2-Color Display Digital Flow Switch Series PFM5 - SMC ETech

Series PFM5SpecificationsModel PFM510 PFM525 PFM550 PFM511Applicable fluidRated flow range Note)(Flow rate range)AccuracyRepeatabilityPressure characteristicsTemperature characteristicsOperating pressure rangeRated pressure rangeProof pressureDry air, N2, ArCO2Response timeDry air, N2, Ar, CO2(Air quality grade is JIS B8392.1-1, 1.2 to 1.6.2 and ISO8573.1-1, 1.2 to 1.6.2.)0.2 to 10 l/min0.2 to 5 l/min0.5 to 25 l/min0.5 to 12.5 l/min1 to 50 l/min1 to 25 l/min2 to 100 l/min2 to 50 l/min±3%F.S. or less±1%F.S. or less (Fluid: Dry air)±5%F.S. or less (based on 0.35 MPa)±2%F.S. (15 to 35ºC)±5%F.S. (0 to 50ºC)–100 kPa to 750 kPa–70 kPa to 750 kPa1 MPa50 msec or 1 s (with response time selection function: 1 s at no-voltage input)→ Refer to the internal circuits and wiring examples on page 16.Analog outputVoltage outputCurrent outputVoltage output: 1 to 5 VOutput impedance: 1 kCurrent output: 4 to 20 mAMax. load impedance: 600 , Min. load impedance: 50Status LED’sPower supply voltageCurrent consumptionEnclosureOperating fluid temperatureOperating temperature rangeEnvironmentalWithstand voltageOperating humidity rangeresistanceInsulation resistanceVibration resistanceImpact resistanceNote: Flow rate unit is based on standard conditions (20ºC, 1 atm, 65% RH).Power ON indicator: Lights when power is turned on (Green).Flow rate indicator: Flashes when flow is applied (Green).24 VDC ±10%35 mA or lessIP400 to 50ºC (with no freezing and condensation)Operating: 0 to 50ºC Stored: –10 to 60ºC (with no freezing and condensation)Operating, Stored: 35 to 85%R.H. (with no condensation)1000 VAC for 1 min. between external terminal and case50 M or more (500 VDC Mega) between external terminal and caseWithout orifice: 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s 2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.With orifice: 10 to 150 Hz with a 1.5 mm amplitude or 19.6 m/s 2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.490 m/s 2 in X, Y, Z directions 3 times each15

2-Color Display Digital Flow Switch Series PFM5Piping Specifications / WeightPort sizePart no. 01Rc1/802Rc1/4N01NPT1/8N02NPT1/4F01F02G1/8 G1/4C4ø4(5/32")one-touchfittingC6ø6one-touchfittingC6ø8(5/16")one-touchfittingN71/4one-touchfittingWeightWetted parts materialStraight Without orifice: 95 g Straight Without orifice: 125 gStraight Without orifice: 55 gBottom Without orifice: 105 g Bottom Without orifice: 135 gBottom Without orifice: 65 gStraight With orifice: 135 g Straight With orifice: 165 gStraight With orifice: 95 gBottom With orifice: 145 g Bottom With orifice: 175 gBottom With orifice: 105 gLCP, PBT, Brass (Electroless nickel plated), HNBR (+ Fluoro coated), FKM (+ Fluoro coated), Silicon, Au, Stainless steel 304Analog OutputAnalog output [V]51Note: Analog output at maximum rated flow rate when CO2 is selected is 4.57 [V]for the voltage output type and 18.28 [mA] for the current output type.Analog Voltage Output (1 to 5 V)Max. rated flow valueModel[l/min]PFM510--110 (5)PFM525--125 (12.5)PFM550--150 (25)PFM511--1 100 (50)∗ ( ): Fluid: CO2Internal Circuits and WiringExamplesPFM5Main circuitBrown DC (+)Black OUT1WhiteResponse timeselection inputBlue DC (–)Load24 VDCMax. ratedflow valueAnalog output [mA]0020400Max. ratedflow valueAnalog Current Output (4 to 20 mA)ModelPFM510--2PFM525--2PFM550--2PFM511--2∗ ( ): Fluid: CO2Max. rated flow value[l/min]10 (5)25 (12.5)50 (25)100 (50)16

