Understanding Smart Sensors - Nomads.usp

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ContentsPrefacexix1 Smart Sensor Basics 11.1 Introduction 11.2 Mechanical-Electronic Transitions in Sensing 41.3 Nature of Sensors 51.4 Integration of Micromachining andMicroelectronics 111.5 Summary 15References 16Select Bibliography 162 Micromachining 172.1 Introduction 172.2 Bulk Micromachining 192.3 Wafer Bonding 212.3.1 Silicon-on-Silicon Bonding 222.3.2 Silicon-on-Glass (Anodic) Bonding 232.3.3 Silicon Fusion Bonding 24vii
viiiUnderstanding Smart Sensors2.3.4 Wafer Bonding for More Complex Structures andAdding ICs 252.4 Surface Micromachining 252.4.1 Squeeze-Film Damping 292.4.2 Stiction 292.4.3 Particulate Control 302.4.4 Combinations of Surface andBulk Micromachining 302.5 Other Micromachining Techniques 312.5.1 LIGA Process 322.5.2 Dry-Etching Processes 322.5.3 Micromilling 362.5.4 Lasers in Micromachining 362.5.5 Chemical Etching and IC Technology 372.6 Other Micromachined Materials 402.6.1 Diamond as an Alternative Sensor Material 412.6.2 Metal Oxides and Piezoelectric Sensing 412.6.3 Films on Microstructures 422.6.4 Micromachining Metal Structures 432.7 Summary 44References 443 The Nature of Semiconductor Sensor Output 493.1 Introduction 493.2 Sensor Output Characteristics 493.2.1 Wheatstone Bridge 503.2.2 Piezoresistivity in Silicon 523.2.3 Semiconductor Sensor Definitions 543.2.4 Static Versus Dynamic Operation 573.3 Other Sensing Technologies 573.3.1 Capacitive Sensing 583.3.2 Piezoelectric Sensing 59
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38 Understanding Smart SensorsTable
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42 Understanding Smart SensorsAlumi
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44 Understanding Smart SensorsThe f
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46 Understanding Smart Sensors[21]
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The Nature of Semiconductor Sensor
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4Getting Sensor Information Into th
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5Using MCUs/DSPs to Increase Sensor
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Using MCUs/DSPs to Increase Sensor
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6Communications for Smart SensorsBe
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7Control TechniquesA machine is int
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Control Techniques 151Table 7.1Type
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Control Techniques 153otherwise tak
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Control Techniques 155consisting of
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Control Techniques 157Supplied byap
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Control Techniques 159InputX1Synaps
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Control Techniques 1617.6 Adaptive
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Control Techniques 163ObserverHB−
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Control Techniques 165linear-vector
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Control Techniques 1677.7.2 Combine
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Control Techniques 169Domain-type s
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Control Techniques 171[19] De Silva
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8Transceivers, Transponders, andTel
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Transceivers, Transponders, and Tel
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9MEMS Beyond Sensors“And these ot
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MEMS Beyond Sensors 203would not ex
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MEMS Beyond Sensors 205PyrexSilicon
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MEMS Beyond Sensors 207(a)IFluxIIMa
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MEMS Beyond Sensors 209InletThermop
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MEMS Beyond Sensors 211Figure 9.8 A
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MEMS Beyond Sensors 2139.3.2 Microo
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MEMS Beyond Sensors 215Over-range p
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MEMS Beyond Sensors 217+ 10°− 10
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MEMS Beyond Sensors 219achieved wit
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MEMS Beyond Sensors 221Methods for
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MEMS Beyond Sensors 223Figure 9.19
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MEMS Beyond Sensors 225[21] Tortone
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10Packaging, Testing, and Reliabili
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Packaging, Testing, and Reliability
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11Mechatronics and Sensing SystemsP
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12Standards for Smart SensingThe la
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Standards for Smart Sensing 275Netw
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Standards for Smart Sensing 277NCAP
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Standards for Smart Sensing 279Proc
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Standards for Smart Sensing 281PID
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Standards for Smart Sensing 283•
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Standards for Smart Sensing 285•
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Standards for Smart Sensing 287Tabl
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Standards for Smart Sensing 289perf
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Standards for Smart Sensing 2911 0
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Standards for Smart Sensing 293obje
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Standards for Smart Sensing 295Mult
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13The Implications of Smart SensorS
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The Implications of Smart Sensor St
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14The Next Phase of Sensing Systems
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The Next Phase of Sensing Systems 3
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List of Acronyms and Abbreviations3
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List of Acronyms and Abbreviations
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Glossaryablationvaporization of mat
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Glossary 353buscalibrationconnectio
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Glossary 355end point straight line
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Glossary 357data transmission and p
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Glossary 359multiplexer device that
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Glossary 361repeatability the maxim
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Glossary 363spread spectrum techniq
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Glossary 365transducer a device con
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Selected BibliographyBooks and Jour
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Selected Bibliography 369Northeaste
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Selected Bibliography 371Miscellane
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About the AuthorRandy Frank is a te
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Index4-to 20-mA signal transmitter,
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Index 377definitions, 119-20introdu
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Index 379HVAC, 318-19MCU with integ
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Index 381Linearization, 108Linear p
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Index 383in chemical measurements,
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Index 385Ratiometricity, 56Reactive
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Index 387IC fabrication, 19micromec
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Index 389Transducer-independent int
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