Understanding Smart Sensors - Nomads.usp

Index 387IC fabrication, 19micromechanical structures in, 202piezoresistivity in, 52–54plastic deformation, 40properties, 18protocols in, 135–42Silicon capacitive absolute pressure(SCAP), 23, 24Silicon dioxide, 40Silicon fusion bonding, 24–25defined, 24effect on die size, 26process illustration, 26uses, 24–25Silicon nitride, 40Silicon-on-glass bonding, 23–24defined, 23SCAP sensor with, 24See also Wafer bondingSilicon-on-silicon bonding, 22–23defined, 22pressure sensor illustration, 23See also Wafer bondingSingle-crystal reactive etching andmetalization (SCREAM), 35–36Single in-line plastic (SIP) package, 228SLEEPMODE operational amplifier, 75–76block diagram, 76power consumption, 75Smart House Application Language(SHAL), 134Smart loop, 328–29SMARTMOS, 256Smart-power ICs, 250–52approach, 251block diagram, 252current sensing in, 257defined, 250eight-output, 255fault-sensing/detection capability, 259high-level complexity, 258MCUs with, 260multiple power drivers, 253power, 251process technology choice, 251See also Integrated circuits (ICs)Smart sensorsalternate views of, 326–28application terms, 10basics, 1–16communications for, 119–46defined, 1, 3, 327discrete elements, reducing, 8elements, 7–8model, 7networked, 295packages, 13personal ID, 324–25for pressure measurements, 15relative IQ, 328semiconductor components, 15signal conditioning circuitry, 13standards, 273–95testing, 244–45See also SensorsSmart transducer interface module(STIM), 282–84defined, 274sourcing power to, 289transducers, 282trigger response, 283Society of Automotive Engineers (SAE), 125Spectral processing, 165Speech recognition and micromicrophones,319–20Spread spectrum, 177–79applications, 179defined, 177direct sequencing, 178frequency hopping, 178interference immunity, 177narrowband vs., 178Squeeze-film damping, 29Standards, 273–95alternative, 305–8IEEE 1451.1, 276–81IEEE 1451.2, 281–91IEEE P1451.3, 291–92IEEE P1451.4, 292–93implications of, 297–308introduction to, 273setting, 273–76summary, 295State machines, 154–55defined, 154finite, 154–55