)Oerlikon Leybold Vacuum Full Line Catalog43C08

MiscellaneousChecklist for InquiriesTo Oerlikon Leybold Vacuum GmbHDept. SolutionsFax: +49 (0)221/347 - 1277From company:Name/Department:Phone:Fax:Date:First page of:MAKE USE OF OUR KNOW-HOW !Simply fax the completed checklist to us. Our engineers will design a pump system which exactly matches yourrequirements. You will receive an offer shortly.1. In what kind of application willthe pump system be used(e.g. drying, distillation)?2. Is the process run❑ continuously ❑ in batches:6. How high is the ambienttemperature?- when installed in the building:min. °C / max. °C- when installed out in the openmin. °C / max. °C7. How high is the intaketemperature?°Cd) Viscositye) Melting pointf) Special characteristics11. Must explosion hazardregulations be observed?❑ yes ❑ noif yes, which?3. What is the volume of thevacuum chamber?m 38. What is the composition of thegas which is to be pumped.Designation:a) b)c) d)12. What kind of electricalsupplies are available?a) Voltageb) Frequency4. What pump-down times arerequired/desired?min/he) f)9. Quantity (kg/h or Nm 3 /h),traces (%):a) b)c) d)13. What kind of mechanicalconnection specifications areplanned?a) Length of the intake lineb) Diameter of the intake line5. What operating pressures areplanned?mbare) f)10. In case of materials notcommonly listed in the tables pleasestate:a) Molecular weightb) Thermal capacityc) Vapor pressure14. Which cooling media areavailable (water, brine, etc.)? Whichtemperature?min. °Cmax. °CC08 44Oerlikon Leybold Vacuum Full Line Catalog

NotesOerlikon Leybold Vacuum Full Line Catalog45C08

Sales and ServiceGermany Europe AsiaLV_00931_2007 05.07OerlikonLeybold Vacuum GmbHBonner Strasse 498D-50968 ColognePhone: +49-(0)221-347 1234Fax: +49-(0)221-347 1245sales.vacuum@oerlikon.comwww.oerlikon.comOerlikonLeybold Vacuum GmbHSales Area North/NortheastBranch Office BerlinBuschkrugallee 331. ObergeschossD-12359 BerlinPhone: +49-(0)30-435 609 0Fax: +49-(0)30-435 609 10sales.vacuum.bn@oerlikon.comOerlikonLeybold Vacuum GmbHSales Area South/SouthwestBranch Office MunichSendlinger Strasse 7D-80331 MunichPhone: +49-(0)89-357 33 9-10Fax: +49-(0)89-357 33 9-33sales.vacuum.mn@oerlikon.comservice.vacuum.mn@oerlikon.comOerlikonLeybold Vacuum GmbHSales Area West & BeneluxBranch Office CologneBonner Strasse 498D-50968 ColognePhone: +49-(0)221-347 1270Fax: +49-(0)221-347 1291sales.vacuum.kn@oerlikon.comOerlikonLeybold Vacuum GmbHService Competence CenterEmil-Hoffmann-Strasse 43D-50996 Cologne-SuerthPhone: +49-(0)221-347 1439Fax: +49-(0)221-347 1945service.vacuum.kn@oerlikon.comOerlikonLeybold Vacuum GmbHMobil Customer ServiceEmil-Hoffmann-Strasse 43D-50996 Cologne-SuerthPhone: +49-(0)221-347 1765Fax: +49-(0)221-347 1944service.vacuum.kn@oerlikon.comOerlikonLeybold Vacuum GmbH,DresdenZur Wetterwarte 50, Haus 304D-01109 DresdenService:Phone: +49-(0)351-88 55 00Fax: +49-(0)351-88 55 