CKD series FSM-H small flow sensor - BIBUS France

Small size flow sensor applicationsRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterActive in a wide variety of fieldsSmall size flow sensor is used for machines, automobiles, measuring instruments and precision devices, etc., inadvanced fields such as semiconductors and biomechanics, and in applications for medical materials and foods.Working fluidAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingAmenityIndustrySensor applicationsLeakage inspectionPinhole inspectionConfirmation of ionizer purge gasWelding gas controlPurge gas flow controlContact confirmationVacuum confirmationAutomobile, etc.Liquid crystal Confirmation of ionizer purge gasCompatible with a variety of flow ranges.The inline speed controller (special order)can be used as a simpleflow controller.Semiconductor Purge gas flow controlControl of purge gas is vital inmaintaining system performance.Miniature size makes this ideal forassembly into the device.Food/Medical Leakage inspectionThe inspection cycle time can be shortened.(Measurements can be made immediately after filling container.)Even when the pressure is extremely low, the output is made in proportion to thepinhole, so the acceptability can be judged and the status can be confirmed.Electric part Vacuum confirmation(1) High-speed response comparable to pressure sensor -- response is determined by the inner volume of piping and pressure. etc.(2) Flow detection eliminates adjustment and incorrect detections resulting from fluctuating pressure.(3) Nozzle and filter clogging is detected.(4) Control suction errors, such as inclined suction, by detection flow.Comparison with pressure sensor (Nozzle diameter:Small size flow sensor (using FSM-N-010) Pressure sensor(m /min)Flow difference : 830m /minPressure difference : 2kPa83070Very clear!0Suction0SuctionWelding argon and carbon gas flow controlCompatible with a variety of flow ranges.Machinery manufacturing Contact confirmationEven flows that cannot be determined with apressure sensor because differential pressureis low are determined precisely.0.3, vacuum pressure: -70 kPa)Control of N2 gas for laser oscillator andsemiconductor manufacturing equipment1272

Refrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)Ending1274Safety precautionsPneumatic components: Warning and CautionsAlways read this section before starting use.Refer to Intro 67 for general precautions.Small size flow sensor FSM-H/FSM/FSM-V Series1. Working fluidDANGERDo not use this product with flammable fluids.When this product is used for liquefied gas, evaporategas. This product could fail if processing liquefiedgas.WARNINGThis product cannot be used as a business meter.This product does not conform to Measuring Laws, andthus cannot be used for commercial purposes. Use thissensor for factory applications.Do not use fluids other than the applicable fluid becauseaccuracy cannot be guaranteed.Compressed air from the compressor contains drainage- water, oil oxide, foreign substances, etc. - soinstall a filter, air dryer, and oil mist filter on the primaryside (upper stream side) of the sensor. Thesensor's meshing rectifies flow in the pipe. It doesnot filter out foreign substances, so provide a filter.Sourcepressure(Recommended circuit)AirdryerWhen using a valve on the primary side of this product,use only an oil-prohibit specification valve. Thissensor could malfunction or fail if exposed to splatteringgrease, oil, etc.2. Working EnvironmentDANGERFilterRegulator Oil mist Flow sensorfilter FSM Series(Micro alescer)Flammable environmentDo not use this product in an explosive gas environment.The structure is not explosion-proof, and explosionsor fires could occur.WARNINGCorrosive environmentDo not use this product in an environment containingcorrosive gases such as sulfurous acid.Design & SelectionAmbient temperature, fluid temperatureUse ambient temperature/fluid temperature in 0 theto 50°C within specified range.Do not use this product where temperature suddenly changes, even ifambient temperature is within specifications. Otherwise, dew could form.Maximum working pressure and specified flow rate rangeApplications exceeding the maximum working pressureand specified flow rate range may result in faults.Use this product only within the specified range.Drip-proof environmentThis product's protective structure is IP40 or equivalent. Donot install it where it could be exposed to water, salt, dust,or cutting chips, or a compressed or decompressed environment.This product cannot be used where the temperaturechanges sharply or in a highly humid environment whereinternal damage could be caused by dew condensation.3. Flow unitCAUTIONThis product's flow rate is measured at a mass flow unaffectedby temperature or pressure. The unit is /min., butthis is the display when the mass flow is converted to volumetricflow at 20°C 1 barometric pressure (101 kPa).4. Withstand pressureCAUTIONWithstanding pressure differs by each series. Selectiontime care must be taken.5. OverflowCAUTIONWith each series, no problem will occur in the sensor,even in an overflow double the measurement range.If dynamic pressure is applied near the maximumworking pressure (when a pressure difference exceedingthe maximum working pressure is applied betweenprimary and secondary sides), a problem could occurwith the sensor. If dynamic pressure is applied,such as when a workpiece is filled for leakage inspection,provide a bypass circuit or restrictor so that dynamicpressure is not applied to the sensor.

FSM-H/FSM/FSM-V SeriesRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingCAUTIONFor metal body (stainless steel, aluminum) power supplies,use DC-stabilized power separated from the ACprimary side. Connect either the plus or minus side ofthe power supply to the F.G. A varistor (limit voltage 40V) is connected between the metal body internal powercircuit and metal body to prevent dielectric breakdownof the sensor. Do not conduct a withstand voltage testor insulation resistance test between the internal powercircuit and metal body. Disconnect wiring if this testingis required. An excessive potential difference betweenpower and metal body will burn internal parts.After installation, connecting and wiring the metal body,electrical welding of the device or frame, or short-circuitaccidents, etc., could cause welding current, excessivehigh voltage caused by welding, or surge voltage, etc.,to run through wiring or ground line connected betweensuch devices, damaging lines or devices. Do any worksuch as electrical wiring after removing this device anddisconnecting all electric wires connected to the F.G.PipingCAUTIONWhen piping FSM-H/FSM, check that the fluid's directionmatches the direction indicated on the component.With the FSM-V, check the direction of the arrow andpipe and install based on the fluid flow direction andswitch operation.(Example of piping) Switch typeSuctionBlowSuction nozzleVacuum filterWhen installing the sensor on piping, see the torquebelow so that excessive screw-in torque or load torqueis not applied to the connection port.(Reference value)Port threadM5Rc1/8 (G1/8)Rc1/4- +Suction side: + sideBlow side: -side(Example of piping) Analog typeSuctionBlowSuction nozzleVacuum filter1V5VSuction side: 3 to 5VBlow side: 3 to 1 VSwitch valveSwitch valveInstallation & AdjustmentFlow directionFlow directionFlow directionFlow directionTightening torque N·m0.5 to 1.03 to 56 to 8Vacuum sourceAir sourceVacuum sourceAir sourceAttach a wrench to metal sections when tightening pipesso that pressure is not applied to the resin section.Check that sealing tape or adhesive does not get insideduring piping.When winding fluorine resin sealing tape around threads, windsealing tape once or twice, leaving two to three threads openat the end of the screw. Press tape with a nail tip to stick it ontothreads.When using liquid sealing agent, leave one to twothreads open from the end, and avoid applying too much. Checkthat the sealing agent does not get on device threads.(Well)Seal tapeSolid/liquid sealantSolidliquidsealant(Poor) (Well) (Poor)SolidliquidsealantConnect a joint even when using the metal body typewith the out side opened. The port filter could comeoff.When using a push in joint, accurately insert tubeand confirm that it does not become dislocated evenwhen pulled. Cut tube at a right angle with a dedicatedcutter before use.Connect fiber tubing as follows (steps (1) to (5)).(1) Set the collar to the very back.(2) Cut the end of fiber tubingat a right angle.Collar(4) Insert fiber tubingat the last position.(5) Pull the collar forward tolock it in place.Clean out pipe with air blow to remove foreign substances,swarf, etc., before piping. The rectifier or sensorchip could be damaged if a large amount of foreignmatter, swarf, etc., occurs.(3) Pass the collar through, andconfirm that fiber tubing is correctlyinserted during work.1276

FSM-H/FSM/FSM-V SeriesAdjustmentCAUTIONIf switches are operated when flow is not stable, suchas pulsating, operation may be unstable. In this case,provide sufficient margin between the two setting valuesand avoid setting switches in an unstable area.Confirm that switch operation is stable before use.When setting the FSM-V Series switch output, use aflat-tip screwdriver fitting the trimmer groove (0.5 wide,1.9 long, and 0.45 deep) or a Phillips screwdriver for0 bits. The trimmer rotates 240 degrees and couldbreak if turned more or forced when turned.InstallationCAUTIONThis product can be installed in any direction; top,bottom, left, or right.FSM-H/FSM SeriesHorizontal installation (through hole used)Bracket installation (*bracket used)Vertical installation (bottom side female thread used)* A dedicated bracket(option) is available.(Model no.: FSM-LB1)(Refer to page 1298)FSM-V SeriesFor discrete miniature flow sensorInstall using the two penetration holes (side.3.2) on theSeparate indicator FSM-H-D *, FSM-A-D * or FSM-V-D * commonA mounting bracket and kit (option) are available forinstalling the separated display.Bracket model no.: PPD3-KL-DBracket model no.: PPD3-KD-D2-nominal 3P tight: One side installation foot (radial)2-nominal 3P tightInstallation hole machining dimensions502-M318*33.50.318: Both sides installation foot (parallel)Installation hole machining dimensions4-M3Bracket model no.: PPD3-KHS-D : With panel mount bracket set and panel guardInstallation hole machining dimensionsBracket model no.: PPD3-KC : Operation protective coverProtective coverRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingFour M3 (length 6mm) setscrews forfixing includedProtective cover holderSmallFlow sensor1277

FSM-VFM SeriesEven if the flow range is exceeded, analog output willcontinue."Hi" is displayed.Note that this is outside guaranteed precision.Analog output is also made when fluid flows in reverse.(This exceeds the guaranteed accuracy. Excludingthe FSM-V Series.) If the signal could be confusedwith the forward direction signal, check thatthere is no problem with the PLC sequence program.Miniature inline filter FSM-VFM SeriesDo not use this product for vacuum circuits that couldcome in contact with acids, alkaline, carboxylic acid,other organic compounds, screw-lock agent, solvent,or alcohol solutions, or air containing these substances.The body could be damaged, and cause a hazardoussituation.Use designated tubing and plastic plugs.Tube outer diameter precision· Polyamide tube: Within 0.1mm· Polyurethane tube(Up to 6): Within 0.1mm( 8 and over): Within+0.1- 0.15 mmCKD recommended modelPlastic plugSoft nylon tubePolyurethane rubber tubeUrethane tubeGWP*-B SeriesF15** SeriesU95** SeriesNU-04/06 SeriesRead "Safety precaution on joint tube" for push-in joint.Regularly inspect the polyamide case for cracks, damage,and other deterioration. Clean and replace asnecessary.Filter element clogging will decrease vacuum sourceconductance. Regularly inspect, clean, and replacethe element.During Use & MaintenanceCAUTION Use a household-grade neutral detergent to clean thebody, then rinse with water.If small particles such as dust during suction enterthe flow path, foreign matter will not be filtered andmay flow to the secondary side.Select a filter suiting the purpose.Replacing the elementJointJoint fixing pin12Element(1) Pull out the joint fixing pin using a blunt jig, etc.The joint fixing pin must reused, so do not lose it.(2) Pull out the joint.(3) Replace the element, and insert the joint.(4) Insert the joint fixing pin, and fix the joint.43Refrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingReturn the container to atmospheric pressure beforeremoving the body to clean or replace, etc., the filterelement.The flow direction is oriented. Check the arrow onthe body during reassembly.Check that the required vacuum degree is attained inthe circuit after reassembly.SmallFlow sensor1279

Refrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterSmall flow sensorSmall flow sensor extremely small flow typeIndicator type/analog output typeFSM-H Series (air/nitrogen gas)Flow rate range: 0.25 to 5, 0.5 to 10, 2.5 to 50, 50 to 100m/min.Auto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)Indicator type specificationsIndicator typeDescriptionsFSM-H-N/P-005ML FSM-H-N/P-010ML FSM-H-N/P-050ML FSM-H-N/P-100MLFlow rate range m /min. Note 1Precision Working conditionsIndicatorInstallationWorking fluidMax. working pressure MPaMin. working pressure MPaWithstanding pressure MPaAmbient temperature/humidityWorking fluid temperatureLinearity (display/analog output)Pressure characteristicsTemperature characteristicsRepeatabilityResponsivenessType of displayDisplay min. unit Note 6Output typePower voltageCurrent consumptionLead wireFunctionsInstallation attitudeStrait piping sectionProtective structureProtective circuit Note 4EMC directiveIndicator type weight0.25 to 5 0.5 to 10 2.5 to 50 5 to 100Clean air (JIS B 8392-1. 1. 1 to 5. 6. 2), compressed air (JIS B 8392-1. 1. 1 to 1. 6. 2) Note 2 , N2 gas Note 31.0-0.091.50 to 50 , 90%RH or less0 to 50 (with no dew condensation)3% F.S. or less (0.1MPa, 25 , flow rate range 5 to 100%F.S.)3% F.S. or less (-0.09 to 1.0MPa, where 0.1MPa is reference)0.2%F.S./ or less (15 to 35 , where 25 is reference)0.5%F.S. or less50ms or less Note 5Flow display (3.5-digit 7-segment display, orange), run and switch output display (orange)0.01mL/min. Note 1 0.1mL/min. Note 1Switch output 2 points(NPN or PNP open collector output, 30 VDC and 50 mA or less, voltage drop of 2.4 V or less, PLC- and relay-compatible)Analog output 1 point(1 to 5V voltage output, connected load impedance 50K and over)12/24 VDC (10.8 to 26.4V)60mA or less3.7 0.2mm 2 x 5 conductor 1mFlow display, flow display peak hold, switch output, analog outputHorizontal or verticalNot requiredIEC standards IP40Power supply reverse connection protection, switch output reverse connection protection, switch output load short-circuit protectionEN55011, EN61000-6-2, EN1000-4-2/3/4/6/8Unit: gModel no.Port size (body material)FSM-N/P-005 FSM-N/P-010 FSM-N/P-050 FSM-N/P-1006A Rc1/8 (stainless steel)6G G1/8 (stainless steel)150 150 150 150EndingAnalog output type weightModel no.Port size (body material)6A Rc1/8 (stainless steel)6G G1/8 (stainless steel)FSM-A-005 FSM-A-010 FSM-A-050 FSM-A-100140 140 140 140Unit: g1280

Analog output type specifications (without display)DescriptionsFlow rate range m /min. Note 1Precision Working conditionsInstallationWorking fluidMax. working pressureMin. working pressureWithstanding pressureMPaMPaMPaAmbient temperature/humidityWorking fluid temperatureLinearity (analog output)Pressure characteristicsTemperature characteristicsRepeatabilityResponsivenessType of displayOutput typePower voltageCurrent consumptionLead wireFunctionsProtective circuit Note 4Installation attitudeStrait piping sectionProtective structureEMC directiveAnalog output typeFSM-H SeriesSpecificationsFSM-H-A-005ML FSM-H-A-010ML FSM-H-A-050ML FSM-H-A-100ML0.25 to 5 0.5 to 10 2.5 to 50 5 to 100Clean air (JIS B 8392-1. 1. 1 to 5. 6. 2), compressed air (JIS B 8392-1. 1. 1 to 1. 6. 2) Note 2 , N2 gas Note 31.0-0.091.50 to 50 and 90%RH or less0 to 50 (with no dew condensation)3% F.S. or less (0.1MPa, 25 , flow rate range 5 to 100%F.S.)3% F.S. or less (-0.09 to 1.0MPa, where 0.1MPa is reference)0.2%F.S./ or less (15 to 35 , where 25 is reference)0.5%F.S. or less50ms or less Note 5Power display (green)Analog output 1 point (1 to 5V voltage output, connected load impedance 50K12/24 VDC (10.8 to 26.4V)50mA or less3.7 0.2mm 2 x 3 conductor 1mAnalog outputPower supply reverse connection protectionHorizontal or verticalNot requiredIEC standards IP40EN55011, EN61000-6-2, EN1000-4-2/3/4/6/8and over)Note 1: Converted to volumetric flow at 20 1 barometric pressure (101kPa)Note 2: When using compressed air, use clean air that complies to JIS B 8392-1:2003 Class 1.1.1 to 1.6.2. Compressed air from the compressorcontains drainage (water, oxidized oil, foreign matter, etc.). Install a filter (filtration: 5 m), air dryer (minimum pressure dew point: 10 orless), and oil mist filter (maximum oil concentration: 0.1 mg/m 3 ) on the primary side of this product to maintain product functions.PneumaticspressuresourceAir dryerFilterRegulatorOil mist filter(Micro alescer)FSM SeriesAir filter: F SeriesOil mist filter: M SeriesNote 3: Consult with CKD when using gas other than air or N2.Note 4: This product's protection circuit is effective only for specific misconnections and load short-circuits. It does not provide protection for all misconnections.Note 5: Response time varies depending on the piping conditions.Note 6: This indicates the minimum display for the flow, and does not guarantee display accuracy.Separate indicator specifications (analog output type dedicated)Model no.DescriptionsAvailableanalog output type model no.Type of displayDisplay min. unit Note 6IndicatorOutputPower voltageCurrent consumptionLead wireFunctionsAmbient temperature/humidityProtective structureEMC directiveWeightgFSM-H-D N/P-005MLSeparate indicatorFSM-H-D N/P-010ML FSM-H-D N/P-050ML FSM-H-D N/P-100MLFSM-H-A-005ML FSM-H-A-010ML FSM-H-A-050ML FSM-H-A-100MLFlow display (3.5-digit 7-segment display, orange), run and switch output display (orange)0.01mL/min. Note 1 0.1mL/min. Note 1Switch output 2 points(NPN or PNP open collector output, 30 VDC and 50 mA or less, voltage drop of 2.4 V or less, PLC- and relay-compatible)Analog output 1 point(1-5V voltage output, connected load impedance 50K and over)12/24 VDC (10.8 to 26.4V)50mA or less (only indicator)3.7 0.2mm 2 x 5 conductor (1m)Flow display, flow display peak hold, switch output, analog output0 to 50 , 85%RH or less (no dew)IEC standards IP40EN55011, EN61000-6-2, EN1000-4-2/3/4/6/8Approx. 70 (including lead wire 1m)Refrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingSmall Extremely small flow typeFlow sensor1281

FSM-H SeriesRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)How to orderFSM-HN005MLA Output type6AB Flow rate rangeFSM-H-N-005ML-6A-KModel: FSM indicator typeA Switch output type : NPN outputB Flow rate range : 0.25 to 5m /min.C Port size: Rc1/8 (stainless steel body)D Option: With company certificationFSMH D N010MLKC Port sizeSeparate indicator (analog output type dedicated)Model no.A Switch output typeD OptionB Flow rate rangeSymbolA Output typeNPSymbolA Output typeDescriptionsA Analog output 1 pointN NPN output 2 points, analog output 1 pointP PNP output 2 points, analog output 1 pointB Flow rate range005ML 0.25 to 5m /min.010ML 0.5 to 10m /min.050ML 2.5 to 50m /min.100ML 5 to 100m /min.C Port size6A Rc1/8 (stainless steel body)6G G1/8 (stainless steel body)* Refer to page 1285 for model No. and dimensions ofbracket (optional).D OptionBlankKT (Note 1)NoneWith company certificationWith traceability certificateNote 1) Proof of traceability, inspection results, andtraceability system diagram are included.DescriptionsNPN output 2 points, analog output 1 pointPNP output 2 points, analog output 1 pointB Flow rate range005ML 0.25 to 5m /min.010ML 0.5 to 10m /min.050ML 2.5 to 50m /min.100ML 5 to 100m /min.* Refer to pages 1314 to 1321 for the operation and dimensions, etc.,EndingBracket for separate indicatorPPD3KL-DA Bracket kitSymbolDescriptionsA Bracket kitKL-D Single foot bracket (L type)KD-D Both sides foot bracket (parallel)KHS-D Panel mount bracket set with coverKC Operation protective cover* Refer to pages 1314 to 1315 for dimensions and size of bracket.1282

Internal structure and parts listFSM-H-N/P-*-*Indicator type stainless steel body1 2FSM-H SeriesHow to order / internal structure and parts list3Refrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filter11Auto. drain/ othersF.R.L.(Module unit)104F.R.L.(Separate)CompactF.R.5PreciseregulatorF.R.L.(Relatedproducts)No.123456Parts nameFront seatCaseLead wire with holder (5 - conductor)Module holderSensor circuit boardStainless steel body98MaterialPolyester filmABS resinABS resin/polyvinyl chloridePolyamide resinAluminaStainless steelNo.789101176Parts nameSensor chipRectifierPort filterSensor gasketElectron circuit boardMaterialSiliconeStainless steelStainless steelFluoro rubberCleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterFSM-H-A-*-*Analog type stainless steel bodyVacuumregulatorSuctionplate1 2 3Magneticspring bufferMechanicalpressure SW11Electronicpressure SWContact / closecontact conf.SWAir sensor104Pressure SWfor coolantSmallflow sensor98765Smallflow controllerFlow sensorfor airFlow sensorfor waterNo.123456Parts nameFront seatCaseLead wire with holder (3 - conductor)Module holderSensor circuit boardStainless steel bodyMaterialPolyester filmABS resinABS resin/polyvinyl chloridePolyamide resinAluminaStainless steelNo.7891011Parts nameSensor chipRectifierPort filterSensor gasketElectron circuit boardSeparate indicator FSM-H-D*-*Refer to Page 1314 for internal structure of a separate indicator.MaterialSiliconeStainless steelStainless steelFluoro rubberTotal airsystemTotal airsystem(Gamma)EndingSmall Extremely small flow typeFlow sensor1283

Dimensions (bracket)FSM-H SeriesDimensionsRefrigeratingtype dryerModel no.: FSM-LB155304-R1.751Desiccanttype dryerHigh polymermembranedryerAnalog output characteristicsAnalog output (V)FSM-H-*-*278.44Pressure loss characteristicsPressure loss (Pa)Pressure loss (Pa)510 F. S. flowFlow ( /min)FSM-H-*-005ML-*43.532.521.510.500 1 2 3 4FSM-H-*-050ML-*10987654321Flow (m /min)00 10 20 30 40Flow (m /min)63.5Enclosed four M3 (length 6mm) setscrews for fixing(Note) If flow range is exceeded, maximum of 8V will be output.5500.1MPa0.3MPa0.1MPa0.3MPaFor details on the display and operation section names,functions and operation methods, refer to page 1306 for integrated display and page 1318 for separated display.Pressure loss (Pa)Pressure loss (Pa)1614121086425FSM-H-*-010ML-*765432100 2 4 6 8FSM-H-*-100ML-*Flow (m /min)00 20 40 60 80Flow (m /min)101000.1MPa0.3MPa0.1MPa0.3MPa1285Air filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingSmall Extremely small flow typeFlow sensor

Refrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerSmall flow sensorIndicator type/analog output typeFSM SeriesAir, nitrogen gas (flow rate range: 0.05 to 100 /min)Argon, carbon dioxide (flow rate range: 0.05 to 50 /min)Air filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingFSM for air or N2 gas seriesIndicator type specificationsDescriptionsFlow rate range /min. Note 1Working fluidMax. working pressure MPaMin. working pressure MPaWithstanding pressure MPaAmbient temperature/humidityWorking fluid temperatureIndicator Precision Working conditionsInstallationLinearity (display/analog output)Pressure characteristicsTemperature characteristicsRepeatabilityResponsivenessType of displayDisplay min. unit Note 5Output typePower voltageCurrent consumptionLead wireFunctionsInstallation attitudeStrait piping sectionProtective structureProtective circuit Note 3EMC directiveIndicator type weight (air, N2 gas)DiscontinuedProduction of the FSM Series is scheduled to bediscontinued on the end of March, 2009.Indicator typeThe FSM2 Series is available as an alternative mode.FSM-N/P-005 FSM-N/P-010 FSM-N/P-050 FSM-N/P-100 Contact FSM-N/P-200 the CKD Sales FSM-N/P-500 Office for details. FSM-N/P-1010.05 to 0.5 0.1 to 1 0.5 to 5 1 to 10 2 to 20 5 to 50 10 to 100Clean air (JIS B 8392-1. 1. 1 to 5. 6. 2), compressed air (JIS B 8392-1. 1. 1 to 1. 6. 2) Note 2 , N2 gas0.7-0.071.00 to 50 , 90%RH or less0 to 50 (with no dew condensation)5%F.S. or less (0.1MPa, 25 , flow rate range 10 to 100%F.S.)5%F.S. or less (-0.07 to 0.7MPa, 0.1MPa reference)0.2%F.S./ or less (15 to 35 , where 25 is reference)Unit: gModel no.Port size (body material)FSM-N/P-005 FSM-N/P-010 FSM-N/P-050 FSM-N/P-100 FSM-N/P-200 FSM-N/P-500 FSM-N/P-101H4H66A6AAM58A8AA4 push-in (nylon)6 push-in (nylon)Rc1/8 (stainless steel)Rc1/8 (aluminum)M5 (stainless steel)Rc1/4 (stainless steel)Rc1/4 (aluminum)7067150-160--7067150-160--7067150-160--7067150-160--7067150-160----17090--------205105Analog output type weight (air, N2 gas)Model no.Port size (body material)H4 4 push-in (nylon)H6 6 push-in (nylon)6A Rc1/8 (stainless steel)6AA Rc1/8 (aluminum)M5 M5 (stainless steel)8A Rc1/4 (stainless steel)8AA Rc1/4 (aluminum)FSM-A-0056360140-150--50ms or less Note 4Flow display (3.5-digit 7-segment display, orange), run and switch output display (orange)1mL/min. Note 1 0.01L/min. Note 1 0.1L/min. Note 1FSM-A-010 FSM-A-050 FSM-A-100 FSM-A-200 FSM-A-500 FSM-A-1016360140-150--6360140-150--1%F.S. or less6360140-150--6360140-150--Switch output 2 points--16080---Unit: g-----195953%F.S. or less( 2%F.S. or less in flow 50%F.S. or less)(NPN or PNP open collector output, 30 VDC and 50 mA or less, voltage drop of 2.4 V or less, PLC- and relay-compatible)Analog output 1 point(1 to 5V voltage output and connected load impedance 50K and over)12/24 VDC (10.8 to 26.4V)60mA or less3.7 0.2mm 2 x 5 conductor 1mFlow display, flow display peak hold, switch output, analog outputHorizontal or verticalNot requiredIEC standards IP40Power supply reverse connection protection, switch output reverse connection protection, switch output load short-circuit protectionEN55011, EN61000-6-2, EN1000-4-2/3/4/6/8Clean room specifications (catalog No. CB-033SA)Dust generation preventing structure for use in cleanroomsFSMFSMP70P801286

Analog output type specifications (air, N2 gas, without display)DescriptionsFlow rate range /min. Note 1Working fluidMax. working pressure MPaMin. working pressure MPaWithstanding pressure MPaAmbient temperature/humidityWorking fluid temperaturePrecision Working conditionsInstallationLinearity (analog output)Pressure characteristicsTemperature characteristicsRepeatabilityResponsivenessType of displayOutput typePower voltageCurrent consumptionLead wireFunctionsProtective circuit Note 3Installation attitudeStrait piping sectionProtective structureEMC directivePneumaticspressuresourceAir dryerAnalog output typeFSM-A-005 FSM-A-010 FSM-A-050 FSM-A-100 FSM-A-200 FSM-A-500Filter0.05 to 0.5 0.1 to 1 0.5 to 5 1 to 10 2 to 20 5 to 50Clean air (JIS B 8392-1. 1. 1 to 5. 6. 2), compressed air (JIS B 8392-1. 1. 1 to 1. 6. 2) Note 2 , N2 gas0.7-0.071.00 to 50 , 90%RH or less0 to 50 (with no dew condensation)5%F.S. or less (0.1MPa, 25 , flow rate range 10 to 100%F.S.)5%F.S. or less (-0.07 to 0.7MPa, 0.1MPa reference)0.2%F.S./ or less (15 to 35 , where 25 is reference)Regulator1%F.S. or less50ms or less Note 4Power display (green)Analog output 1 point (1 to 5V voltage output, connected load impedance 50K12/24 VDC (10.8 to 26.4V)50mA or less3.7 0.2mm 2 x 3 conductor 1mAnalog outputPower supply reverse connection protectionHorizontal or verticalNot requiredIEC standards IP40EN55011, EN61000-6-2, EN1000-4-2/3/4/6/8Oil mist filter(Micro alescer)FSM SeriesAir filter: F SeriesOil mist filter: M SeriesFSM SeriesSpecificationsFSM-A-10110 to 1003%F.S. or less( 2%F.S. or less in flow 50%F.S. or less)and over)Note 1: Converted to volumetric flow at 20 1 barometric pressure (101kPa)Note 2: When using compressed air, use clean air that complies to JIS B 8392-1:2003 Class 1.1.1 to 1.6.2. Compressed air from the compressorcontains drainage (water, oxidized oil, foreign matter, etc.). Install a filter (filtration: 5 m), air dryer (minimum pressure dew point: 10 orless), and oil mist filter (maximum oil concentration: 0.1 mg/m 3 ) on the primary side of this product to maintain product functions.Note 3: This product's protection circuit is effective only for specific misconnections and load short-circuits. It does not provide protection for all misconnections.Note 4: Response time varies depending on the piping conditions.Note 5: This indicates the minimum display for the flow, and does not guarantee display accuracy.Separate indicator specifications (analog output type dedicated)Model no.Separate indicatorDescriptionsFSM-A-D N/P-005 FSM-A-D N/P-010 FSM-A-D N/P-050 FSM-A-D N/P-100 FSM-A-D N/P-200 FSM-A-D N/P-500 FSM-A-D N/P-101Availableanalog output type model no.FSM-A-005 FSM-A-010 FSM-A-050 FSM-A-100 FSM-A-200 FSM-A-500 FSM-A-101Type of displayFlow display (3.5-digit 7-segment display, orange), run and switch output display (orange)Display min. unit Note 5 1mL/min. Note 1 0.01L/min. Note 1Switch output 2 points0.1L/min. Note 1Output(NPN or PNP open collector output, 30 VDC and 50 mA or less, voltage drop of 2.4 V or less, PLC- and relay-compatible)Analog output 1 point(1-5V voltage output, connected load impedance 50K and over)Power voltageCurrent consumptionLead wireFunctions12/24 VDC (10.8 to 26.4V)50mA or less (only indicator)3.7 0.2mm 2 x 5 conductor (1m)Flow display, flow display peak hold, switch output, analog outputAmbient temperature/humidityProtective structure0 to 50 , 85%RH or less (no dew)IEC standards IP40EMC directiveWeightgEN55011, EN61000-6-2, EN1000-4-2/3/4/6/8Approx. 70 (including lead wire 1m)IndicatorRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingSmallFlow sensor1287

FSM SeriesRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingFSM for argon or carbon dioxide seriesIndicator type specificationsDescriptionsFlow rate range /min. Note 1Indicator Precision Working conditionsInstallationWorking fluidWorking pressureWithstanding pressureMPaMPaAmbient temperature / humidityWorking fluid temperatureLinearity (display/analog output)Pressure characteristicsTemperature characteristicsRepeatabilityResponsivenessType of displayDisplay min. unit Note 6Output typePower voltageCurrent consumptionLead wireFunctionsInstallation attitudeStrait piping sectionProtective structureProtective circuit Note 5EMC directiveModel no.Port size (body material)6A Rc1/8 (stainless steel)6AA Rc1/8 (aluminum)M5 M5 (stainless steel)M5A M5 (aluminum)Indicator type (argon, carbon dioxide)FSM-N/P-005 FSM-N/P-010 FSM-N/P-050 FSM-N/P-100 FSM-N/P-200 FSM-N/P-5000.05 to 0.5 0.1 to 1 0.5 to 5 1 to 10 2 to 20 5 to 50Argon, carbon dioxide Note 20 to 0.5 Note 30.750 to 50 , 90%RH or less0 to 50 (with no dew condensation)5%F.S. or less (0.1MPa, 25 , flow rate range 10 to 100%F.S.)5% F.S. or less (0 to 0.5MPa, where 0.1MPa is reference)0.2%F.S./ or less (15 to 35 , where 25 is reference)Indicator type weight (argon, carbon dioxide)Model no.Port size (body material)6A Rc1/8 (stainless steel)6AA Rc1/8 (aluminum)M5 M5 (stainless steel)M5A M5 (aluminum)50ms or less Note 4Flow display (3.5-digit 7-segment display, orange), run and switch output display (orange)1mL/min. Note 1 0.01L/min. Note 10.1L/min. Note 1Switch output 2 points(NPN or PNP open collector output, 30 VDC and 50 mA or less, voltage drop of 2.4 V or less, PLC- and relay-compatible)Analog output 1 point(1 to 5V voltage output, connected load impedance 50K and over)12/24 VDC (10.8 to 26.4V)60mA or less3.7 0.2mm 2 x 5 conductor 1mFlow display, flow display peak hold, switch output, analog outputHorizontal or verticalNot requiredIEC standards IP40Power supply reverse connection protection, switch output reverse connection protection, switch output load short-circuit protectionFSM-N/P-005 FSM-N/P-010 FSM-N/P-050 FSM-N/P-100 FSM-N/P-200 FSM-N/P-50015080160851508016085Analog output type weight (argon, carbon dioxide)15080160851508016085* All the pressure is gauge pressure.FSM-A-005 FSM-A-010 FSM-A-050 FSM-A-100 FSM-A-200 FSM-A-50014070150751%F.S. or less1407015075EN55011, EN61000-6-2, EN1000-4-2/3/4/6/8140701507514070150753%F.S. or less( 2%F.S. or less in flow 50%F.S. or less)17090--16080--17090--16080--Unit: gUnit: g1288

Analog output type specifications (argon, carbon dioxide, without display)DescriptionsFlow rate range /min. Note 1Precision Working conditionsInstallationWorking fluidWorking pressureWithstanding pressureFSM SeriesSpecificationsRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingSmallFlow sensorMPaMPaAmbient temperature/humidityWorking fluid temperatureLinearity (analog output)Pressure characteristicsTemperature characteristicsRepeatabilityResponsivenessType of displayOutput typePower voltageCurrent consumptionLead wireFunctionsProtective circuit Note 5Installation attitudeStrait piping sectionProtective structureEMC directiveAnalog output type (argon and carbon dioxide)FSM-A-005 FSM-A-010 FSM-A-050 FSM-A-100 FSM-A-200 FSM-A-5000.05 to 0.5 0.1 to 1 0.5 to 5 1 to 10 2 to 20 5 to 50Argon, carbon dioxide Note 20 to 0.5 Note 30.750 to 50 , 90%RH or less0 to 50 (with no dew condensation)5%F.S. or less (0.1MPa, 25 , flow rate range 10 to 100%F.S.)5% F.S. or less (0 to 0.5MPa, where 0.1MPa is reference)0.2%F.S./ or less (15 to 35 , where 25 is reference)1%F.S. or less50ms or less Note 4Power display (green)Analog output 1 point (1 to 5V voltage output, connected load impedance 50K12/24 VDC (10.8 to 26.4V)50mA or less3.7 0.2mm 2 x 3 conductor 1mAnalog outputPower supply reverse connection protectionHorizontal or verticalNot requiredIEC standards IP40EN55011, EN61000-6-2, EN1000-4-2/3/4/6/8* Refer to page 1287 for the specifications of the separate indicator.3%F.S. or less( 2%F.S. or less in flow 50%F.S. or less)and over)* All the pressure is gauge pressure.Note 1: Converted to volumetric flow at 20 1 barometric pressure (101kPa)Note 2: Dry gas (minimum pressure dew point -40 or less) free of corrosive elements such as chlorine, sulfur, or acids.Clean gas (solid particles 0.1 m or less, oil 0.1 mg/m 3 or less) free of dust or oil mist.Note 3: Argon and carbon gas models are used with positive pressure. If used with negative pressure (vacuum), accuracy may not satisfyspecifications. When installing on a vacuum system, be sure to restrict the secondary side of the product, or take other means so thatthe product does not achieve negative pressure.Note 4: Response time varies depending on the piping conditions.Note 5: This product's protection circuit is effective only for specific misconnections and load short-circuits. It does not provide protection for allmisconnections.Note 6: This indicates the minimum display for the flow, and does not guarantee display accuracy.1289

