Understanding Smart Sensors - Nomads.usp

More documents

Recommendations

Info

46 Understanding Smart Sensors[21] Choi, B., et al., “Development of Pressure Transducers Utilizing Deep X-Ray Lithography,”IEEE 91CH2817-5 From Transducers ’91, pp. 393–396.[22] Flamm, D. L., “Feed Gas Purity and Environmental Concerns in Plasma Etching,” SolidState Technology, Oct. 1993, pp. 49–54.[23] Zhang, Z. L., and N. C. McDonald, “A RIE Process for Submicron, Silicon ElectromechanicalStructures,” J. Micromechanics and Microengineering, Mar. 1992, pp. 31–38.[24] Friedrich, C. R., and M. J. Vasile, “Development of the Micromilling Process forHigh-Aspect-Ratio Microstructures,” J. Microelectromechanical Systems, Vol. 5, No. 1,Mar. 1996, pp. 33–38.[25] Swenson, E. J., “Laser Micromachining for Circuit Production,” Microelectronic Manufacturingand Testing, Mar. 1990, pp. 17–18.[26] Cumberledge, W., and J. M. Staller, “An Integrated On-Chip Pressure Sensor for AccurateControl Applications,” IEEE Solid-State Sensors and Actuators Workshop, Hilton Head,SC, 1986.[27] Alavi, M., et al., “Laser Machining for Fabrication of New Microstructures,” IEEE91CH2817-5 From Transducers ’91, pp. 512–515.[28] Romig, A. D., Jr., and J. H. Smith, “The Coming Revolution in ICs: Intelligent, IntegratedMicrosystems,” Micromachine Devices, Vol. 3, No. 2, Feb. 1998, pp. 4–6.[29] Baskett, I., R. Frank, and E. Ramsland, “The Design of a Monolithic Signal ConditionedPressure Sensor,” IEEE 91CH2994-2 Custom Integrated Circuits Conference ’91,pp. 273.1–273.4.[30] Marshall, J. C., et al., “High-Level CAD Melds Micromachined Devices With Foundries,”IEEE Circuits and Devices, Nov. 1992, pp. 10–17.[31] Riethmueller, W., et al., “Development of Commercial CMOS Process-Based Technologiesfor the Fabrication of Smart Accelerometers,” IEEE 91CH2817-5 From Transducers’91, pp. 416–419.[32] Yun, W., R. T. Howe, and P. R. Gray, “Surface Micromachined, Digitally Force-BalancedAccelerometer With Integrated CMOS Detection Circuitry,” IEEE Sensors and ActuatorsWorkshop, Hilton Head, SC, June 22–25, 1992, pp. 126–131.[33] Markus, K. W., V. Dhuler, and A. Cowen, “Smart MEMS: Flip Chip Integration ofMEMS and Electronics,” Proc. Sensors Expo, Cleveland, Sept. 20–22, 1994, pp. 559–564.[34] Ellis, C. D., et al., “Polycrystalline Diamond Film Flow Sensor,” IEEE Solid-State Sensorsand Actuators Workshop, Hilton Head, SC, June 4–7, 1990, pp. 132–134.[35] Schiller, P., D. L. Polla, and M. Ghezzo, “Surface-Micromachined Piezoelectric PressureSensors,” IEEE 90CH2783-9 From Sensors and Actuators Workshop, Hilton Head, SC,June 4–7, 1990, pp. 188–190.[36] Choi, J. R., and P. Choi, “Micromachined ZnO Piezoelectric Pressure Sensors and PyroelectricInfrared Detector in GaAs,” J. Electrical Engineering and Information Science, Vol. 3,No. 2, Apr. 1998, pp. 239–244.
Micromachining 47[37] Krebs, P., and A. Grisel, “A Low Power Integrated Catalytic Gas Sensor,” Sensors andActuators B, 13–14, 1993, pp. 155–158.[38] Cohen, A. L., “3-D Micromachining by Electrochemical Fabrication,” MicromachineDevices, Vol. 4, No. 3, Mar. 1999, pp. 6–9.
Page 2 and 3:
Understanding Smart SensorsSecond E
Page 5:
Library of Congress Cataloging-in-P
Page 8 and 9:
ContentsPrefacexix1 Smart Sensor Ba
Page 10 and 11:
Contentsix3.3.3 Hall Effect 603.3.4
Page 12 and 13:
Contentsxi5.8 Summary 116References
Page 14 and 15:
Contentsxiii8.3.1 Surface Acoustica
Page 16 and 17:
Contentsxv11.1.1 Integration and Me
