Reading Materials - CDTL - National University of Singapore
Reading Materials - CDTL - National University of Singapore
Reading Materials - CDTL - National University of Singapore
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Version 3High magnetic materials have a number <strong>of</strong> advantagescompared to s<strong>of</strong>t magnetic materials. Specifically, hardmagnetic materials such as CoNi, CoPtP, NdFeB, and NiFeexhibit excellent magnetic properties including highcoercivity, high remanence and high energy product.These properties enable hard magnetic materials to beused in various MEMS applications. For example, CoNiand CoPtP alloys, with the properties <strong>of</strong> high remanenceand high coercivity, can be used as micro-actuator. Thebulk NdFeB alloys, which have high coercivity, highremanence and high energy product, have been used inmicromachining [2]. NiFe alloys, because <strong>of</strong> theirremanence, are <strong>of</strong>ten used in microsensors.