For argon, carbon dioxideHow to orderFSMNA100Output typeB6AFlow rate rangeCARPort size6A6AARc1/8 (stainless steel body)Rc1/8 (aluminum body)FSM SeriesHow to orderSymbolDescriptionsA Output typeANPAnalog output 1 pointNPN output 2 points, analog output 1 pointPNP output 2 points, analog output 1 pointB Flow rate range005 0.05 to 0.5 /min.010 0.1 to 1 /min.050 0.5 to 5 /min.100 1 to 10 /min.200 2 to 20 /min.500 5 to 50 /min.C Port sizeRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerFSM-N-100-6A-ARModel: FSM indicator typeA Switch output type : NPN outputB Flow rate range : 1 to 10 /min.C Port size: Rc1/8 (stainless steel body)D Working fluid : ArgonDWorking fluidM5 (stainless steel body)M5* Excluding flow rate range 100 (CO2), 200, 500M5 (aluminum body)M5A* Excluding flow rate range 100 (CO2), 200, 500D Working fluidAR ArgonCO2 Carbon dioxide* Refer to page 1298 for model No. and dimensions ofbracket (optional).Check valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorBracket for separate indicatorPPD3 KL-DA Bracket kitSymbolDescriptionsA Bracket kitKL-D Single foot bracket (L type)KD-D Both sides foot bracket (parallel)KHS-D Panel mount bracket set with coverKC Operation protective cover* Refer to pages 1314 to 1315 for dimensions and size of bracket.Pressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingSmallFlow sensor1291

FSM SeriesRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterInternal structure and parts listFSM-N/P-*-6A-*Indicator type stainless steel body1 23Auto. drain/ othersF.R.L.(Module unit)11F.R.L.(Separate)CompactF.R.104PreciseregulatorF.R.L.(Relatedproducts)5CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeNo.123456Parts nameFront seatCaseLead wire with holder (5 - conductor)Module holderSensor circuit boardStainless steel body98MaterialPolyester filmABS resinABS resin/polyvinyl chloridePolyamide resinAluminaStainless steelNo.789101176Parts nameSensor chipRectifierPort filterSensor gasketElectron circuit boardMaterialSiliconeStainless steelStainless steelFluoro rubberVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWFSM-A-*-H6Analog type resin body1 23Electronicpressure SWContact / closecontact conf.SW12Air sensorPressure SWfor coolant114Smallflow sensorSmallflow controller5Flow sensorfor airFlow sensorfor water109876Total airsystemTotal airsystem(Gamma)EndingNo.123456Parts nameFront seatCaseLead wire with holder (3 - conductor)Module holderPush-in cartridge joint 6Sensor circuit boardMaterialPolyester filmABS resinABS resin/polyvinyl chloridePolyamide resinAluminaNo.789101112Parts nameResin bodySensor chipRectifierPort filterSensor gasketElectron circuit boardMaterialPolyamide resinSiliconeStainless steelStainless steelFluoro rubberSeparate indicator FSM-A-D*-*Refer to Page 1314 for internal structure.1292

FSM SeriesRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterDimensions (indicator type)Body material: Polyamide resin, port size: 4FSM-*-*-H43.7Auto. drain/ othersF.R.L.(Module unit)55Lead wire length 1mF.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirbooster37174.6279272- 3.4 penetrating4 push-in jointSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensor9.5Body material: Polyamide resin, port size: 6FSM-*-*-H62-M3 depth 515.53.7Pressure SWfor coolantSmallflow sensorSmallflow controller554.69Lead wire length 1mFlow sensorfor airFlow sensorfor water6 push-in jointTotal airsystemTotal airsystem(Gamma)3727Ending17272- 3.4 penetrating9.52-M3 depth 515.51294

Dimensions (indicator type)Body material: Stainless steel, aluminumFSM-*-*-*3.7FSM SeriesDimensionsRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)55Lead wire length 1mF.R.L.(Separate)CompactF.R.EPreciseregulatorF.R.L.(Relatedproducts)A17C27B2- 3.4 penetratingDCleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencer9.52-M3 depth 5Check valve/ othersJoint/ tubeVacuumfilterVacuumregulator15.5SuctionplateMagneticspring bufferAir, nitrogen gasArgon, carbon dioxideModel no.FSM-N/P-005-6AFSM-N/P-005-M5FSM-N/P-010-6AFSM-N/P-010-M5FSM-N/P-050-6AFSM-N/P-050-M5FSM-N/P-100-6AFSM-N/P-100-M5FSM-N/P-200-6AFSM-N/P-200-M5FSM-N/P-500-6A/6AAFSM-N/P-101-8A/8AAFSM-N/P-005-6A/6AA-AR/CO2FSM-N/P-005-M5/M5A-AR/CO2FSM-N/P-010-6A/6AA-AR/CO2FSM-N/P-010-M5/M5A-AR/CO2FSM-N/P-050-6A/6AA-AR/CO2FSM-N/P-050-M5/M5A-AR/CO2FSM-N/P-100-6A/6AA-ARFSM-N/P-100-M5/M5A-ARFSM-N/P-100-6A/6AA-CO2FSM-N/P-200-6A/6AA-AR/CO2FSM-N/P-500-6A/6AA-AR/CO2Flow rate range/min0.05 to 0.50.1 to 10.5 to 51 to 102 to 205 to 5010 to 1000.05 to 0.50.1 to 10.5 to 51 to 101 to 102 to 205 to 50A373737373739.5473737373739.539.539.5B272727272729.5372727272729.529.529.5C4.64.64.64.64.64.64.64.64.64.64.64.64.64.6D999999149999999ERc1/8M5Rc1/8M5Rc1/8M5Rc1/8M5Rc1/8M5Rc1/8Rc1/4Rc1/8M5Rc1/8M5Rc1/8M5Rc1/8M5Rc1/8Rc1/8Rc1/8Mechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingSmallFlow sensor1295

FSM SeriesRefrigeratingtype dryerDimensions (analog output type)Desiccanttype dryerHigh polymermembranedryerBody material: Polyamide resin, port size: 4FSM-A-*-H43.7Air filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)5532 32179.54.6Body material: Polyamide resin, port size: 6FSM-A-*-H64.627559272- 3.4 penetrating2-M3 depth 515.53.717272-M3 depth 59.59Lead wire length 1mCompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)Lead wire length 1m274 push-in joint6 push-in jointEnding2- 3.4 penetrating15.51296

Dimensions (analog output type)Body material: Stainless steel, aluminumFSM-A-*-*3.7FSM SeriesDimensionsRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ others55Lead wire length 1mF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.CPreciseregulatorF.R.L.(Relatedproducts)A1727B2- 3.4 penetratingDECleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencer9.52-M3 depth 5Check valve/ othersJoint/ tubeVacuumfilterVacuumregulator15.5SuctionplateArgon, carbon dioxideAir, nitrogen gasModel no.FSM-A-005-6AFSM-A-005-M5FSM-A-010-6AFSM-A-010-M5FSM-A-050-6AFSM-A-050-M5FSM-A-100-6AFSM-A-100-M5FSM-A-200-6AFSM-A-200-M5FSM-A-500-6A/6AAFSM-A-101-8A/8AAFSM-A-005-6A/6AA-AR/CO2FSM-A-005-M5/M5A-AR/CO2FSM-A-010-6A/6AA-AR/CO2FSM-A-010-M5/M5A-AR/CO2FSM-A-050-6A/6AA-AR/CO2FSM-A-050-M5/M5A-AR/CO2FSM-A-100-6A/6AA-ARFSM-A-100-M5/M5A-ARFSM-A-100-6A/6AA-CO2FSM-A-200-6A/6AA-AR/CO2FSM-A-500-6A/6AA-AR/CO2Flow rate range/min0.05 to 0.50.1 to 10.5 to 51 to 102 to 205 to 5010 to 1000.05 to 0.50.1 to 10.5 to 51 to 101 to 102 to 205 to 50A323232323234.5423232323234.534.534.5B272727272729.5372727272729.529.529.5C4.64.64.64.64.64.64.64.64.64.64.64.64.64.6D999999149999999ERc1/8M5Rc1/8M5Rc1/8M5Rc1/8M5Rc1/8M5Rc1/8Rc1/4Rc1/8M5Rc1/8M5Rc1/8M5Rc1/8M5Rc1/8Rc1/8Rc1/8Magneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingSmallFlow sensor* Dimensions of separate indicator FSM-A-D*-* are same as FSM-V-D*-*. Refer to Page 1314.1297

FSM SeriesRefrigeratingtype dryerDimensions (bracket)Desiccanttype dryerHigh polymermembranedryerAir filterModel no.: FSM-LB155304-R1.751Auto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAnalog output characteristicsAnalog output (V)FSM-*-*-*510 F.S. flowFlow ( /min)278.4463.5Enclosed four M3 (length 6mm) setscrews for fixing(Note) If flow range is exceeded, maximum of 8V will be output.For details on display and operation section names, functions, and operation methods, refer to page 1306 for the integrated display andpage 1314 for the separated display.5Air sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)Ending1298

Pressure loss characteristics (air, N2 gas)Pressure loss (kPa)Pressure loss (kPa)Pressure loss (kPa)Pressure loss (kPa)FSM-*-005-*0.70.60.50.40.30.20.100 0.1 0.2 0.3 0.4FSM-*-050-*54.543.532.521.510.500 1 2 3 4FSM-*-200-*54.543.532.521.510.500 4 8 12 16FSM-*-101-*25201510Flow ( /min)Flow ( /min)Flow ( /min)0.5520-0.07MPa0.1MPa0.3MPa-0.07MPa0.1MPa0.3MPa0.1MPa0.3MPa0.1MPa0.3MPaPressure loss (kPa)Pressure loss (kPa)Pressure loss (kPa)FSM-*-010-*1.61.41.210.80.60.40.200 0.2 0.4 0.6 0.8FSM-*-100-*54.543.532.521.510.5FSM-*-500-*-0.07MPa00 2 4 6 818161412108642Flow ( /min)Flow ( /min)00 10 20 30 40Flow ( /min)11050FSM SeriesTechnical data-0.07MPa0.1MPa0.3MPa0.1MPa0.3MPa0.1MPa0.3MPaRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingSmallFlow sensor500 20 40 60 80Flow ( /min)1001299

FSM SeriesRefrigeratingtype dryerPressure loss characteristics (argon)Desiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorPressure loss (kPa)Pressure loss (kPa)FSM-*-005-*-AR0.040.0350.030.0250.020.0150.010.00500 0.1 0.2 0.3 0.4FSM-*-050-*-AR0.80.70.60.50.40.30.20.1Flow ( /min)0.50.1MPa0.3MPa0.1MPa0.3MPaPressure loss (kPa)Pressure loss (kPa)FSM-*-010-*-AR0.090.080.070.060.050.040.030.020.0100 0.2 0.4 0.6 0.8FSM-*-100-*-AR2.521.510.5Flow ( /min)0.1MPa0.3MPa10.1MPa0.3MPaSuctionplateMagneticspring buffer00 1 2 3 4Flow ( /min)500 2 4 6 8Flow ( /min)10Mechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerPressure loss (kPa)FSM-*-200-*-AR87654320.1MPa0.3MPaPressure loss (kPa)FSM-*-500-*-AR60504030200.1MPa0.3MPaFlow sensorfor air110Flow sensorfor waterTotal airsystemTotal airsystem(Gamma)00 4 8 12 16Flow ( /min)2000 10 20 30 40Flow ( /min)50Ending1300