Series PFM5DimensionsPFM5-C4/C6/C8/N7OUT1OUT2DC (–)DC (+)1810.2A48FLOW SENSORPOWERFLOWOne-touch fittingApplicable tube O.D.ø4 (5/32")ø6ø8 (5/16")ø1/4(mm)A64.264.66864.643(34.2)INOUT1 IN132 x one-touch fitting1832 x 3.428PFM5-C4L/C6L/C8L/N7LOne-touch fittingApplicable tube O.D.(mm)AOUT1DC (–)OUT2DC (+)10.2ø4 (5/32")ø6ø8 (5/16")ø1/410.110.31210.3343(34.2)82 x 2.6 depth 5884818FLOW SENSORPOWERFLOW1 INA182 x one-touch fittingIN2 x 3.4OUT68288172 x 2.6 depth 5

2-Color Display Digital Flow Switch Series PFM5DimensionsPFM5-(N)01/(N)02/F017048OUT1DC (–)OUT2DC (+)Width across flats 1710.2FLOW SENSORPOWERFLOW1843(34.2)INOUT1 IN132 x port sizeRc 1/8, 1/4NPT 1/8, 1/4G 1/82 x 3.418328PFM5-(N)01L/(N)02L/F01L8848OUT1DC (–)OUT2DC (+)10.2343(34.2)82 x 2.6 depth 5FLOW SENSOR18POWERFLOW1 IN13182 x port sizeRc 1/8, 1/4NPT 1/8, 1/4G 1/8Width across flats 17IN2 x 3.468OUT28882 x 2.6 depth 518

Series PFM5DimensionsPFM5-F0278OUT1DC (–)OUT2DC (+)Width across flats 2110.248FLOW SENSORPOWERFLOW43(34.2)INOUT1 IN132 x port sizeG 1/4182 x 3.41832882 x 2.6 depth 5PFM5-F02L8848FLOW SENSOR18POWERFLOWOUT1DC (–)OUT2DC (+)10.21 IN17 43(34.2)3182 x port sizeG 1/4Width across flats 21IN2 x 3.468OUT288192 x 2.6 depth 5

2-Color Display Digital Flow Switch Series PFM5DimensionsPFM5S-C4/C6/C8/N7A584876One-touch fittingApplicable tube O.D.(mm)A18FLOW SENSORPOWERFLOWø4 (5/32")ø6ø8 (5/16")ø1/492.292.69692.6OUT1DC (–)OUT2DC (+)10.243(34.2)INOUT51.5 (Max.58.5)1 IN1332 x one-touch fitting2 x 3.41828 2083 x 2.6 depth 5PFM5S-C4L/C6L/C8L/N8L885848One-touch fittingApplicable tube O.D.(mm)AOUT1DC (–)OUT2DC (+)1810.2FLOW SENSORPOWERFLOWø4 (5/32")ø6ø8 (5/16")ø1/410.110.31210.31 INA 43(34.2)31851.5 (Max.58.5)2 x one-touch fittingIN2 x 3.4OUT682882 x 2.6 depth 520

Series PFM5DimensionsPFM5S-(N)01/(N)02/F01987658OUT1DC (–)OUT2DC (+)Width across flats 1710.248FLOW SENSORPOWERFLOW1843(34.2)INOUT51.5 (Max. 58.5)1 IN132 x port sizeRc 1/8, 1/4NPT 1/8, 1/4G 1/832 x 3.41828 2083 x 2.6 depth 5PFM5S-(N)01L/(N)02L/F01L885848FLOW SENSOR18POWERFLOWOUT1DC (–)OUT2DC (+)10.21 IN13 43(34.2)31851.5 (Max. 58.5)Width across flats 17IN2 x 3.4OUT2 x port size68Rc 1/8, 1/4NPT 1/8, 1/4G 1/8288212 x 2.6 depth 5

