(B-axis) fly-cut adapter main spindle (C-axis)
(B-axis) fly-cut adapter main spindle (C-axis)
(B-axis) fly-cut adapter main spindle (C-axis)
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LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
Möglichkeiten und Grenzen<br />
der Ultrapräzisionsbearbeitung<br />
im optischen Formenbau<br />
Werner Preuß<br />
LFM Labor für Mikrozerspanung<br />
Universität Bremen
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
University of Bremen and Technology Park<br />
Schie 0018a-e
Diamond machining Precision grinding<br />
• Development of diamond<br />
<strong>cut</strong>ting processes<br />
• Multi-<strong>axis</strong> machining<br />
• Generation of microstructures<br />
Modeling and simulation<br />
• Computer simulation of <strong>cut</strong>ting<br />
processes<br />
• Molecular dynamics simulation<br />
• Finite element analysis<br />
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
• Deterministic micro grinding<br />
• Ductile grinding of glass<br />
• Precision grinding of steel and<br />
ceramics<br />
Measuring and testing<br />
• Figure evaluation<br />
• Investigation of surface topography<br />
• Assessment of subsurface damage<br />
Polishing<br />
• Development of CNC-polishing<br />
techniques<br />
• Polishing of aspheric and<br />
freeform surfaces<br />
• Polishing of micro-structured<br />
surfaces<br />
Science and Technology at the<br />
Laboratory for Precision Machining
1 Mikrozerspanung<br />
2 Rotationssymmetrische Flächen<br />
3 Freiformflächen<br />
4 Strukturierte Oberflächen<br />
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier
form deviation<br />
[mm]<br />
1<br />
0,1<br />
0,01<br />
0,001<br />
UP<br />
LFM<br />
Universität Bremen<br />
Prof. Prof. Brinksmeier<br />
P<br />
F<br />
R<br />
fine machining<br />
precision machining<br />
ultraprecision machining<br />
0,01 0,1 1 10<br />
rough machining<br />
average surface<br />
roughness [µm]<br />
OR 677e<br />
(Br 1401e)<br />
Classification of mechanical machining processes
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
controlled axes:<br />
X, Z, B<br />
bearing:<br />
<strong>main</strong> <strong>spindle</strong>: aerostatic<br />
x,z: double V-grooves with cylinder rollers<br />
drives:<br />
DC-motors with ball bearings<br />
positioning systems:<br />
interferometer and / or decoder<br />
vibration isolation:<br />
granite base + passive air-cushions<br />
control:<br />
Fanuc-3-axes control<br />
resolution: 10 nm<br />
working volume:<br />
range ∆ x = 405 mm, ∆ z = 230 mm<br />
max. turning diameter: 780 mm<br />
accuracy:<br />
contour accuracy: < 0,5 µm<br />
Moore M18 Aspheric Generator<br />
LA 0569e
Nanotech Nanotech 500 500 FG FG<br />
linear linear axes: axes: 3 3 (hydrostatic) (hydrostatic)<br />
rotary rotary axes: axes: 2 2 (air (airbearing) bearing)<br />
grinding grinding <strong>spindle</strong>: <strong>spindle</strong>: 1 1 (hydrostatic) (hydrostatic)<br />
machining machining volume: volume: 300 300 x x 200 200 x x 300 300 mm³ mm³<br />
load load capacity: capacity: 90 90 kg kg<br />
accuracy accuracyof of linear linear motion: motion: < 0.3 0.3 µm µm<br />
Ref.: Nanotechnology<br />
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
Radial, Radial, axial axial run-out: run-out:<br />
B-, B-, C-<strong>axis</strong>:< C-<strong>axis</strong>:< 50 50 nm nm<br />
A-<strong>axis</strong>: A-<strong>axis</strong>: < 100 100 nm nm<br />
angular angular resolution: resolution:<br />
B-, B-, C-<strong>axis</strong>:0.65“ C-<strong>axis</strong>:0.65“<br />
resolution resolutionof of CNC: CNC: 10 10 nm nm<br />
diamond turning precision grinding<br />
Nanotech 500 Freeform Generator<br />
OR 1026
complete machine tool<br />
(covers removed)<br />
Ref.: Precitech<br />
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
4 axes axes • • 3 linear linear<br />
• • 1 rotary rotary<br />
processes: processes: • • <strong>fly</strong>-<strong>cut</strong>ting <strong>fly</strong>-<strong>cut</strong>ting<br />
• • raster raster milling milling<br />
• • ball-end ball-end milling milling<br />
Precitech Freeform 3000<br />
ball-end milling<br />
OR 1025
straight straight knife: knife:<br />
b > 3 mm; mm; ε ε = 135°; 135°;<br />
α = 6 °; °; γ γ = 0° 0°<br />
radius radius tool: tool:<br />
rε r =<br />
ε = 6000 6000 µm; µm;<br />