Pressure loss characteristics (carbon dioxide)Pressure loss (kPa)Pressure loss (kPa)Pressure loss (kPa)FSM-*-005-*-CO20.0250.020.0150.010.00500 0.1 0.2 0.3 0.4FSM-*-050-*-CO20.70.60.50.40.30.20.100 1 2 3 4FSM-*-200-*-CO210987654321Flow ( /min)Flow ( /min)00 4 8 12 16Flow ( /min)0.55200.1MPa0.3MPa0.1MPa0.3MPa0.1MPa0.3MPaPressure loss (kPa)Pressure loss (kPa)Pressure loss (kPa)FSM-*-010-*-CO20.0450.040.0350.030.0250.020.0150.010.00500 0.2 0.4 0.6 0.8FSM-*-100-*-CO22.521.510.500 2 4 6 8FSM-*-500-*-CO2605040302010Flow ( /min)FSM SeriesTechnical dataRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingSmallFlow sensorFlow ( /min)00 10 20 30 40Flow ( /min)110500.1MPa0.3MPa0.1MPa0.3MPa0.1MPa0.3MPa1301

FSM-H/FSM SeriesRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerNames and functions of display and operating sectionsDisplay integrated type (FSM-H/FSM Series common)Overflow display· Lights and displays when the 3-digitdisplay is exceeded.(At 10.00 /min, this turns on, and 0.00 isdisplayed on the 3-digit LED.)MODE key· Use to enter setting mode.· Use to return to the flow display.· Use to release the peak hold operation.Minus display (Excluding FSM (air, nitrogen use))· Lights when gas flows in reverse.3-digit LED display· Displays the flow rate and switch settings, etc.RUN display· Turns on when displaying flow.· Blinks during peak hold operation.· Turns off during various setting modes.Output (OUT1) display· Turns on when CH1 output is on.· Blinks when overcurrent is detected.Output (OUT2) display· Turns on when CH2 output is on.· Blinks when overcurrent is detected.Check valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)· is displayed for an overflow.· is displayed for overcurrent in reverse.(Excluding FSM (air, nitrogen use))1 (UP) key· Sequentially displays CH1 data when the flow rate is displayed.· Displays maximum during peak hold operation.· Sets the mode when the mode is selected.· Used to increment values, etc., when data is set.2 (DOWN) key· Sequentially displays CH2 data when the flow rate is displayed.· Displays the minimum during peak hold operation.· Used to decrement the value, etc., when data is set.* The design of the front sheet differs for the FSM-H Series, but display and operation section names and functions are the same.Separate indicator typeRefer to pages 1318 to 1321 for details on the display and operation section names, functions, and operation methods.Ending1302

OperationSwitch output functionSwitch operation modeFSM-H/FSM SeriesOperationRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterOperation pattern name LED display Operation waveformWindow operation 1(ON within specified range)Window operation 2(ON out of specified range)Hysteresis operation 1(Flow small side ON)Hysteresis operation 2(Flow large side ON)Switch output OFFSet point confirmation methodCH1 data displayPressCH2 data displayWhen a key is pressed while the flow is displayed, the switch data ON setting, OFF setting,operation waveform, zero adjustment, and model are displayed and confirmed.Switch operation is not affected during the following operations:ON sideblinkingONOFFON-ON set pointOFF-OFF set pointONOFF-ON set pointON3%F.S. and overOperation waveform displayFlow+OFF set point3%F.S. and over1%F.S.1%F.S. and overOFF-OFF set pointONOFF-1%F.S. and over1%F.S.Flow+ON set pointFlow+OFF set pointFlow+ON set pointOutput is turned off regardlessof ON or OFF setting.Flow+Note 1.Note 2.Note 3.Note 4.Note 5.ON set point displayWhen used for a winding operation, leave an intervalof 3% F.S. or more between the two settings.1%F.S. hysteresis is automatically added to the onand off sides.When used for hysteresis operation, leave aninterval of 1% F.S. or more between the two settings.If there is no difference between the two settings,operation may not take place or may be unstable.If switches are operated when flow is not stable,such as pulsating, operation may be unstable.In this case, provide sufficient margin between thetwo setting values. Confirm that switch operation isstable before use.The left side of the operation waveform indicatesnegative pressure, and the right side indicatespositive pressure.The magnitude relationship of the ON and OFFsettings is determined when the waveform is set, anda reverse magnitude relationship cannot be attained.With this product, however, operation of thedesignated operation pattern is the priority.When the two settings are input, the magnituderelationship is automatically determined, and each isjudged and processed at the appropriate ON andOFF settings.In other words, even if ON and OFF settings areinput reversed, input is recognized correctly as ONand OFF and operation occurs with the designatedoperation mode.OFF sideblinkingAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)PressOFF set point displayOperation waveform displayEnding0 point adjustment value, model number display(FSM (air and nitrogen) is excluded.)0 point adjustment value and model number display are alternately shown.Switch operation is not affected during this operation.SmallFlow sensor"AdJ" display 0 point adjustment value display Model number displayPress at the same time1303

FSM-H/FSM SeriesRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWUsing each functionPeak hold functionMaximum and minimum values for the flow rate within a set interval is displayed.Use for such as are the instantaneous flow change confirmation.The peak hold operation does not affect this product's basic functions such as switch operations or pressure display.Flow display state"460" is displayed.Press at the same timeSwitch output functionPeak hold operation start(RUN light blinking)Peak value displayPressBottom value displayPressRefer to page 1305 for operation methods.This product has 2-point switch output, and uses four operation modes and stopping.The switch function is started by setting the required operation pattern and by setting two settings (ON and OFF) that specify the operation point.Determine the required operation mode and on and off before setting.Select and set the following data to operate the switch:CH1: operation pattern CH1: ON set point CH1: OFF set pointCH2: operation pattern CH2: ON set point CH2: OFF set pointBlinkingBlinkingPeak value "475"Bottom value "453"Air sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)Forced outputRefer to page 1305 for operation methods.Use this function to forcibly turn switch output on and confirm wiring connection or initial operation of the input device.(Note) Use this test for operation checking of wiring and input unit.Do not use this function instead of actual signals when executing the sequence program while the machine or device is operating.0 point adjustment Refer to page 1305 for operation methods (excluding FSM [air, nitrogen use]).Deviation of the display from zero is compensated for in the state with no flow rate.If set incorrectly, readjust when no gas is flowing.Ending(Note) The above settings and testing greatly affect the output signal and display.Be sure to stop the machine and devices using this product, and confirm that safety can be ensured even ifproblems or an incorrect display occurs before operating.Using this function while the machine or device is operating could cause unforeseen problems or incorrect displays."Operation"To return to the flow display during operations in any setting mode, turn power off and on. The flow display isredisplayed.1304

Switch output, forced output, 0 point adjustment operation(Flow display)For safety, if the key is notoperated for two secondsor more before the mode isset, the pressure display isredisplayed.FSM-H/FSM SeriesBasic key operationOperationThese key operations are valid in the switch operation pattern setting, on/off setting and zero point adjustment mode.Refrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterPressBlinkingBlinkingReleaseBlinkingPress onceWhen the keyis held down, thepressure display isredisplayed.DeterminationPress onceChange the mode withthe UP/DOWN keysSwitch CH1Operation mode changeChannel 1 displayAlternatedisplayON point waveform displayOFF point waveform displayOperation mode display Set point display Set point displaySwitch CH2Operation mode changeData returnPress at the same timePress onceSetting data of switch outputPress onceCountUpAlternatedisplayCountDownSwitch CH2Setting ON and OFF dataData readingPress at the same timeSwitch CH1Setting ON and OFF dataPress onceChange the mode withthe UP/DOWN keysAlternatedisplayTo flow displayAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPress onceSet in the same manneras switch CH1.Press oncePressure SWfor coolantSmallflow sensorSmallflow controllerPress onceFlow sensorfor airBlinkingDeterminationCH1 output ONSwitch output forced ON modeCH2 output ONTo flow displayFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingPress onceBlinkingCAUTIONPress onceFSM(Air/nitrogen)To flow displayDeterminationPress oncePressAlternatedisplayPressPress once0 point adjustment mode (FSM (air, nitrogen) is excluded.)"AdJ" display0 point adjustmentvalue displayBe sure no gas is flowing when adjusting zero.Adjusted value readingPress at the same timeTo flow displayPress once1305SmallFlow sensor

Refrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerMiniature flow sensorSmall size flow sensorAnalog output type/switch output typeFSM-V Series (air/nitrogen gas)Flow rate range: 0.05, 0.1, 0.5, 1, 5, 10 /min.Air filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)Sensor specificationsModel no.DescriptionsFlow rate range ( /min) Note 7 -0.05 to + 0.05 -0.1 to + 0.1 -0.5 to + 0.5 -1 to + 1 -5 to + 5 -10 to + 10 -0.05 to + 0.05 -0.1 to + 0.1 -0.5 to + 0.5 -1 to + 1 -5 to + 5 -10 to + 10Ref.: Applicable nozzle for suction/release applications 0.1 nozzle 0.2 nozzle 0.3 nozzle Collet nozzle 0.1 nozzle 0.2 nozzle 0.3 nozzle Collet nozzleWorking fluidMax. working pressure MPaMin. working pressure MPaClean air (JIS B 8392-1. 1. 1 to 5. 6. 2), compressed air (JIS B 8392-1. 1. 1 to 1. 6. 2) Note 1 , nitrogen gas0.2-0.1Withstanding pressure MPa0.3Ambient temperature/humidityWorking fluid temperature0 to 50, 90%RH or less (with no dew condensation)0 to 50DisplayPower display (green)Power display (green), switch output display (yellow)OutputAnalog output 1 point Note 2Switch output 2 points Note 3(1-5V voltage output, connected load impedance 50K and over) (NPN or PNP open collector output, 30 VDC 50mA or less, PLC/reraly compatible)Linearity5%F.S. or less (0.1MPa, 25 , flow rate range 100%F.S.)Pressure characteristics 5%F.S. or less (-0.09 to 0.2MPa, where 0.1MPa is reference)Temperature characteristics 0.2%F.S./ or less (15 to 35 , where 25 is reference)Repeatability (repeatability)1%F.S. or less 2%F.S. or less2%F.S. or lessWorking conditionsInstallation Analog output precision *4ResponsivenessPower voltageCurrent consumptionLead wireInstallation attitudeStrait piping sectionProtective structureVibration resistanceEMC directiveWeight gFSM-V-A-R0005FSM-V-A-R0010Analog output typeFSM-V-A-R0050FSM-V-A-R0100FSM-V-A-R0500FSM-V-A-R1000FSM-V-N/P-R00055ms or less (when discrete sensor is reaching 90% of ultimate output voltage) Note 512/24 VDC (10.8 to 26.4V)30mA or lessFSM-V-N/P-R0010Switch output typeFSM-V-N/P-R0050FSM-V-N/P-R01002.6 0.15mm 2 x 3-conductor (3m) 2.6 0.15mm 2 x 4-conductor (3m)FreeNot requiredIEC standards IP4010 to 150 Hz, double amplitude 1.5 mm, maximum 10 G, two hours each in X, Y, Z directionsEN55011, EN61000-6-2, EN1000-4-2/3/4/6/8Approx. 8 (excluding leads, joints)FSM-V-N/P FSM-V-N/P-R0500 -R1000Note 1: Refer to the Compressed air quality classes according to JIS B 8392-1:2003 on page 1281.Note 2: Analog output indicate 3 V when the flow is 0, and changes to the 5 V side when the lead when gas flows to the right looking at the unit with leads on the right.Analog output changes to the 1 V side when the flow is reversed.Note 3: The Fixed hysteresis 1 boundary value judgment type switch output is used. The Output can be set within the full flow range by turning the trimmer. OUT1 andOUT2 operation modes are opposite.Note 4: F.S. (full scale) in these specifications indicates the flow range. For example, F.S. for flow rate -10 to +10 /min is 20 /min.Note 5: Response time varies depending on the piping conditions.Note 6: When using this product to confirm suction, be sure to insert an air filter (filtration rate 30 m or less) between the suction nozzle and this product to preventforeign matter from being sucked in.A filter for drainage removal must be inserted on the primary (upstream) side when compressed air is used.Note 7: Converted to volumetric flow at 20 1 barometric pressure (101 kPa).Ending1306