2-Color Display Digital Flow Switch Series PFM5DimensionsPFM5S-F02106765848OUT1OUT2Width across flats 2110.2FLOW SENSORPOWERFLOW18DC (–)DC (+)43(34.2)INOUT51.5 (Max. 58.5)1 IN1332 x port sizeG 1/42 x 3.41828 2083 x 2.6 depth 5PFM5S-F02L885848FLOW SENSOR18POWERFLOWOUT1DC (–)OUT2DC (+)10.21 IN17 43(34.2)31851.5 (Max. 58.5)2 x port sizeG 1/4Width across flats 21IN2 x 3.468OUT2882 x 2.6 depth 522

Series PFM5DimensionsPanel mount / Without flow adjustment valve / Straight29.928A58FLOW SENSORPOWERFLOW(mm)One-touch fittingAApplicable tube O.D.ø4 (5/32") 64.2ø6 64.6ø8 (5/16") 68ø1/4 64.6Panel mount / With flow adjustment valve / Straight29.928FLOW SENSORPOWER78FLOW(mm)One-touch fittingAApplicable tube O.D.ø4 (5/32") 92.2ø6 92.6ø8 (5/16") 96ø1/4 92.6342.5 3INOUTPanel thickness 1 to 3.242.5 376APanel thickness1 to 3.251.5 (Max.58.5)Panel mount / Without flow adjustment valve8858Panel mount / With flow adjustment valve937829.92818FLOW SENSORPOWERFLOW29.92818FLOW SENSORPOWERFLOW42.53Panel thickness 1 to 3.242.5 3Panel thickness1 to 3.251.5 (Max.58.5)Panel Fitting DimensionsPanel Fitting Dimensions94 or more Note)94 or more Note)24 +0.5054 +0.5024 +0.5074 +0.5034 or more4 x R3 or less4 x R3 or less34 or more4 x R3 or less 4 x R3 or less4 x R3 or less4 x R3 or lessPanel thickness 1 to 3.2 mmNote) Piping entry direction: Minimum dimensions for bottom side piping. If usingstraight piping, the piping material and tubing need to be taken intoconsideration when designing the system. If a bend (R) is used, limit it to R3 orless.23Panel thickness 1 to 3.2 mmNote) Piping entry direction: Minimum dimensions for bottom side piping. If usingstraight piping, the piping material and tubing need to be taken intoconsideration when designing the system. If a bend (R) is used, limit it to R3 orless.

2-Color Display Digital Flow Switch Series PFM5DimensionsWith bracket / Without flow adjustment valveWith bracket / With flow adjustment valve4836287624 284 x 3.4FLOW SENSORFLOW SENSOR342618POWERFLOW342618POWERFLOW4 x 3.4361.21.218184843484351.5 (Max. 58.5)DIN rail mounting18 x n pcs. + 34.418Lead wire with connectorZS-33-DBrownWhiteBlackBlueTerminal semi-stripped48FLOW SENSORPOWER FLOWFLOW SENSORPOWER FLOWFLOW SENSORPOWER FLOW+21–6.52020 +50 030 ±35 ±220 0–5Cable Specifications of Lead Wirewith Connector52.4431 IN 1 IN 1 IN• DIN rail (supplied by customers)• Port size, F02: G1/4 cannot be mounted on the DIN rail.Rated temperatureRated voltageNumber of wiresNominal cross section areaMaterialConductorConstructionExternal diameterMaterialInsulation External diameterColorsMaterialSheathColorFinished external diameter∗ Connects to the PFM3 series.80ºC30 V4AWG26Soft copper wire28 / 0.08 mmApprox. 0.50 mmCross-linked vinyl chloride resin compoundApprox. 1.00 mmBrown, White, Black, BlueOil-resistant vinyl chloride resin compoundLight grayø3.5 +0.10–0.2524