α = 6 °; °; γ γ = 0° 0°<br />
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
5 mm<br />
radius radius tool: tool:<br />
rε r =<br />
ε = 50 50 µm; µm;<br />
α = 6 °; °; γ γ = 0° 0°<br />
radius radius tool: tool:<br />
rε r =<br />
ε = 760 760 µm; µm;<br />
α = 6 °; °; γ γ = 0° 0°<br />
Monocrystalline diamond tools<br />
- straight knife and radius tools -<br />
OR 190e
Pointed tool: monocrystalline diamond tool<br />
nose angle ε = 70°30’<br />
rake angle γ = 0°<br />
clearance angle α = 7°<br />
<strong>cut</strong>ting edge radius r ß < 50 nm<br />
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
50 µm<br />
Pointed tool for machining of V-shaped grooves<br />
La 0660e
<strong>cut</strong>ting edge<br />
clearance face<br />
1 µm<br />
1 µm<br />
r β<br />
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
rake face<br />
diamond tool:<br />
tool nose radius: r ε = ε = 760 µm<br />
<strong>cut</strong>ting edge radius: r β < β < 0.1 µm<br />
rake angle: γ = 0°<br />
clearance angel: α = 6°<br />
-1.0<br />
µm<br />
0.0<br />
section<br />
Cutting edge of a diamond tool<br />
determining the<br />
<strong>cut</strong>ting edge radius<br />
envelope<br />
circle:<br />
d = 0.2 µm<br />
-1.0<br />
0 1,0 2,0 3,0 mm 4,0<br />
OR 194e
Chip area true to scale<br />
r ε = 760 µm<br />
f = 5 µm<br />
a p = 5 µm<br />
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
diamond tool<br />
r ε<br />
Chip area in diamond turning<br />
f<br />
a p<br />
OR 047e
electroless nickel OFHC copper<br />
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
process: plunge <strong>cut</strong><br />
<strong>cut</strong>ting speed: tool nose radius: v c = c = 100 mm/min<br />
r ε = ε = 5 µm<br />
Material response<br />
OR 139e
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
<strong>cut</strong>ting direction<br />
process<br />
face turning<br />
<strong>spindle</strong> speed: n = 500 min<br />
feed: f = 4,8 µm<br />
lubricant: mineral oil (spray mist)<br />
tool<br />
monocrystalline diamond<br />
tool nose radius: r ε = 0,76 mm<br />
<strong>cut</strong>ting edge radius: r β < 0,05 µm<br />
clearance angle: α = 6°<br />
rake angle: γ = 0°<br />
workpiece<br />
material:electroless deposited nickel<br />
(amorphous NiP with<br />
approx. 11% Phosphorous)<br />
roughness<br />
R a = 3,4 nm<br />
R q = 4,1 nm<br />
R = 27,4 nm<br />
max<br />
Diamond turned electroless nickel<br />
-1<br />
OR 0916
1 Mikrozerspanung<br />
2 Rotationssymmetrische Flächen<br />
3 Freiformflächen<br />
4 Strukturierte Oberflächen<br />
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier
1 Mikrozerspanung<br />
2 Rotationssymmetrische Flächen<br />
3 Freiformflächen<br />
4 Strukturierte Oberflächen<br />
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
Kinematics of SPDT with fast tool servo<br />
Gri 0405
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
Kinematics of raster <strong>fly</strong>-<strong>cut</strong>ting<br />
Gri 0421a
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
Spiral milling
SPFC surfaces are<br />
composed of tiny “scallops”:<br />
W f<br />
W c<br />
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
feed direction<br />
rc : radius of <strong>fly</strong>-<strong>cut</strong>ter<br />
rd : radius of diamond<br />
depth in <strong>cut</strong>ting direction: w 2<br />
c / (8rc )<br />
depth in feed direction: w 2<br />
f / (8rd )<br />
Topography of SPFC-surfaces<br />
<strong>cut</strong>ting direction<br />
OR 885<br />
(JS 0318e)
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
Chip geometry and surface topography for<br />
Single-point Fly-<strong>cut</strong>ting (SPFC)<br />
OR 884<br />
(JS 0279)
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
area:<br />
1.23mm x 0.98mm<br />
Ra = 7.56nm<br />
Rq = 11.97nm<br />
spacing of raster lines:<br />
50µm<br />
tool nose radius:<br />
10mm<br />
down milling mode<br />
Gri 0423<br />
White-light interferometric image of raster <strong>fly</strong>-<strong>cut</strong><br />
bi-conic mirror for IRMOS
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
Down-milling versus up-milling<br />
LA 1002
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
NC-programming for raster <strong>fly</strong>-<strong>cut</strong>ting<br />
OR 883
Quelle: MEOS<br />
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