Separated display specifications (analog output dedicated) Note 8Note 8: The separate display is dedicated to analog output type. It must not be connected to switch output.Note 9: This indicates the minimum display for the flow, and does not guarantee display accuracy.FSM-V SeriesSpecificationsModel no.Separate indicatorDescriptionsFSM-V-DN/P-R0005 FSM-V-DN/P-R0010 FSM-V-DN/P-R0050 FSM-V-DN/P-R0100 FSM-V-DN/P-R0500 FSM-V-DN/P-R1000Connectable analog output FSM-V-A-R0005 FSM-V-A-R0010 FSM-V-A-R0050 FSM-V-A-R0100 FSM-V-A-R0500 FSM-V-A-R1000Type of displayFlow display (7-segment 3-digit, orange), run and switch output display (orange)Display min. unit Note 9 0.1mL/min. Note 7 1mL/min. Note 7 0.01L/min. Note 7 0.1L/min. Note 7Switch output 2 pointsOutput(NPN or PNP open collector output, 30 VDC and 50 mA or less, voltage drop of 2.4 V or less, PLC- and relay-compatible)Analog output 1 point(1-5V voltage output, connected load impedance 50K and over)Power voltageCurrent consumptionLead wireFunctions12/24 VDC (10.8 to 26.4V)50mA or less (only indicator)3.7 0.2mm 2 x 5 conductor (1m)Flow display, flow display peak hold, switch output, analog outputAmbient temperature/humidityProtective structure0 to 50 , 85%RH or less (no dew)IEC standards IP40EMC directiveWeightgEN55011, EN61000-6-2, EN1000-4-2/3/4/6/8Approx. 70 (including lead wire 1m)IndicatorRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingMiniatureFlow sensor1307

FSM-V SeriesRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingHow to orderSensorFSMModel no.V A H 3AOutput typeBLead wire directionCR0005Lead wire lengthD Flow raterangeSeparate indicator (analog output type dedicated)FSMModel no.VDNBracket for separate indicatorPPD3KL-DR0050A Switch output typeA Bracket kitH2B Flow rate rangeEJoint typeSymbolA Output typeANPAnalog outputSwitch output (NPN)Switch output (PNP)B Lead wire directionH AxialV RadialC Lead wire length3 3mDFlow rate rangeR0005R0010R0050R0100R0500R10000.05 /min.0.1 /min.0.5 /min.1 /min.5 /min.10 /min.E Joint typeH2 Straight 1.8 fiber tubeH4 Straight 4 push-inHL4 L type 4 push-inM5 Port size M5SymbolA Switch output typeNPNPN outputPNP outputDescriptionsDescriptionsB Flow rate rangeR0005 0.05 /min.R0010 0.1 /min.R0050 0.5 /min.R0100 1 /min.R0500 5 /min.R1000 10 /min.* Refer to pages 1314 to 1321 for the operation dimensions, etc.SymbolDescriptionsA Bracket kitKL-D Single foot bracket (L type)KD-D Both sides foot bracket (parallel)KHS-D Panel mount bracket set with coverKC Operation protective cover* Refer to page 1314 and 1315 for dimensions and mounting size ofbracket.1308

Internal structure and parts listFor FSM-V-**3-R*-M5/analog output type(The switch output type internal structure is also the same.)FSM-V SeriesHow to order / internal structure and parts listRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryer131610543Air filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencer15 14 1211 7 16 8 9 2No.12345678Parts nameBodyCaseLead wire holderBushBush holderSensor gasketSensor chipP tight screwMaterialPBT (glass fiber 30%)PBT (glass fiber 30%)PBT (glass fiber 30%)Nitrile rubberAluminum alloyFluoro rubberSiliconeIron steel (zinc plating)No.910111213141516Parts nameElectron circuit boardLead wireRectifierFilterCartridge joint (M5)O ringJoint fixing pinFront seatNote 1: Appearances of a front seat section differ in an analog output type/switch output type.Separate indicator FSM-V-D*-R *MaterialGlass epoxy resinHalogen-free polyethylene resin blended oneStainless steelStainless steelAluminum alloyNitrile rubberStainless steelPolyester filmCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingRefer to Page 1314 for internal structure.MiniatureFlow sensor1309

FSM-V SeriesRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterDimensions (analog output type, switch output type common)FSM-V-*V3-R*-H2(Radial lead wire, straight1.8 fiber tube)FSM-V-*H3-R*-H2(Axial lead wire, straight1.8 fiber tube)Auto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirbooster2- 3.2 penetrating2.32.617 72- 3.2 penetrating72.62.317Speedcontrol valve17101710Silencer33 33Check valve/ others(45.8)(45.8)Joint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWFSM-V-*V3-R*-H4(Radial lead wire, straight4 push-in)FSM-V-*H3-R*-H4(Axial lead wire, straight4 push-in)Air sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)Ending2- 3.2 penetrating2.32.617 72- 3.2 penetrating72.62.3171710171033 33(51.8) (51.8)* Appearances of a front seat section differ in an analog output type/switch output type.1310

DimensionsFSM-V SeriesDimensionsRefrigeratingtype dryerFSM-V-*V3-R*-HL4(Radial lead wire, L type4 push-in)FSM-V-*H3-R*-HL4(Radial lead wire, L type4 push-in)Desiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.(21.5)2- 3.2 penetrating2.32.617 7(21.5)2- 3.2 penetrating72.62.317PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirbooster17101710Speedcontrol valve33 33Silencer(58.6)(58.6)Check valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWFSM-V-*V3-R*-M5(Radial lead wire, port size M5)FSM-V-*H3-R*-M5(Axial lead wire, port size M5)Electronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controller2- 3.2 penetrating2.32.617 72- 3.2 penetrating72.62.317Flow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)Ending17101733 33(45) (45)10MiniatureFlow sensor* Appearances of a front seat section differ in an analog output type/switch output type.1311

FSM-V SeriesRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingAnalog output characteristicsOutput (V)FSM-V-A-R01004.24.03.83.63.43.23.02.8Response speed (Example for suction/release applications)Nozzle diameter 0.3Nozzle diameter 0.25Nozzle diameter 0.2Pressure loss characteristicsPressure loss (kPa)Pressure loss (kPa)Pressure loss (kPa)FSM-V-*-R0005-H40.050.0450.040.0350.030.0250.020.0150.010.00500 0.01 0.02 0.03 0.04Flow ( /min)FSM-V-*-R0050-H40.180.160.140.120.10.080.060.040.0200 0.1 0.2 0.3 0.4Flow ( /min)FSM-V-*-R0500-H4654321Piping diameter: 4( Pipe length (nozzle to vacuum source): 0.3m )0 10 20 30Time (mS)0.050.5-0.05MPa0.1MPa0.2MPa-0.05MPa0.1MPa0.2MPa-0.05MPa0.1MPa0.2MPaVoltagelevel whennot suckedVoltagelevel whensuckedPressure loss (kPa)Pressure loss (kPa)Pressure loss (kPa)Analog output (V)654321FSM-V-*-R0010-H4FSM-V-*-R0100-H4FSM-V-*-R1000-H4Analog output data (example)0-1 -0.8 -0.6 -0.4 -0.2 0 0.2 0.4 0.6 0.8 10.10.090.080.070.060.050.040.030.020.0100 0.02 0.04 0.06 0.08Flow ( /min)0.50.450.40.350.30.250.20.150.10.0500 0.2 0.4 0.6 0.8Flow ( /min)161412108642Flow (/min)0.11-0.05MPa0.1MPa0.2MPa-0.05MPa0.1MPa0.2MPa-0.05MPa0.1MPa0.2MPa000 1 2 3 4 50 2 4 6 8Flow ( /min)Flow ( /min)* When using the fiber tube, the pressure loss may increase depending on the piping conditions.131210

Operation section names / functions and settingSwitch output typePOWER display· Turns ON when power supply ON.Output (OUT1) display· Turns ON when OUT1 output ON.FSM-V SeriesOperation section names / functions and settingOutput (OUT2) display· Turns ON when OUT2 output ON.Refrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterHow to set switch (switch operation and fluid flow directions)· Turn SET1 and SET2 trimmers to turn the two switchoutput points (OUT1 and OUT2) on or off.2-point output has different switch operations as shown at right.· Use 0 bit (+) driver.SET1 trimmer· Set switch output operating point of OUT1.POWER OUT1 OUT2SET1 SET2- + - +FSM-VSET2 trimmer· Set switch output operating point of OUT2.Flow direction- Flow direction +OUT1 switch operationONSetting trimmerSET1Auto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSeparate indicator(-FS) Large flow rate(-FS) Large flow rateFlow 0OUT2 switch operationFlow 0OFFLarge flow rate (+ FS)(Cautions) · Switch output hysteresis is fixed (10%F.S. or less).· Do not press the trimmer forcibly with a screwdriver. The trimmer could break.ONOFFLarge flow rate (+ FS)Refer to page 1318 for details on the separated display's display and operation section names, functions, and operation.SET2SilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingMiniatureFlow sensor1313

Refrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterSeparate indicatorFSM-H-D* Series (FSM-H)FSM-A-D* Series (FSM-A)FSM-V-D* Series (FSM-V)Auto. drain/ othersF.R.L.(Module unit)Internal structure and parts listF.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersFSM-H-D*-*FSM-A-D*-*FSM-V-D*-* (separate indicator)1234511109876No.1234567891011Parts nameCase topDisplay circuit boardCPU circuit boardSensor circuit boardLead wire (1m)ScrewRear side guardInner caseTerminal boxShield seatSurface seatMaterialPBT (glass fiber 30%)Glass epoxy resinGlass epoxy resinGlass epoxy resinPolyvinyl chlorideBrass/nickelingPBT (glass fiber 15%)PBT (glass fiber 30%)Polyamide/copper alloy (plating)AluminumPolyester filmJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWDimensionsFSM-H-D*-*FSM-A-D*-*FSM-V-D*-*FSMRUNOUT130OUT2322- 2.7 depth 722VSGElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorBracket dimensionsMODE12L/minCable length 1 m3.7 5-conductorSensor terminal boxSmallflow controllerFlow sensorfor airFlow sensorfor waterWith single foot bracket (PPD3-KL-D)* L type bracket, set screw 2 pieces327.5Installation holemachining drawingTotal airsystemTotal airsystem(Gamma)182-M318Ending152-nominal 3(P tight)25This installation bracket can be placed at 90° increments on the switch.Determine the installation direction based on where the display is installed.1314

Bracket dimensionsWith both sides foot bracket (PPD3-KD-D)* D type bracket, set screw 2 pieces30 32 8622-nominal 3(P tight)This installation bracket is installed 90° increments.Determine the installation direction based on where the display is installed.1850HAFSM- V -D* SeriesInstallation hole machining drawing4-M3Lead wire hole5018DimensionsRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerPanel mount bracket set with cover (PPD3-KHS-D)* Panel vessel, panel holder, panel key, panel guardCheck valve/ othersJoint/ tubePlate thickness t0.8 to 63229.552(Mounting pitch 53 and over)Panel hole machining fig.*33.5 0.3VacuumfilterVacuumregulatorSuctionplateMagneticspring bufferGuard39(Mounting pitch 40 and over)VSGMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensor5Panel holderPanel vesselWith operation protective cover (PPD3-KC)* Protective cover, protective cover holderA panel holder changes a 90° installation attitude.*37.5(2.5)Pressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingProtective coverProtective cover holderSeparate indicatorFlow sensorNote: Combinations of PPD3-KHS-D can not be made.1315

FSM all series commonRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerWiring methods(FSM-H/FSM Series)FSM-H-N/FSM-N (indicator type NPN output)Main circuitLine colorBrownBlueGrayBlackWhiteOutput short-circuitprotecting circuitBrown line (power supply +)Gray line (analog output) LoadBlack line (switch output)White line (switch output) max50mABlue line (power supply-)DescriptionsPower supply 12 to 24 VDC0V (GND)Analog output (1 to 5V)OUT1 (max50mA)OUT2 (max50mA)Internal circuit and examples of load connectionLoadmax50mALoad+-FSM-H-P/FSM-P (indicator type PNP output)Main circuitOutput short-circuitprotecting circuitLine color DescriptionsBrown Power supply 12 to 24 VDCBlue 0V (GND)Gray Analog output (1 to 5V)Black OUT1 (max50mA)White OUT2 (max50mA)Brown line (power supply +)max50mABlack line (switch output)max50mAWhite line (switch output)Gray line (analog output)LoadLoadBlue line (power supply-) Load+-Check valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorFSM-H-A/FSM-A (analog output type)Main circuitBrown line (power supply +)Black line (analog output)Blue line (power supply-)Line color DescriptionsBrown Power supply 12 to 24 VDCBlue 0V (GND)Black Analog output (1 to 5V)Load+-Connection methods of analog output type and separate indicatorSeparate indicator(FSM-A-D*-*/FSM-H-D*-*)Brown (power supply +)VBlack (signal line)SBlue (power supply-)GAnalog output type(FSM-A-*-*/FSM-H-A-*-*)Pressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)Note: When using a metal body (stainless steel body, aluminum body) type, connect the F.G. of the device connected to the plus or minus side of the power supply to the body.Do not conduct withstand voltage testing or insulation resistance testing when the F.G. is connected. These tests could cause damage or burning.Ending1316