Series PFM7/PFM5Common SpecificationsPressure Loss (Pressure: 350 [kPa])PFM710, 510 / For 10 (l/min)0.35PFM725, 525 / For 25 (l/min)1.0Pressure loss (kPa)0.300.250.200.150.100.05Pressure loss (kPa)0.80.60.40.201 2 4 6 8 10Flow rate (l/min)05 10 15 20 25Flow rate (l/min)PFM750, 550 / For 50 (l/min)4PFM711, 511 / For 100 (l/min)14Pressure loss (kPa)321Pressure loss (kPa)1210864205 10 20 30 40 50Flow rate (l/min)010 20 40 60 80 100Flow rate (l/min)Flow CharacteristicsPFM710, 510 / For 10 (l/min)15750 (kPa) 300 (kPa)PFM725, 525 / For 25 (l/min)30300 (kPa)Flow rate (l/min)105100 (kPa)Flow rate (l/min)2010750 (kPa)100 (kPa)05 10 15Number of needle rotations05 10 15Number of needle rotationsPFM750, 550 / For 50 (l/min)Flow rate (l/min)60300 (kPa)750 (kPa)40100 (kPa)20PFM711, 511 / For 100 (l/min)Flow rate (l/min)120100300 (kPa)80750 (kPa)604020100 (kPa)005 10 15Number of needle rotations05 10 15Number of needle rotations25

2-Color Display Digital Flow Switch Series PFM7/PFM5Parts DescriptionPFM7Output (OUT2)indicatorOutput (OUT1)indicatorButtonPiping portPFM5Power confirmationindicator (Green)LED displayConstructionSIN12ButtonFlow rate confirmationindicator (Green)ButtonBodyFlowadjustmentvalveKnurledlocknutThrough-holeDescriptionOutput (OUT1)indicator (Green)Output (OUT2)indicator (Red)LED displayButtonButtonButtonResetBodyFlow adjustment valvePiping portKnurled lock nutPower confirmationindicator (Green)Flow rate confirmationindicator (Green)ItemIlluminates when the output (OUT1) is turned on.Flashes when overcurrent error occurs.Illuminates when the output (OUT2) is turned on.Flashes when overcurrent error occurs.Indicates the flow rate, set mode state and error code. The display color canbe selected between red and green according to the output (OUT1) status.Selects the operation mode and increases the set value for ON and OFF.Used to transfer to peak indication mode.Selects the operation mode and decreases the set value for ON and OFF.Used to transfer to bottom indication mode.Used to make changes in each mode and to enter the set value.Reset function is activated by pressing and buttons simultaneously.Returns the indicated value to zero and clears errors.Main body of the flow switchOrifice mechanism to adjust the flow rateConnection port for pipingUsed to fix the needle.Illuminates when power is supplied.Flashing interval changes according to flow rate. Flashes faster when flowrate is increased. Color changes to red when exceeding the rated flow rate.qw qoire uy!0 otw!5 !2!4!3!6!1Component PartsNo. Description MaterialNote1 Fitting for pipingBrass Electroless nickel plated2 O-ringFKM Fluoro coated3 O-ringHNBR Fluoro coated4567891011121314151617Rectifying moduleBodySensor housingSensor chipOrificeSealMeshBottom piping adapterO-ringFlow adjustment valveassemblyBody BNeedleO-ringO-ringStainlesssteel 304PBTLCPSiliconBrassFKMStainlesssteel 304PBTHNBRPBTBrassBrassHNBRHNBRElectroless nickel platedFluoro coatedFluoro coatedElectroless nickel platedElectroless nickel platedFluoro coatedFluoro coatedDetection Principle!7This MEMS sensor chip consists of upstream temperature measuring sensor (Ru) anddownstream temperature measuring sensor (Rd), which are placed symmetrically from thecenter of a platinum thin film coated heater (Rh) mounted on a membrane, and an ambienttemperature sensor (Ra) for measuring gas temperature.The principle is as shown in the diagram on the right. (a) When the gas is static, the temperaturedistribution of heated gas centered around Rh is uniform, and Ru and Rd have the sameresistance. (b) When the gas flows from the left side, it upsets the balance of the temperaturedistribution of heated gas, and the resistance of Rd becomes greater than that of Ru.The difference in resistance between Ru and Rd is proportional to the gas velocity, so measurementand analysis of the resistance can show the flow direction and velocity of the gas.Ra is used to compensate the gas and/or ambient temperature.Ru Rh RdRa(a) The gas is static.FlowRu Rh RdRa(b) The gas flows from the left side.26