F-Theta lens system<br />
OR 873
Quelle: Corning<br />
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
F-Theta lenses and molding insert<br />
OR 876
Aspherical Mirror<br />
Quelle: Siemens VDO Automotive<br />
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
Windshield<br />
Driver<br />
Head-up Display<br />
TFT (Thin-Film-Transistor)<br />
Display<br />
Lightsource with Dimmer<br />
OR 347
X<br />
y<br />
workpiece:<br />
• Ø 50 mm, AlMg3<br />
• roughness calculated<br />
Rt,kin = 10 nm (fc )<br />
Rt,kin = 5.6 nm (fr )<br />
• roughness measured<br />
(WLI, 1300µm x 980 µm)<br />
Ra = 4.8 nm<br />
• inclination in xy-plane: ϕ = 10°<br />
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
z<br />
diamond tool:<br />
•r ε = 5 mm (half arc)<br />
process (spiral ball-end-milling):<br />
•ap = 20 µm<br />
•fc = 20 µm<br />
fr = 15 µm<br />
• n = 5000 rpm<br />
x<br />
Y �<br />
Spiral ball-end-milling<br />
of a free-form reflector<br />
z<br />
f r<br />
f c<br />
OR 1010
1 Mikrozerspanung<br />
2 Rotationssymmetrische Flächen<br />
3 Freiformflächen<br />
4 Strukturierte Oberflächen<br />
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
Types and generation of Fresnel lenses
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
Injection mold for bifocal intraocular lenses
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
PMMA-Linse<br />
1µm-Stufe
Hybrid lens with total internal reflection (TIR)<br />
– 4 cm x 4 cm<br />
– 625 elements per square meter<br />
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
hybrid lens<br />
heat sink solar cell<br />
aspherical lens<br />
Realization of novel optical design concepts-<br />
Solar cell concentrator (hybrid PMMA lens)
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
Mould for primary TIR-R lenses (left) and<br />
mould for dioptric secondary lenses (right)
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
Photo of the individual parts of the mould<br />
for primary TIR-R lenses
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
Prototype of the photovoltic system<br />
Ges 299
front view<br />
n<br />
n<br />
a p<br />
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
top view<br />
<strong>spindle</strong><br />
workpiece<br />
counter-weight<br />
tool<br />
rotary-table<br />
x-slide<br />
z-slide<br />
100µm<br />
15.3 µm<br />
0.0 µm<br />
0.0 mm<br />
Fly-<strong>cut</strong>ting of microprisms<br />
0.5 mm<br />
0.0 mm<br />
0.5 mm<br />
OR 0674e
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
Conventional and new open ring light system
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
Mold design for the new open ring light system
Nanotech 500 Freeform Generator<br />
z-slide<br />
y-slide<br />
<strong>main</strong> <strong>spindle</strong><br />
(C-<strong>axis</strong>)<br />
<strong>fly</strong>-<strong>cut</strong><br />
<strong>adapter</strong><br />
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
siedeview<br />
diamond<br />
tool<br />
mold<br />
rotary table<br />
(B-<strong>axis</strong>)<br />
x-slide<br />
Raster-milling of spherical cavities<br />
on a 60° conical mold
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
Aluminium test mold with 3 microstructured 10° areas
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
60° microstructured conical mold<br />
And injection molded replica
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
Advertisement for 2003 movie
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
Geometrische Formen<br />
möglich nicht möglich<br />
Asphären Hinterschneidungen<br />
diffraktive Strukturen Strukturen < ca. 10µm<br />
Freiformflächen Aspektverhältnisse > ca. 2:1<br />
Polygone Übergangsradien < ca. 10µm<br />
prismatischen Flächen lokale Krümmungsradien<br />
facettierte Flächen < ca. 10mm (Zeilenfräsen)<br />
u.v.a.m. < ca. 10µm (Kugelkopffräsen)
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
Oberflächenqualität<br />
möglich nicht möglich<br />
Formtreue: lokale Tangentenfehler:<br />
ca. 0.1µm PV - 2µm PV < ca. 1‘ (z.B. 30nm auf 0.1mm)<br />
Rauheit:<br />
ca. 5nm Ra - 10nm Ra
LFM<br />
Universität Bremen<br />
Prof. Brinksmeier<br />
Werkstoffspektrum<br />
möglich nicht möglich<br />
NiP (chemisch Nickel) Nickel<br />
Neusilber (CuNiZn) Stahl<br />
Messing<br />
Aluminium<br />
Umweg über galvanische Abformung