(FSM-V Series)FSM-V-A* (analog output type)FSM all series commonInternal circuit and examples of load connectionTechnical dataConnection methods of analog output type and separate indicatorRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerMain circuitPower supplyLED (green)BrownBlackBlueLoad+-Separate indicator(FSM-V-D*-*)Brown (power supply +)VBlack (signal line)SBlue (power supply-)GAnalog output type(FSM-V-A*-*)Air filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.Line colorBrownBlueBlackDescriptionsPower supply 12 to 24 VDC0V (GND)Analog output (1 to 5V)FSM-V-N * (switch output type NPN output)Main circuitOutput shortcircuitprotecting circuitPower supply Output 1 Output 2LED (green) LED (yellow) LED (yellow)Line color DescriptionsBrown Power supply 12 to 24 VDCBlue 0V (GND)Black OUT1 (max50mA)White OUT2 (max50mA)BrownLoadBlack (OUT1)White (OUT2)BlueLoad+-Note: Switch output cannot be used with the separated display.FSM-V-P * (switch output type PNP output)Main circuitOutput shortcircuitprotecting circuitPower supplyLED (green)Output 1LED (yellow)Output 2LED (yellow)Line color DescriptionsBrown Power supply 12 to 24 VDCBlue 0V (GND)Black OUT1 (max50mA)White OUT2 (max50mA)BrownBlack (OUT1)White (OUT2)BlueLoadLoad+-PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SW(separate indicator)FSM-*-DN-* (separate indicator NPN output)Main circuitOutput shortcircuitprotecting circuitBrownLoad LoadBlack (OUT1)White (OUT2)Gray (analog output)BlueLine color DescriptionsBrown Power supply 12 to 24 VDCBlue 0V (GND)Gray Analog output (1 to 5V)Black OUT1 (max50mA)White OUT2 (max50mA)Load· To cancel short-circuit protection, turn poweroff once, correct wiring mistakes, etc., thenturn power on again.F.G.+-FSM-*-DP-* (separate indicator PNP output)Main circuitOutput shortcircuitprotecting circuitBrownBlack (OUT1)White (OUT2)Gray (analog output)Line color DescriptionsBrown Power supply 12 to 24 VDCBlue 0V (GND)Gray Analog output (1 to 5V)Black OUT1 (max50mA)White OUT2 (max50mA)Load Load LoadBlue· To cancel short-circuit protection, turn poweroff once, correct wiring mistakes, etc., thenturn power on again.F.G.+-Electronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingSmallFlow sensor1317

FSM all series commonRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWNames and functions of display and operating sectionsSeparate indicator type (FSM-H-D/FSM-A-D/FSM-V-D common)MODE keyRUN display· Turns on when displaying flow.· Blinks during peak hold operation.Overflow display (FSM-V-D * is excluded.)· Lights and displays when the 3-digit displayis exceeded.(At 10.00 /min, this turns on, and 0.00 isdisplayed on the 3-digit LED.)Minus display· Lights when gas flows in reverse.· Use to enter setting mode.· Press to advance setting mode· Use to return to the flow display.· Use to release the peak hold operation.1 (UP) key· Sequentially displays CH1 data when the flow rate is displayed.· Displays maximum during peak hold operation.· Sets the mode when the mode is selected.· Used to increment values, etc., when data is set.FSM1RUN *MODEOUT1** The design of the front sheet differs for the FSM-H Series, but display and operation section names and functions are the same.1OUT2*2/minOutput (OUT1) display· Turns on when CH1 output is on.· Blinks when overcurrent is detected.Output (OUT2) display· Turns on when CH2 output is on.· Blinks when overcurrent is detected.3-digit LED display· Displays flow rate, various switchsetting, and machine status· displayed for an overflow.· displayed for overcurrent inreverse.2 (DOWN) key· Sequentially displays CH2 data when the flow rate is displayed.· Displays the minimum during peak hold operation.· Sets the mode when the mode is selected.· Used to decrement the value, etc., when data is set.Air sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)Ending1318

OperationSwitch output functionSwitch operation modeFSM all series commonOperationRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterOperation pattern name LED display Operation waveformWindow operation 1(ON within specified range)Window operation 2(ON out of specified range)Hysteresis operation 1(Flow small side ON)Hysteresis operation 2(Flow large side ON)Switch output OFFSet point confirmation methodCH1 data displayPressCH2 data displayWhen a key is pressed while the flow is displayed, the switch data ON setting, OFF setting,operation waveform, zero adjustment, and model are displayed and confirmed.Switch operation is not affected during the following operations:ON sideblinkingONOFFON3%F.S. and over-ON set pointOFF-OFF set pointONOFF-ON set pointONOFF-OFF set pointONOFF-Operation waveform displayFlow+OFF set point3%F.S. and over1%F.S.1%F.S. and over1%F.S. and over1%F.S.Flow+ON set pointFlow+OFF set pointFlow+ON set pointOutput is turned off regardlessof ON or OFF setting.Flow+Note 1.Note 2.Note 3.Note 4.Note 5.ON set point displayWhen used for a winding operation, leave an intervalof 3% F.S. or more between the two settings.1%F.S. hysteresis is automatically added to the onand off sides.When used for hysteresis operation, leave aninterval of 1% F.S. or more between the two settings.If there is no difference between the two settings,operation may not take place or may be unstable.If switches are operated when flow is not stable,such as pulsating, operation may be unstable.In this case, provide sufficient margin between thetwo setting values. Confirm that switch operation isstable before use.The left side of the operation waveform indicatesnegative pressure, and the right side indicatespositive pressure.The magnitude relationship of the ON and OFFsettings is determined when the waveform is set,and a reverse magnitude relationship cannot beattained.With this product, however, operation of thedesignated operation pattern is the priority.When the two settings are input, the magnituderelationship is automatically determined, and each isjudged and processed at the appropriate ON andOFF settings.In other words, even if ON and OFF settings areinput reversed, input is recognized correctly as ONand OFF and operation occurs with the designatedoperation mode.OFF sideblinkingAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)PressOFF set point displayOperation waveform displayEnding0 point adjustment value, model number display0 point adjustment value and model number display are alternately shown.Switch operation is not affected during this operation.SmallFlow sensorPress at the same time"AdJ" display 0 point adjustment value display Model number display1319

FSM all series commonRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWUsing each functionPeak hold functionMaximum and minimum values for the flow rate within a set interval is displayed.Use for such as are the instantaneous flow change confirmation.The peak hold operation does not affect this product's basic functions such as switch operations or pressure display.Flow display state"460" is displayed.Press at the same timeSwitch output functionPeak hold operation start(RUN light blinking)Peak value displayRefer to page 1321 for operation method.This product has 2-point switch output, and uses four operation modes and stopping.The switch function is started by setting the required operation pattern and by setting two settings (ON and OFF) that specify the operation point.PressBottom value displayPressDetermine the required operation mode and on and off before setting.Select and set the following data to operate the switch:CH1: operation pattern CH1: ON set point CH1: OFF set pointCH2: operation pattern CH2: ON set point CH2: OFF set pointBlinkingBlinkingPeak value "475"Bottom value "453"Air sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)Forced outputRefer to page 1321 for operation method.Use this function to forcibly turn switch output on and confirm wiring connection or initial operation of the input device.(Note) Use this test for operation checking of wiring and input unit.Do not use this function instead of actual signals when executing the sequence program while the machine or device is operating.0 point adjustment Refer to page 1321 for operation method.Deviation of the display from zero is compensated for in the state with no flow rate.If set incorrectly, readjust when no gas is flowing.Ending(Note) The above settings and testing greatly affect the output signal and display.Be sure to stop the machine and devices using this product, and confirm that safety can be ensured even ifproblems or an incorrect display occurs before operating.Using this function while the machine or device is operating could cause unforeseen problems or incorrect displays."Operation"To return to the flow display during operations in any setting mode, turn power off and on. The flow display is redisplayed.1320

Switch output, forced output, 0 point adjustment operation(flow display)For safety, if the key is notoperated for two secondsor more before the modeis set, the pressure displayis redisplayed.FSM all series commonOperationBasic key operationThese key operations are valid in the switch operation pattern setting, on/off setting and zero point adjustment mode.Refrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterPressBlinkingBlinkingReleaseBlinkingHold downonceWhen the keyis held down, thepressure display isredisplayed.DeterminationHold downonceChange the mode withthe UP/DOWN keysSwitch CH1Operation mode changeChannel 1 displayData returnPress at the same timeAlternatedisplayHold downonceCountUpCountDownSetting data of switch outputON point waveform displayAlternatedisplayHold down onceData readingPress at the same timeOFF point waveform displayAlternatedisplayOperation mode display Set point display Set point displaySwitch CH2Operation mode changeHold down onceSwitch CH2Setting ON and OFF dataSwitch CH1Setting ON and OFF dataChange the mode withthe UP/DOWN keysTo flow displayAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorHold downonceSet in the same manneras switch CH1.Hold down oncePressure SWfor coolantSmallflow sensorSmallflow controllerHold downonceBlinkingDeterminationCH1 output ONSwitch output forced ON modeCH2 output ONTo flow displayFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingHold downonceBlinkingHold downonceDeterminationPressPress0 point adjustment modeAdjusted value reading"AdJ" displayHold down onceTo flow displaySmallFlow sensorHold downonceAlternatedisplay0 point adjustmentvalue displayPress at the same timeHold down onceCAUTIONBe sure no gas is flowing when adjusting zero.1321

FSM all series commonRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingFSM (air, nitrogen gas) Series Measurement PrincipleThe FSM (air and nitrogen gas) Series incorporates a platinum sensor chip (3 mm x 7 mm) machined with silicon micromachining. The heater section is thermallyinsulated from the silicon substrate. The heating capacity is extremely low, enabling high sensitivity with a high-speed response.When a bridge including the heater and ambient temperature sensor is assembled as shown in the figure, heater temperature is controlled so that a constant temperaturedifference exists for the ambient temperature sensor. Platinum, whose resistance changes with changes in temperature, is used for the heater material. When gas flows,bridge circuit output (voltage) rises proportional to the flow rate to compensate for heat lost from the heater to maintain the heater at a constant temperature difference.When this control is used, the flow is detected without being affected by temperature or pressure changes. This control is suitable for detecting relatively large flows.FLOWAmbient temperature sensor-Vout+Electrode7mmSensor chipHeaterHeaterAmbient temperature sensorBridge circuit3mmPlatinum sensor chipFSM-H, FSM (argon, nitrogen gas) FSM-V Series Measurement PrincipleFSM-H, FSM (argon and nitrogen gas) FSM-V Series incorporates a platinum sensor chip (3 mm x 3.5 mm) machined with silicon micromachining. Thesensor is thermally insulated from the silicon substrate. The heating capacity is extremely low, enabling high sensitivity with a high-speed response.At the sensor, two temperature sensors are arranged with a heater in between. Platinum, which has a resistance that changes based on temperature, isused for the temperature sensor. When the heater is turned on and heated, the temperature distribution is symmetrical to the center of the heater if there isno flow. When flow is received, the symmetrical property of temperature distribution is lost, and temperature upstream from the heater drops, and thatdownstream rises. This temperature difference appears as the difference in temperature sensor resistance, and varies with the flow rate. If flow is reversed,the temperature difference (resistance value difference) is reversed. A bidirectional flow is thus detected. This is suitable for detecting relatively small flows.(without flow)(with flow)Thermo sensor (1)Thermo sensor (2)FLOWR1HeaterRh R2R1 Rh R2TemperatureresistanceTemperature distributionsymmetryTemperatureresistanceSymmetry of temperaturedistribution are lostR1R2R1R25VVoltage5VVoltageR1R1V out2.5VV out2.5VR2R21322V outV out