Series PFM7/PFM5Component PartsNo.DescriptionModelStraight piping1234BodyLead wire with connector (2 m)IN side Bottom piping adapter (with pin)OUT side Bottom piping adapter (with pin)ZS-33-DZS-33-P1LZS-33-P2Lwqui56For straight pipingFlow adjustment valveassembly(with pin)For bottom pipingFlow adjustment valveassembly(with pin)For 10 l/minFor 25 l/minFor 50 l/minFor 100 l/minFor 10 l/minFor 25 l/minFor 50 l/minFor 100 l/minZS-33-10NZS-33-25NZS-33-50NZS-33-11NZS-33-10NLZS-33-25NLZS-33-50NLZS-33-11NLuirBottom pipingø4 (5/32")ZS-33-C47One-touch fittingø6ø8 (5/16")ø1/4Rc 1/8ZS-33-C6ZS-33-C8ZS-33-N7ZS-33-01eiutu8Female threadNPT 1/8G 1/8Rc 1/4NPT 1/4ZS-33-N01ZS-33-F01ZS-33-02ZS-33-N02uiG 1/4ZS-33-F02iStraight piping withflow adjustment valveyBottom piping withflow adjustment valveiu27

Series PFMFunction Details Output operationThe output operation can be selected from the following:Output (hysteresis mode and window comparator mode)corresponding to real-time flow rate,Output corresponding to accumulated flow,Accumulated output pulse outputAt the time of shipment from the factory, it is set to hysteresis mode and normal output. Indication colorThe indication color can be selected for Green for ON, Red for OFFeach output condition. The selection ofRed for ON, Green for OFFthe indication color provides visualidentification of abnormal values. (The Red all the timeindication color depends on OUT1 Green all the timesetting.) Selection of operating fluidThe fluid can be selected. If argon (Ar) or Dry air, N2carbon dioxide (CO2) is used, the settingArgonneeds to be changed.Note) When CO2 is selected, the upper limit of themeasured flow rate range will be 1/2 of that for otherfluids. Setting of response timeThe flow rate may change momentarily duringtransition between ON (open) and OFF (closed) ofthe valve. It can be set so that this momentarychange is not detected.When the switch has been in ON area for a set period of time, theoutput will turn on (or off).CO2 Selection of indication unit referenceThe indication unit reference can be selected between standardconditions and normal conditions.Standard conditions: Flow rate converted to a volume at 20ºC and 1atm (atmosphere)Normal conditions: Flow rate converted to a volume at 0ºC and 1atm (atmosphere)0.05 sec.0.5 sec.1 sec.2 sec. Indication modeThe indication mode can be Real-time flow rate displayselected between real-time flowAccumulated flow displayrate and accumulated flow. External input functionThe external input function can be selected from accumulatedvalue external reset, auto-shift and auto-shift zero.(Input signal: Connect input line to GND for 30 ms or more.)External reset: This function resets the accumulated value to “0”Auto-shift:when an input signal is applied.This function generates an output correspondingto the change in relation to real-time flow ratewhen an input signal is applied.Auto-shift zero: This function displays real-time flow rate as “0”when a positive input signal is applied in theauto shift function described above.Set values and flow rates that are relatively on the negative sideare expressed by illumination of the decimal point on the far left. Indication resolutionThe indication resolution of the PFM710 and 711 series can bechanged to enable values to be indicated in smaller steps.100 resolution1000 resolutionPFM710PFM711PFM710PFM711by 0.1 l/minby 1 l/minby 0.01 l/minby 0.1 l/min Accumulated value holdAccumulated value is not cleared even when the power supply isturned off.The accumulated value is memorized every 2 or 5 min. duringmeasurement, and