Positioning System HIWIN - Industrial Technologies

Индастриал Технолоджис www.ind-techno.com.ua +38 044 498 21 94Positioning SystemsLinear motor axisWafer quality control at the highest levelHigh precision X-Y Stages with air-cushions are the prerequisitesfor surface monitoring, which even find the smallest errors, for example,in wafer production for the electronics and chip industries.Flatness ± 2 µmRepeatability ± 2 µmAccuracy ± 5 µmMicro-system Technology and Wafer ProcessingAbsolute precision and suitability for clean room conditions are the prerequisitesfor every drive in microsystem technology and wafer processing.Linear motor X-Y Stages are ideal for these tasks.Stroke 200 mm × 200 mm, optional 300 mm × 300 mmFlatness ± 4 µm across the complete strokeRepeatability ± 1 µm across both axesAccuracy ± 4 µm across both axesClean room suitability class 100, optional class 10Optionally suitable for vacuums up to 10 -3 mbarOverview for Laser ScannersHigh degree of synchronization and extended operating lives are a mustfor optical inspection systems such as laser scanners.Linear Motors with air bearings fulfill these requirements.No friction thanks to air bearingsNo cogging thanks to coreless linear motorsStroke up to 1,500 mmPhotovoltaic-panel assemblyHigh dynamic positioning of Silicium-cells for 24 hours each day.Linear motors also in vertical axes enable a long durabilityVertical axes with adjustable mass compensation and clamping element foremergeny-stop.Industrial Technologies50