1 How to select flow sensorFSM all series commonTechnical dataUse this as a guide to selecting the flow range when using a flow sensor to confirm suction and release with a suction nozzle or for leakage tests, etc.The flow is calculated by the effective nozzle (pin hole) sectional area, and the pressure difference inside and outside the nozzle.Refrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterWhen P1Q = 113.2 x S x P11.89P2 (sonic)When P1 < 1.89P2 (subsonic)Q = 226.4 x S x P2 (P1 - P2)Q : Flow /min.P1 : Primary absolute pressure MPaP2 : Secondary absolute pressure MPaS : Effective sectional area of nozzle (pin hole) mm 2P2 : VacuumP1 : PressurizationSuction nozzleP1 : Atmospheric pressureP2 : Atmospheric pressureP1 : PressurizationAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerPin holeP2 : Atmospheric pressureExample of calculationThe following table gives the flow calculation values when using 0.1 to 2 nozzle diameter and variable P2.P1 (MPa) P1 (MPa) P2 (MPa) P2 (MPa) Sonic/Calculated flow rate value ( /min)Absolute pressure Gauge pressure Absolute pressure Gauge pressure subsonic 0.1 0.2 0.3 0.4 0.5 0.7 1 1.5 2Blow (leakage inspection)Suction0.10130.10130.10130.10130.10130.10130.10130.11130.12130.14130.16130.18130.20130.30130.40130.50130.601300000000.010.020.040.060.080.10.20.30.40.50.03130.04130.05130.06130.07130.08130.09130.10130.10130.10130.10130.10130.10130.10130.10130.10130.1013-0.07-0.06-0.05-0.04-0.03-0.02-0.010000000000SonicSonicSonicsubsonicsubsonicsubsonicsubsonicsubsonicsubsonicsubsonicsubsonicsubsonicSonicSonicSonicSonicSonic0.0900.0900.0900.0880.0820.0720.0540.0570.0800.1130.1390.1600.1790.2680.3570.4450.5340.3600.3600.3600.3520.3290.2870.2150.2260.3200.4530.5540.6400.7161.0711.4261.7822.1370.8100.8100.8100.7920.7400.6450.4830.5090.7201.0181.2471.4401.6102.4103.2094.0094.8091.4401.4401.4401.4081.3151.1470.8590.9051.2801.8102.2172.5602.8624.2845.7067.1278.5492.2502.2502.2502.2002.0551.7921.3431.4142.0002.8283.4644.0004.4726.6948.91511.13713.3584.4114.4114.4114.3124.0283.5122.6312.7723.9205.5436.7897.8408.76513.11917.47421.82826.1829.0029.0029.0028.8008.2207.1665.3705.6578.00011.31313.85615.99917.88826.77435.66044.54753.43320.25420.25420.25417.24916.11014.04610.52511.08715.67922.17427.15731.35840.24860.24280.236100.230120.22436.00736.00736.00735.20232.87828.66621.48022.62631.99845.25255.42363.99671.552107.096142.641178.186213.731(CAUTION)· If there is leakage in piping, etc., the actual flow exceeds the calculated flow. Take pipe leakage into account when selecting the flow.· If a piping section is thinner in diameter than the suction nozzle, the flow is restricted, and may be less than the calculated value.It may also not be possible to check suction, etc.· The effective sectional area is a guideline. If the nozzle is long and thin, the effective sectional area is smaller than the nozzle opening.· Response speed is determined by piping volume between the flow sensor and suction nozzle (pin hole). During high-speed detection,set the flow sensor near the suction nozzle, or reduce the volume when possible.Check valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingSmallFlow sensor1323

FSM all series commonRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingSuction confirmation1 Response timeResponse time during suction confirmation isdetermined by the piping's volume and thevacuum pump's exhaust capacity, etc.When using piping as shown at right, forexample, response time depends on piping asshown below. Based on this, to shorten theresponse time, piping volume should be madeas small as possible.Analog voltage output (V)5.554.543.532.521.510.5Suction0.5 ( /min)2 Using a collet nozzleGas flows topiping B.Suction0 ( /min)Pressurization source (20kPa)Vacuum source (-70kPa)Release (blow)Gas is releasedfrom piping B.Time (msec)Dependency of response on pipingThe collet nozzle is often used when the workpiece to be picked up should not bedirectly seated against the nozzle. The collet nozzle is triangular, so when theworkpiece is picked up, a gap is created at the four corners. This causes leakageduring pickup. If the effective area of piping, including valves and joints, etc., is toosmall compared to the collet nozzle and workpiece gap (effective sectional area),the flow is determined by the piping's effective sectional area, and the differencein flow during suction and without suction is small. In this case, suction isaccurately confirmed by keeping the effective sectional area of the piping largerthan the effective sectional area of the gap between the collet nozzle andworkpiece.Pressure sensor3 way valveAExamination pipingAFSM-VSuction0 100 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400B0.5 ( /min)A-A cross sectionNozzle ( 0.25)-0.3 ( /min) A: 4 x 40 B: 4 x 40A: 4 x 40 B: 4 x 1000A: 4 x 1000 B: 4 x 40ANozzleWorkpieceCollet nozzle1324

Leakage inspection (Note 1)1 How to calculate leakage amountFSM all series commonTechnical dataRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerWhen changing from the pressure gauge, use the following formula to calculate leakage:Q = V xQ = 500 xP1.013 x 10 5201.013 x 10 5X60TQ: Leakage amount (m /min), P: Differential pressure (Pa), V: Workpiece inner volume (m ) T: Detection time (S)Example: When the workpiece has an inner volume of 500 m , leakage when a 20 Pa difference in pressure occurs at 5-second detection time is:2 Percent of leakage amount of gas and liquidX6051.18 (m /min)Air filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerUse this as a reference when inspecting leaks in a workpiece for gas by using air.This formula is based on the Hagen Poiseuille formula, and as a condition, the pinhole must be smooth-surfaced round tubing.Pinholes caused by welding faults, etc., may not fit the logical formula.QIQaQaQlanlPaP1a= XlViscosity coefficient (Pa·s x 10 -3 )Temperature205070Liquid101.3 x Pl(101.3 + Pa / 2) x Pa: Air leakage (m /s): Liquid leakage (m /s): Air viscosity (Pa·s): Liquid viscosity (Pa·s): Air test pressure (kPa): Liquid test pressure (kPa)Water 20Brake oil 50Brake oil 50Air ( a) Water ( l) Brake oil ( l)0.01810.01950.02041.000.550.4026107Ratio of air (20 ) and gas leak ratel, Pa·s0.0010.010.01Example: When inspecting a workpiece with water leakage of 0.1 mPneumatics Pa Liquid pressure Pl Ql / Qa0.4MPa0.4MPa0.4MPa0.4MPa0.4MPa15MPa0.0060.00060.02/min (test pressure of 0.4 MPa) with air (test pressure 0.4 MPa), leakage Qa is as follows:Check valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingSmallFlow sensorQ0.1= 0.006 Qa =Qa 0.00616.7 (m /min)1325

FSM all series commonRefrigeratingtype dryer3 Workpiece filling timeDesiccanttype dryerHigh polymermembranedryerAir filterAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveIf the workpiece's inner volume is large, it will take time toraise air to the test pressure for leakage inspection. In thiscase, inflow time is shortened by using a bypass circuit witha two-way valve or check valve, etc., as shown at right.The two-way valve is opened and closed with the flowsensor's flow rate. When inflow starts and inner workpiecepressure nears test pressure, the flow rate drops. The twowayvalve for bypass is closed with this flow rate signal,and leak valve measurement starts.Use a check valve with a low cracking pressure valve. Thecheck valve remains open until pressure nearly reachestest pressure and inflow time is shortened.(Example of system configuration)2 wayvalveFlow sensor2 way valve(By-pass)2 way valve(Exhaust)Measuring sampleSilencerCheck valve/ othersFlow sensorJoint/ tubeMeasuring sampleVacuumfilterVacuumregulatorSuctionplateMagneticspring buffer2 wayvalveCheck valve(By-pass)Mechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorNote 1: The above information is provided as a reference for selection and use.Piping may differ from actual piping, so confirm this before starting use.2 way valve(Exhaust)Smallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)Ending1326

FSM, FSM-V dedicated seriesMiniature inline filterFSM-VFM SeriesRefrigeratingtype dryerDesiccanttype dryerHigh polymermembranedryerAir filterFeaturesThis is an inline filter for the small flow sensor FSM and FSM-V Series. The content volume is small so high-speed response is notobstructed when suction is confirmed.Miniature, space-saving body does not get in the wayEasy-to-replace elementPolyamide resin with outstanding chemical resistance used for the caseTransparent case enables element contamination to be checked from outsideSpecificationsDescriptions FSM-VFM-H22 FSM-VFM-H44 FSM-VFM-M55Working fluidClean air (JIS B 8392-1. 1. 1 to 5. 6. 2), compressed air (JIS B 8392-1. 1. 1 to 1. 6. 2) Note 1Applicable tube outer diameter1.84(Fiber tube)(Push-in)Port size M5Withstanding pressure MPa0.75Working pressure range MPa-0.1 to 0.5Ambient temperature range0 to 50MaterialCasePolyamideElementPolypropylene, polyethyleneFiltration rating m10Product weight g5.2 9.54.2Recommended flow rate /min10 Note 2Note 1: Refer to a compressed air quality grade JIS B 8392-1: 2000 on page 1281 .Note 2: Pressure loss increases when flow exceeds 10 /min, so use at 10 /min or less.How to orderFSM VFM H44 BModel no.A Tube outer diameterB AttachedSymbolDescriptionsA Tube outer diameterH22 1.8 (fiber tube)H44 4 (push-in)M55 Port size M5B AttachedBlank Without bracketB Bracket attachedAuto. drain/ othersF.R.L.(Module unit)F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterSpeedcontrol valveSilencerCheck valve/ othersJoint/ tubeVacuumfilterVacuumregulatorSuctionplateMagneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)EndingBracket part model no.FSM VFM B(Cross-headed flat tapping screw M2.5 x 6: 1pc.)Model no.FSM VFM E(Element: 5 pcs., joint fixing pin: 1 pc.)Clean room specifications (catalog No. CB-033SA)Dust generation preventing structure for use in cleanroomsFSM-VFMP70SmallFlow sensor1327

FSM-VFM SeriesRefrigeratingtype dryerDimensionsDesiccanttype dryerHigh polymermembranedryerFSM-VFM-H2210FSM-VFM-H4410FSM-VFM-M5510Air filterAuto. drain/ others101010F.R.L.(Module unit)37.843.837F.R.L.(Separate)CompactF.R.PreciseregulatorF.R.L.(Relatedproducts)CleanF.R.ElectropneumaticregulatorAirboosterFSM-VFM-B (bracket)Installation hole2.6148.34.8 6.84Filterholder8816Speedcontrol valveSilencerCheck valve/ others6.8 6.813.6Joint/ tubeVacuumfilterVacuumregulatorFlow characteristics (FSM-VFM-H44)2.5Suctionplate2Magneticspring bufferMechanicalpressure SWElectronicpressure SWContact / closecontact conf.SWAir sensorPressure loss (kPa)1.510.50.1MPa0.3MPaPressure SWfor coolantSmallflow sensorSmallflow controllerFlow sensorfor airFlow sensorfor waterTotal airsystemTotal airsystem(Gamma)Ending0When using fiber tubing, pressure loss may increase depending on piping conditions.CautionsThis filter has an orientation.When using this filter to confirm suction, etc., use a check valve to prevent the flow of dirt.(Example of circuit)1 2 3 4 5 6 7 8 9 10 11Switching valveFlow ( /min)VacuumsourcePressurizationsourceFSMFSMfilterNozzleRefer to page 1279 for other precautions and details on replacing the element.1328