Reading Materials - CDTL - National University of Singapore

Reading Materials - CDTL - National University of Singapore Reading Materials - CDTL - National University of Singapore

cdtl.nus.edu.sg
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12.07.2015 Views

Version 2Hard magnetic materials have a number of advantagescompared to soft magnetic materials. Hard magneticmaterials have good magnetic properties such as highcoercivity, high remanence and high energy product. Allthese properties are very important for MEMSapplications. However, the applications of hard magneticmaterials depend on the magnetic properties of materials.For example, CoNi and CoPtP alloys provide the highremanence and high coercivity, so they are used as microactuator[1]. The bulk NdFeB alloys have high coercivity,high remanence and high energy product. Therefore, theyhave been used in micromachining [2]. Also, NiFe alloysare used in microsensors because of their remanence.

Version 3High magnetic materials have a number of advantagescompared to soft magnetic materials. Specifically, hardmagnetic materials such as CoNi, CoPtP, NdFeB, and NiFeexhibit excellent magnetic properties including highcoercivity, high remanence and high energy product.These properties enable hard magnetic materials to beused in various MEMS applications. For example, CoNiand CoPtP alloys, with the properties of high remanenceand high coercivity, can be used as micro-actuator. Thebulk NdFeB alloys, which have high coercivity, highremanence and high energy product, have been used inmicromachining [2]. NiFe alloys, because of theirremanence, are often used in microsensors.

Version 2Hard magnetic materials have a number <strong>of</strong> advantagescompared to s<strong>of</strong>t magnetic materials. Hard magneticmaterials have good magnetic properties such as highcoercivity, high remanence and high energy product. Allthese properties are very important for MEMSapplications. However, the applications <strong>of</strong> hard magneticmaterials depend on the magnetic properties <strong>of</strong> materials.For example, CoNi and CoPtP alloys provide the highremanence and high coercivity, so they are used as microactuator[1]. The bulk NdFeB alloys have high coercivity,high remanence and high energy product. Therefore, theyhave been used in micromachining [2]. Also, NiFe alloysare used in microsensors because <strong>of</strong> their remanence.

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