041info.vacuum.dr@oerlikon.comBelgiumOerlikonLeybold Vacuum USA Inc.5700 Mellon RoadUSA-Export, PA 15632Phone: +1-724-327-5700Fax: +1-724-325-3577info.vacuum.ex@oerlikon.comOerlikonLeybold Vacuum Nederland B.V.Belgisch bijkantoorLeuvensesteenweg 542-9AB-1930 ZaventemSales:Phone: +32-2-711 00 83Fax: +32-2-720 83 38sales.vacuum.zv@oerlikon.comService:Phone: +32-2-711 00 82Fax: +32-2-720 83 38service.vacuum.zv@oerlikon.comFranceOerlikonLeybold Vacuum France S.A.7, Avenue du QuébecZ.A. Courtaboeuf 1 - B.P. 42F-91942 Courtaboeuf CedexSales and Service:Phone: +33-1-69 82 48 00Fax: +33-1-69 07 57 38sales.vacuum.or@oerlikon.comOerlikonLeybold Vacuum France S.A.Valence Factory640, Rue A. Bergès - B.P. 107F-26501 Bourg-lès-Valence CedexPhone: +33-4-75 82 33 00Fax: +33-4-75 82 92 69info.vacuum.vc@oerlikon.comGreat BritainOerlikonLeybold Vacuum UK Ltd.Unit 2Silverglade Business ParkLeatherhead RoadUK-Chessington, Surrey KT9 2QLSales:Phone: +44-13-7273 7300Fax: +44-13-7273 7301sales.vacuum.ln@oerlikon.comService:Phone: +44-20-8971 7030Fax: +44-20-8971 7003service.vacuum.ln@oerlikon.comItalyOerlikonLeybold Vacuum Italia S.p.A.8, Via TrasimenoI-20128 MilanoSales:Phone: +39-02-27 22 31Fax: +39-02-27 20 96 41sales.vacuum.mi@oerlikon.comService:Phone: +39-02-27 22 31Fax: +39-02-27 22 32 17service.vacuum.mi@oerlikon.comOerlikonLeybold Vacuum Italia S.p.A.Field Service BaseZ.I. Le CapanneI-05021 Acquasparta (TR)Phone: +39-0744-93 03 93Fax: +39-0744-94 42 87service.vacuum.mi@oerlikon.comNetherlandsOerlikonLeybold Vacuum Nederland B.V.Proostwetering 24NNL-3543 AE UtrechtSales and Service:Phone: +31-(30) 242 6330Fax: +31-(30) 242 6331sales.vacuum.ut@oerlikon.comservice.vacuum.ut@oerlikon.comSpainOerlikonLeybold Vacuum Spain, S.A.C/. Huelva, 7E-08940 Cornellà de Llobregat(Barcelona)Sales:Phone: +34-93-666 46 16Fax: +34-93-666 43 70sales.vacuum.ba@oerlikon.comService:Phone: +34-93-666 49 51Fax: +34-93-685 40 10service.vacuum.ba@oerlikon.comSwedenOerlikonLeybold Vacuum Scandinavia ABBox 9084SE-40092 GöteborgSales and Service:Phone: +46-31-68 84 70Fax: +46-31-68 39 39info.vacuum.gt@oerlikon.comVisiting/delivery address:Datavägen 57BSE-43632 AskimSwitzerlandOerlikonLeybold Vacuum Schweiz AGLeutschenbachstrasse 55CH-8050 ZürichSales:Phone: +41-044-308 40 50Fax: +41-044-302 43 73sales.vacuum.zh@oerlikon.comService:Phone: +41-044-308 40 62Fax: +41-044-308 40 60service.vacuum.zh@oerlikon.comAmericaUSAOerlikonLeybold Vacuum USA Inc.5700 Mellon RoadUSA-Export, PA 15632Phone: +1-724-327-5700Fax: +1-724-325-3577info.vacuum.ex@oerlikon.comSales:Eastern & Central time zonesPhone: +1-724-327-5700Fax: +1-724-333-1217Pacific, Mountain, Alaskan &Hawaiian time zonesPhone: +1-480-752-9191Fax: +1-480-752-9494Service:Phone: +1-724-327-5700Fax: +1-724-325-3577OerlikonLeybold Vacuum GmbHBonner Strasse 498D-50968 ColognePhone: +49-(0)221-347 0Fax: +49-(0)221-347 1250info.vacuum@oerlikon.comP.R. ChinaOerlikonLeybold Vacuum (Tianjin)International Trade