Understanding Smart Sensors - Nomads.usp

380 Understanding Smart SensorsIEEE P1451.3 (continued)defined, 274, 291interface specification proposal, 292summary, 275IEEE P1451.4, 292–93defined, 274, 292implementation example, 293, 294interface illustration, 293NCAP, 294summary, 275TEDS, 294Impedance, 67Incremental optical encoders, 63–64defined, 63illustrated, 63Industrial, scientific, and medical (ISM)bands, 174Industrial networks, comparison of, 133Industrial protocolsARCNet, 132–33CAN, 130–31fieldbus, 130, 131, 132HART, 132list of, 124LonTalk, 131–32Profibus, 132, 142SERCOS, 132See also ProtocolsInherent power-supply rejection circuit,81–82illustrated, 81resistance values, 81Instrumentation amplifiers, 73–75differential-input gain block, 74pressure sensor circuit using, 74uses, 73Integrated active elements, 84–86Integrated circuits (ICs), 2application-specific (ASICs), 93, 94communication techniques, 260customer-specified (CSICs), 103–4epoxy protection for, 239monolithic microwave (MMICs), 176process comparison withmicromachining, 38silicon, fabrication, 19smart-power, 250–52Integrated passive elements, 83Integrated pressure sensor (IPS), 77MCU with, 321–23microcontroller with, 323piezoresistive, 85Integrated sensing system, 265Integration, 113–16development steps, 14hybrid, 8mechatronics and, 250micromachining andmicroelectronics, 11–15monolithic, 8, 9path, 8possibilities, 9power, 114relative die costs for, 115temperature sensing, 255Intelligent MEMS (IMEMS), 201Intelligent transportation system, 188–90application areas, 188collision avoidance, 189dead reckoning, 188–89GPS sensing, 188NODSs, 189–90systems, 190true road speed and, 190VNAW, 189, 190See also RF sensingInternational Organization forStandardization (ISO), 120, 123Internetprocess control over, 303–5software, 305I/O, MCU, 98–99Ion-beam milling, 34ITS databus (IDB) standard, 145Jumpers, for initial calibration, 14Lasers, in micromachining, 36–37Latency, 120Lateral diffused MOS (LDMOS), 174Lead zirconate titanate (PZT), 59LIGA processbulk and surface comparison, 33defined, 32illustrated, 33modified, 32See also Micromachining