Page 18 and 19: Contentsxvii14.4.4 Electrostatic Me
Page 20 and 21: PrefaceThe number one challenge fac
Page 22 and 23: Prefacexxifor well over 6 years. A
Page 24 and 25: 2 Understanding Smart Sensorsobserv
Page 26 and 27: 4 Understanding Smart Sensorssmart
Page 28 and 29: 6 Understanding Smart Sensorsto pro
Page 30 and 31: 8 Understanding Smart Sensorsinclud
Page 32 and 33: 10 Understanding Smart SensorsLevel
Page 34 and 35: 12 Understanding Smart Sensorsuser
Page 36 and 37: 14 Understanding Smart Sensorstechn
Page 38 and 39: 16 Understanding Smart Sensorschang
Page 40 and 41: 18 Understanding Smart Sensorstechn
Page 42 and 43: 20 Understanding Smart Sensors Surf
Page 44 and 45: 22 Understanding Smart Sensorssecon
Page 46 and 47: 24 Understanding Smart SensorsSilic
Page 48 and 49: 26 Understanding Smart SensorsSilic
Page 50 and 51: 28 Understanding Smart SensorsSacri
Page 52 and 53: 30 Understanding Smart Sensors2.4.3
Page 54 and 55: 32 Understanding Smart Sensorsmeasu
Page 56 and 57: 34 Understanding Smart SensorsIon+S
Page 58 and 59: 36 Understanding Smart Sensorssidew
Page 60 and 61: 38 Understanding Smart SensorsTable
Page 62 and 63: 40 Understanding Smart Sensorsoptim
Page 64 and 65: 42 Understanding Smart SensorsAlumi
Page 66 and 67: 44 Understanding Smart SensorsThe f
Page 70: This Page Intentionally Left Blank
Page 73 and 74: The Nature of Semiconductor Sensor
Page 93 and 94: 4Getting Sensor Information Into th
Page 95 and 96: Getting Sensor Information Into the
Page 115 and 116: 5Using MCUs/DSPs to Increase Sensor
Page 117 and 118: Using MCUs/DSPs to Increase Sensor
Page 119 and 120:
Using MCUs/DSPs to Increase Sensor
Page 121 and 122:
Page 123 and 124:
Page 125 and 126:
Page 127 and 128:
Page 129 and 130:
Page 131 and 132:
Page 133 and 134:
Page 135 and 136:
Page 137 and 138:
Page 139 and 140:
Page 141 and 142:
6Communications for Smart SensorsBe
Page 143 and 144:
Communications for Smart Sensors 12
Page 145 and 146:
Page 147 and 148:
Page 149 and 150:
Page 151 and 152:
Page 153 and 154:
Page 155 and 156:
Page 157 and 158:
Page 159 and 160:
Page 161 and 162:
Page 163 and 164:
Page 165 and 166:
Page 167 and 168:
Page 169 and 170:
Page 171 and 172:
7Control TechniquesA machine is int
Page 173 and 174:
Control Techniques 151Table 7.1Type
Page 175 and 176:
Control Techniques 153otherwise tak
Page 177 and 178:
Control Techniques 155consisting of
Page 179 and 180:
Control Techniques 157Supplied byap
Page 181 and 182:
Control Techniques 159InputX1Synaps
Page 183 and 184:
Control Techniques 1617.6 Adaptive
Page 185 and 186:
Control Techniques 163ObserverHB−
Page 187 and 188:
Control Techniques 165linear-vector
Page 189 and 190:
Control Techniques 1677.7.2 Combine
Page 191 and 192:
Control Techniques 169Domain-type s
Page 193 and 194:
Control Techniques 171[19] De Silva
Page 195 and 196:
8Transceivers, Transponders, andTel
Page 197 and 198:
Transceivers, Transponders, and Tel
Page 199 and 200:
Page 201 and 202:
Page 203 and 204:
Page 205 and 206:
Page 207 and 208:
Page 209 and 210:
Page 211 and 212:
Page 213 and 214:
Page 215 and 216:
Page 217 and 218:
Page 219 and 220:
Page 221 and 222:
Page 223 and 224:
9MEMS Beyond Sensors“And these ot
Page 225 and 226:
MEMS Beyond Sensors 203would not ex
Page 227 and 228:
MEMS Beyond Sensors 205PyrexSilicon
Page 229 and 230:
MEMS Beyond Sensors 207(a)IFluxIIMa
Page 231 and 232:
MEMS Beyond Sensors 209InletThermop
Page 233 and 234:
MEMS Beyond Sensors 211Figure 9.8 A
