? LOW PRESSURE TRANSDUCER FULLY TEMPERATURE ...

SILICONMICROSTRUCTURESINCORPORATEDSM5651/SM5652Low Pressure, Constant Current DIPLow Pressure, Constant Voltage DIP• LOW PRESSURE TRANSDUCER FULLY TEMPERATURE COMPENSATED AND CALIBRATEDDUAL-IN-LINE PACKAGEDESCRIPTIONThe SM5650 Series of OEM pressuresensors are fully calibrated, temperaturecompensated low-pressure sensors in dualin-line packages for printed circuit boardmounting. These sensors offer improvedperformance as well as the option for eitherconstant current or constant voltageexcitation. Higher pressure ranges are alsoavailable (See SM5611/SM5612Datasheet), resulting in the broadestselection of standard pressure ranges in theindustry.The SM5600 Series pressure sensors areconstructed by attaching a highly stablepiezoresistive pressure sensor chip to aceramic substrate. Thick film resistors onthe ceramic are laser trimmed duringmanufacturing to provide zero offsetcalibration, temperature compensation forzero offset, and temperature compensationfor sensitivity. In the Model SM5651, anadditional resistor is trimmed to normalizethe output of an external differential amplifierto provide span calibration when the sensoris driven by a constant current supply. Inthe Model SM5652, a constant voltagesupply can be used and the normalizedoutput span of each sensor can then beeasily amplified.The model SM5651 is designed for constantcurrent excitation.The model SM5652 is designed for constantvoltage excitation.Various electrical pin and pressure portconfigurations are available for flexibility inmatching this product to specificapplications.FEATURES• Low pressure (from 0-0.15 PSI FS to 0-3.0 PSI FS)• Constant voltage and constant currentversions• Easy to use dual in-line package (DIP)• Wide 0-60°C compensated temperaturerange• Span calibration to ±2% for low pressure• Zero offset calibration• High performance, stable packagedsilicon chip• Gage and differential pressureconfigurationsAPPLICATIONS• Medical equipment• Respiration• HVAC• Level detection• Flow measurement• Industrial controlRev 1.2 8_02© 2001-2002Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USATel: 408-577-0100 ♦ Fax: 408-577-0123 ♦ Sales@Si-Micro.Com ♦ WWW.Si-Micro.Com

SM5651/SM5652CHARACTERISTICS FOR SM5651/SM5652 - SPECIFICATIONSTest Conditions: Model SM5651 w/excitation = 1.500mA @ 25 o C, Model SM5562 w/excitation = 10.00Vdc @ 25 o C, unless otherwise specified.Min. Typ. Max. Units NotesExcitationCurrent (SM5651) 0.00 1.50 3.00 mAVoltage (SM5652) 0.00 10.00 20.00 VOutputSpan (SM5651) 25.0 45.0 75.0 mV 1Span (SM5652) 24.5 25.0 25.5 mV 1, 2Offset -2.00 +0.20 2.00 mVTemperature PerformanceTC Span -0.65 +0.20 0.65 %FS 3TC Offset -1.00 +0.20 1.00 %FS 3Temp Hysteresis -0.30 +0.05 0.30 %FS 4AccuracyLinearity -0.30 +0.05 0.30 %FS 5Repeatability -0.30 +0.05 0.30 %FSPressure Hysteresis -0.30 +0.05 0.30 %FSSensitivity Matching -2.00 -0.20 +2.00 %FS 1, 6Impedance (SM5651)Z Input 1.80 3.00 3.80 kΩZ Output 2.70 3.30 3.80 kΩImpedance (SM5652)Z Input 4.50 8.00 25.00 kΩZ Output 2.00 2.50 3.80 kΩTemperature RangeCalibration 0 60 °COperating -40 125 °CStorage -55 125 °CDynamic CharacteristicsProof Pressure 10X FS PressureBurst Pressure 15X FS PressureNotes:1. Positive Pressure is defined as entry on the bottom side of the die; gain, during factory calibration, is set using negative pressure2. For the SM5652, 0.15 PSI range, span is 23.75 (min) to 26.25 (max).3. Measured over a temperature range of 0 to 60 o C.For 0.15 PSI, TC Span=±2.0%FS; TC Offset=±2.0%FS; For 0.3 PSI, TC Span==±0.75%FS4. For 0.30 PSI, Hysteresis=±0.45%FS;For 0.15 PSI, Hysteresis=±0.65%FS5. Best fit straight line; measured from top-side of dieORDERING INFORMATION:For 0.30 PSI, Linearity=±0.5%FS;For 0.15 PSI, Linearity=±2.5%FS6. Sensitivity matching relates to part-to-part matchingFor 0.15 PSI, Sensitivity Matching=5.0%FSModel 5651 Pin-outModel 5652 Pin-Out1 -Signal Out 1 -Signal Out2 -Iexc 2 -Vexc3 +Signal Out* 3 +Signal Out*4 +Iexc 4 +Vexc5 Gainset Resistor 5 Do Not Connect6 Gainset Resistor 6 Do Not Connect*Output increases as pressure is increased on Positive DifferentialTube or Absolute TubeDO NOT connect to “Do Not Connect” pinsPressure RangesPSI 5651/ 56520.15 0010.30 0030.80 0081.50 0153.00 030Circuit Configuration for SM5651Pin ConfigurationNotes:- All dimensions are shown in inches- Tolerance on all dimensions + 0.005” unless otherwise specified.Notice:Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the use of any circuits describedherein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement. While the information in this publication has been checked, noresponsibility, however, is assumed for inaccuracies.Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to cause failure ofa life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications.Rev 1.2 8_02© 2001-2002Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USATel: 408-577-0100 ♦ Fax: 408-577-0123 ♦ Sales@Si-Micro.Com ♦ WWW.Si-Micro.Com