Co. Ltd.Beichen EconomicDevelopment Area (BEDA),Shanghai RoadTianjin 300400ChinaSales and Service:Phone: +86-22-2697 0808Fax: +86-22-2697 4061Fax: +86-22-2697 2017sales.vacuum.tj@oerlikon.comservice.vacuum.tj@oerlikon.comOerlikonLeybold Vacuum(Tianjin) Co. Ltd.Beichen EconomicDevelopment Area (BEDA),Shanghai RoadTianjin 300400ChinaSales and Service:Phone: +86-22-2697 0808Fax: +86-22-2697 4061Fax: +86-22-2697 2017info.vacuum.tj@oerlikon.comservice.vacuum.tj@oerlikon.comOerlikonLeybold Vacuum (Tianjin)International Trade Co. Ltd.Shanghai Branch:Add: No.3376 Futedong San Rd.Waigaoqiao FTZShanghai 200131ChinaSales and Service:Phone: +86-21-5064-4666Fax: +86-21-5064-4668info.vacuum.sh@oerlikon.comservice.vacuum.tj@oerlikon.comOerlikonLeybold Vacuum (Tianjin)International Trade Co. Ltd.Guangzhou Office andService Center1st F, Main BuildingScience City Plaza,No.111 Science Revenue,Guangzhou Science City(GZSC) 510663, Guangzhou,ChinaSales:Phone: +86-20-8723-7873Phone: +86-20-8723-7597Fax: +86-20-8723-7875info.vacuum.gz@oerlikon.comservice.vacuum.tj@oerlikon.comOerlikonLeybold Vacuum (Tianjin)International Trade Co. Ltd.Beijing Branch:1-908, Beijing Landmark Towers8 North Dongsanhuan RoadChaoyang DistrictBeijing 100004ChinaSales:Phone: +86-10-6590-7622Fax: +86-10-6590-7607sales.vacuum.bj@oerlikon.comIndiaOerlikonLeybold Vacuum India Pvt Ltd.EL-22, J BlockMIDC BhosariPune 411026IndiaSales and Service:Phone: +91-20-3061 60000Fax: +91-20-2712 1571sales.vacuum.pu@oerlikon.comservice.vacuum.pu@oerlikon.comJapanOerlikonLeybold VacuumJapan Co., Ltd.Headquarter23-3, Shin-Yokohama3-chomeTobu A.K. Bldg. 4th FloorKohoku-kuYokohama-shi 222-0033Sales:Phone: +81-45-471-3330Fax: +81-45-471-3323info.vacuum.yh@oerlikon.comsales.vacuum.yh@oerlikon.comOerlikonLeybold VacuumJapan Co., Ltd.Osaka Sales Office5-13, Kawagishi-machiSuita-chiOsaka 564-0037Phone: +81-6-6393-5211Fax: +81-6-6393-5215info.vacuum.os@oerlikon.comsales.vacuum.os@oerlikon.comOerlikonLeybold VacuumJapan Co., Ltd.Tsukuba Technical Service CenterKogyo Danchi21, Kasuminosato,Ami-machi, Inashiki-gunIbaraki-ken, 300-0315Service:Phone: +81-298 89 2841Fax: +81-298 89 2838info.vacuum.iik@oerlikon.comsales.vacuum.iik@oerlikon.comKoreaOerlikonLeybold Vacuum Korea Ltd.3F. Jellzone 2 Tower, 159-4Jeongja-Dong, Bundang-GuSungnam-Si, Gyeonggi-DoKorea 463-384Sales:Phone: +82-31 785 1367Fax: +82-31 785 1359623-7, Upsung-DongCheonan-SiChungcheongnam-DoKorea 330-290Service:Phone: +82-41 589 3035Fax: +82-41 588 0166SingaporeOerlikonLeybold VacuumSingapore Pte Ltd.No.1, International Business ParkB1-20B, The SynergySingapore 609917Sales and Service:Phone: +65-6303 7000Fax: +65-67730 039sales.vacuum.sg@oerlikon.comservice.vacuum.sg@oerlikon.comTaiwanOerlikonLeybold Vacuum Taiwan Ltd.No 416-1, Sec. 3Chung-Hsin Rd., Chu-TungHsin-Chu, Taiwan, R.O.C.Sales and Service:Phone: +886-3-500 1688Fax: +886-3-583 3999sales.vacuum.hc@oerlikon.comservice.vacuum.hc@oerlikon.comwww.oerlikon.com