Page 235 and 236:
MEMS Beyond Sensors 2139.3.2 Microo
Page 237 and 238:
MEMS Beyond Sensors 215Over-range p
Page 239 and 240:
MEMS Beyond Sensors 217+ 10°− 10
Page 241 and 242:
MEMS Beyond Sensors 219achieved wit
Page 243 and 244:
MEMS Beyond Sensors 221Methods for
Page 245 and 246:
MEMS Beyond Sensors 223Figure 9.19
Page 247 and 248:
MEMS Beyond Sensors 225[21] Tortone
Page 249 and 250:
10Packaging, Testing, and Reliabili
Page 251 and 252:
Packaging, Testing, and Reliability
Page 253 and 254:
Page 255 and 256:
Page 257 and 258:
Page 259 and 260:
Page 261 and 262:
Page 263 and 264:
Page 265 and 266:
Page 267 and 268:
Page 269 and 270:
Page 271 and 272:
11Mechatronics and Sensing SystemsP
Page 273 and 274:
Mechatronics and Sensing Systems 25
Page 275 and 276:
Page 277 and 278:
Page 279 and 280:
Page 281 and 282:
Page 283 and 284:
Page 285 and 286:
Page 287 and 288:
Page 289 and 290:
Page 291 and 292:
Page 293 and 294:
Page 295 and 296:
12Standards for Smart SensingThe la
Page 297 and 298:
Standards for Smart Sensing 275Netw
Page 299 and 300:
Standards for Smart Sensing 277NCAP
Page 301 and 302:
Standards for Smart Sensing 279Proc
Page 303 and 304:
Standards for Smart Sensing 281PID
Page 305 and 306:
Standards for Smart Sensing 283•
Page 307 and 308:
Standards for Smart Sensing 285•
Page 309 and 310:
Standards for Smart Sensing 287Tabl
Page 311 and 312:
Standards for Smart Sensing 289perf
Page 313 and 314:
Standards for Smart Sensing 2911 0
Page 315 and 316:
Standards for Smart Sensing 293obje
Page 317 and 318:
Standards for Smart Sensing 295Mult
Page 319 and 320:
13The Implications of Smart SensorS
Page 321 and 322:
The Implications of Smart Sensor St
Page 323 and 324:
Page 325 and 326:
Page 327 and 328:
Page 329 and 330:
Page 331 and 332:
Page 333 and 334:
14The Next Phase of Sensing Systems
Page 335 and 336:
The Next Phase of Sensing Systems 3
Page 337 and 338:
Page 339 and 340:
Page 341 and 342:
Page 343 and 344:
Page 345 and 346:
Page 347 and 348:
Page 349 and 350:
Page 351 and 352:
Page 353 and 354:
Page 355 and 356:
List of Acronyms and Abbreviations3
Page 357 and 358:
List of Acronyms and Abbreviations
Page 359 and 360:
Page 361 and 362:
Page 363 and 364:
Page 365 and 366:
Page 367 and 368:
Page 369 and 370:
Page 371 and 372:
Page 373 and 374:
Glossaryablationvaporization of mat
Page 375 and 376:
Glossary 353buscalibrationconnectio
Page 377 and 378:
Glossary 355end point straight line
Page 379 and 380:
Glossary 357data transmission and p
Page 381 and 382:
Glossary 359multiplexer device that
Page 383 and 384:
Glossary 361repeatability the maxim
Page 385 and 386:
Glossary 363spread spectrum techniq
Page 387 and 388:
Glossary 365transducer a device con
Page 389 and 390:
Selected BibliographyBooks and Jour
Page 391 and 392:
Selected Bibliography 369Northeaste
Page 393 and 394:
Selected Bibliography 371Miscellane
Page 395 and 396:
About the AuthorRandy Frank is a te
Page 397 and 398:
Index4-to 20-mA signal transmitter,
Page 399 and 400:
Index 377definitions, 119-20introdu
Page 401 and 402:
Index 379HVAC, 318-19MCU with integ
Page 403 and 404:
Index 381Linearization, 108Linear p
Page 405 and 406:
Index 383in chemical measurements,
Page 407 and 408:
Index 385Ratiometricity, 56Reactive
Page 409 and 410:
Index 387IC fabrication, 19micromec
Page 411:
Index 389Transducer-independent int
show all

Understanding Smart Sensors - Nomads.usp

Create successful ePaper yourself

Delete template?

Save as template?