(B-axis) fly-cut adapter main spindle (C-axis)
(B-axis) fly-cut adapter main spindle (C-axis) (B-axis) fly-cut adapter main spindle (C-axis)
LFM Universität Bremen Prof. Brinksmeier controlled axes: X, Z, B bearing: main spindle: aerostatic x,z: double V-grooves with cylinder rollers drives: DC-motors with ball bearings positioning systems: interferometer and / or decoder vibration isolation: granite base + passive air-cushions control: Fanuc-3-axes control resolution: 10 nm working volume: range ∆ x = 405 mm, ∆ z = 230 mm max. turning diameter: 780 mm accuracy: contour accuracy: < 0,5 µm Moore M18 Aspheric Generator LA 0569e
Nanotech Nanotech 500 500 FG FG linear linear axes: axes: 3 3 (hydrostatic) (hydrostatic) rotary rotary axes: axes: 2 2 (air (airbearing) bearing) grinding grinding spindle: spindle: 1 1 (hydrostatic) (hydrostatic) machining machining volume: volume: 300 300 x x 200 200 x x 300 300 mm³ mm³ load load capacity: capacity: 90 90 kg kg accuracy accuracyof of linear linear motion: motion: < 0.3 0.3 µm µm Ref.: Nanotechnology LFM Universität Bremen Prof. Brinksmeier Radial, Radial, axial axial run-out: run-out: B-, B-, C-axis:< C-axis:< 50 50 nm nm A-axis: A-axis: < 100 100 nm nm angular angular resolution: resolution: B-, B-, C-axis:0.65“ C-axis:0.65“ resolution resolutionof of CNC: CNC: 10 10 nm nm diamond turning precision grinding Nanotech 500 Freeform Generator OR 1026
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- Page 3 and 4: Diamond machining Precision grindin
- Page 5: form deviation [mm] 1 0,1 0,01 0,00
- Page 9 and 10: straight straight knife: knife: b >
- Page 11 and 12: cutting edge clearance face 1 µm 1
- Page 13 and 14: electroless nickel OFHC copper LFM
- Page 15 and 16: 1 Mikrozerspanung 2 Rotationssymmet
- Page 17 and 18: LFM Universität Bremen Prof. Brink
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- Page 29 and 30: Quelle: MEOS LFM Universität Breme
- Page 31 and 32: Aspherical Mirror Quelle: Siemens V
- Page 33 and 34: 1 Mikrozerspanung 2 Rotationssymmet
- Page 35 and 36: LFM Universität Bremen Prof. Brink
- Page 37 and 38: Hybrid lens with total internal ref
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- Page 41 and 42: front view n n a p LFM Universität
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LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
controlled axes:<br />
X, Z, B<br />
bearing:<br />
<strong>main</strong> <strong>spindle</strong>: aerostatic<br />
x,z: double V-grooves with cylinder rollers<br />
drives:<br />
DC-motors with ball bearings<br />
positioning systems:<br />
interferometer and / or decoder<br />
vibration isolation:<br />
granite base + passive air-cushions<br />
control:<br />
Fanuc-3-axes control<br />
resolution: 10 nm<br />
working volume:<br />
range ∆ x = 405 mm, ∆ z = 230 mm<br />
max. turning diameter: 780 mm<br />
accuracy:<br />
contour accuracy: < 0,5 µm<br />
Moore M18 Aspheric Generator<br />
LA 0569e
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