continues from the last memorized valuewhen the power supply is turned on again.The life time of the memory element is 1 million access cycles.Take this into consideration before using this function. Selection of analog output filterThis selection is available when using a product with an analogoutput.A signal with fast response speed can be generated by turningoff the analog output filter. Selection of power-saving modeThe power-saving mode can be selected.With this function, if no buttons are pressed for 30 sec., it shifts topower-saving mode.At the time of shipment from the factory, the product is set to thenormal mode (the power-saving mode is turned off).(When power-saving mode is activated, the decimal point flashes.) Setting of secret codeThe user can select whether a secret code must be entered torelease key lock.At the time of shipment from the factory, it is set such that thesecret code is not required. Peak/Bottom value indicationThe maximum (minimum) flow rate is detected and updated fromwhen the power supply is turned on. In peak (bottom) valueindication mode, this maximum (minimum) flow rate is displayed. Keylock functionPrevents operation errors such as accidentally changing settingvalues. Zero clear functionAllows the user to adjust the measured flow rate indication to zero.The adjustment range is ±7%F.S. of the initial factory setting. Error indication functionWhen an error or abnormality arises, the location and contentsare displayed.Description Contents ActionFlow rateerrorOvercurrenterrorSystemerrorZero clearerrorFlow rateerrorThe flow rate exceeds theupper limit of indicated flowrate range.There is a reverse flowequivalent to –5% or more.Load current of 80 mA ormore is applied to the switchoutput (OUT1).Load current of 80 mA ormore is applied to the switchoutput (OUT2).Possibility of internal circuitdamage before factoryadjustment.System error. Possibility ofdata memorizing failure orinternal circuit damage.If zero clear is performed (byholding down andbuttons simultaneously for 1sec.) while there is some flow,“Er4” will be displayed for 1sec.The flow rate exceeds theaccumulated flow rate range.Decrease the flow rate.Turn the flow to correctdirection.Eliminate the cause ofthe overcurrent byturning off the powersupply and then turn onit again.Stop operationimmediately and contactSMC.Reset the unit, and carryout all settings again.Perform zero clear ofaccumulated flow ratewhen there is no flow.Clear the accumulatedflow rate. (This errordoes not matter whenthe accumulated flowrate is not being used.)If the error or abnormality cannot be solved by the action above, please contact SMCfor further investigation.34

Series PFM7/PFM5Made to Order 1Please contact SMC for detailed specifications, lead times and prices.Changing the piping entry direction combination for IN and OUT sideSymbolX693, X694PFM 7Type57Remote sensor unitIntegrated displayPiping entry directionNote) No symbol is entered.Dimensions7PFM 5-C4/C6/C8/N7--X69310.2X693Changing the piping entry direction combinationX693X694IN side: Straight / OUT side: BottomIN side: Bottom / OUT side: Straight7PFM -C4/C6/C8/N7--X694510.2For details of How to Order,refer to page 1 and 13.431(34.2)13IN3AA 43 1(34.2)3OUT132 x 3.418B 48 20OUTIN201848B2 x 3.4One-touch fittingApplicable tube O.D.C4 ø4 (5/32")C6 ø6C8 ø8 (5/16")N7 ø1/4A10.110.31210.3B8.18.3108.37PFM -01/02--X69357PFM -01/02--X694510.210.243 1(34.2)IN133AA 431(34.2)3OUT13CB184820OUTIN201848BC2 x 3.42 x 3.4Port sizeABC(Width across flats)Rc 1/8, 1/4NPT 1/8, 1/4G 1/8131117G 1/417152135

Series PFM7/PFM5Made to Order 2Please contact SMC for detailed specifications, lead times and prices.Dimensions7PFM S-C4/C6/C8/N7--X69357PFM S-C4/C6/C8/N7--X694510.210.243 1(34.2)IN133A 51.5 (Max. 58.5)A43 1(34.2)3OUT1351.5 (Max. 58.5)2 x 3.4B184820OUTIN201848B2 x 3.4One-touch fittingApplicable tube O.D.ABOne-touch fittingApplicable tube O.D.ABø4 (5/32")ø6ø8 (5/16")ø1/410.110.31210.38.18.3108.3ø4 (5/32")ø6ø8 (5/16")ø1/410.110.31210.336.136.33736.37PFM S-01/02--X69357PFM S-01/02--X694510.210.243 1(34.2)13IN3CB2 x 3.4184820A 51.5 (Max. 58.5)OUTA43 1(34.2)3IN202 x 3.41848BOUT13C51.5 (Max. 58.5)Port sizeABC(Width across flats)Port sizeABC(Width across flats)Rc 1/8, 1/4NPT 1/8, 1/4G 1/8G 1/4131711151721Rc 1/8, 1/4NPT 1/8, 1/4G 1/8G 1/413173943172136

Series PFM7/PFM5Made to Order 3Please contact SMC for detailed specifications, lead times and prices.Compatibility with argon (Ar) and carbon dioxide (CO2) mixed gasSymbolX731The argon–carbon dioxide gas ratio (Ar: CO2) can be selected using the push-buttons from among the following: 92 : 8, 90 : 10, 80 : 20, 70 : 30,and 60 : 40. Dimensions are same as those of standard models.PFM 7X7317Integrated displayFor details of How to Order,refer to page 1 and 13.ModelPFM710PFM725PFM750PFM711Gas ratioAr CO292% 8%90% 10%80% 20%70% 30%60% 40%92% 8%90% 10%80% 20%70% 30%60% 40%92% 8%90% 10%80% 20%70% 30%60% 40%92% 8%90% 10%80% 20%70% 30%60% 40%Rated flow range0.2 to 7.0 l/min0.5 to 25.0 l/min0.5 to 20.0 l/min1.0 to 50.0 l/min1.0 to 40.0 l/min2 to 100 l/min2 to 90 l/min2 to 80 l/minDisplayable range0.2 to 7.4 l/min0.5 to 26.3 l/min0.5 to 21.0 l/min1.0 to 52.5 l/min1.0 to 42.0 l/min2 to 105 l/min2 to 95 l/min2 to 84 l/minSettable range0 to 7.4 l/min0 to 26.3 l/min0 to 21.0 l/min0 to 52.5 l/min0 to 42.0 l/min0 to 105 l/min0 to 95 l/min0 to 84 l/minMax. analog outputVoltage (Vmax) Current (Imax)3.80 V15.2 mA5.00 V20.0 mA4.20 V16.8 mA5.00 V20.0 mA4.20 V16.8 mA5.00 V20.0 mA4.60 V18.4 mA4.20 V16.8 mAOutput characteristics using mixed gasAnalog voltage output (1 to 5 V)Analog current output (4 to 20 mA)Analog output [V]5Vmax1Analog output [mA]20Imax40 00 0When dry air selectedMax. rated flow valueWhen mixed gas selectedMax. rated flow valueWhen dry air selectedMax. rated flow valueWhen mixed gas selectedMax. rated flow value37