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370 Understanding Smart SensorsElsevier Science Sensors and Actuators A/B, http://www.elsevier.com/Association Web SitesAS-Interface, http://www.as-interface.com/Bitbus European Users Group, http://www.bitbus.org/wordofp.htmlCEBus Industry Council, Inc., www.cebus.orgController Area Network (CANbus), an introduction to the serial communicationsbusiness, http://www.ic.ornl.gov/p1451/whats_new_page.htmlControlNet International, http://www.controlnet.org/DeviceNET, http://www.ab.com/networks/devicenet.htmlOpen DeviceNet Vendor Association, Inc., http://www.odva.org/EIB (Home and Building Automation and Electrical Installation),www.eiba.beFieldbus Online, http://www.fieldbus.org/HART Communication Foundation, http://www.ic.ornl.gov/p1451/whats_new_page.htmlIEEE 1451, http://www.ic.ornl.gov/p1451/p1451.htmlInterbus-S, www.interbusclub.comInstrument Society of America, http://www.isa.org/index/LonMark International, http://www.lonmark.org/PLCopen, http://www.plcopen.org:80/Profibus, www.profibus.comSDS, http://www.honeywell.com/sensing/prodinfo/sds/Semiconductor Industry Association, http://www.semichips.orgSERCOS, www.sercos.comSwiftNet (SHIP STAR Associates), www.shipstar.com/swiftnet.htmlOSI on WWW, http://www.ic.ornl.gov/p1451/whats_new_page.htmlWorldFIP (World Factory Information Protocol), www.worldfip.org
Selected Bibliography 371Miscellaneous Web SitesMiCroSystem Group Research Topics, http://tima-cmp.imag.fr/tima/mcs/topics.htmlMicroelectromechanical Systems Advanced Materials and Fabrication Methods,http://www.nap.edu/readingroom/books/micro/MEMScaP Simulation tools for MEMS, http://memscap.e-sip.com/MEMS Clearinghouse, http://mems.isi.edu/MEMS, fabrication, consulting, micromechanics, MST, microelectromechanicalsystems, MEMS journals, MEMS books, MEMS clubs, MEMS Web sites,employment and jobs in the United States, text online, MEMS introduction,and MEMS conferences, http://home.earthlink.net/~trimmerw/mems/index.htmlEuropean Microsystems Technology Online, http://www.nexus-emsto.com/Tutorial information about MEMS, http://mems.isi.edu/archives/ otherWWWsites_tutorial.html
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Understanding Smart SensorsSecond E
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Library of Congress Cataloging-in-P
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ContentsPrefacexix1 Smart Sensor Ba
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Contentsix3.3.3 Hall Effect 603.3.4
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Contentsxi5.8 Summary 116References
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Contentsxiii8.3.1 Surface Acoustica
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Contentsxv11.1.1 Integration and Me
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Contentsxvii14.4.4 Electrostatic Me
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PrefaceThe number one challenge fac
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Prefacexxifor well over 6 years. A
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2 Understanding Smart Sensorsobserv
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4 Understanding Smart Sensorssmart
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6 Understanding Smart Sensorsto pro
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8 Understanding Smart Sensorsinclud
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10 Understanding Smart SensorsLevel
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12 Understanding Smart Sensorsuser
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14 Understanding Smart Sensorstechn
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16 Understanding Smart Sensorschang
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18 Understanding Smart Sensorstechn
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20 Understanding Smart Sensors Surf
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22 Understanding Smart Sensorssecon
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24 Understanding Smart SensorsSilic
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26 Understanding Smart SensorsSilic
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28 Understanding Smart SensorsSacri
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30 Understanding Smart Sensors2.4.3
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32 Understanding Smart Sensorsmeasu
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34 Understanding Smart SensorsIon+S
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36 Understanding Smart Sensorssidew
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38 Understanding Smart SensorsTable
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40 Understanding Smart Sensorsoptim
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42 Understanding Smart SensorsAlumi
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44 Understanding Smart SensorsThe f
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46 Understanding Smart Sensors[21]
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The Nature of Semiconductor Sensor
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4Getting Sensor Information Into th
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Getting Sensor Information Into the
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5Using MCUs/DSPs to Increase Sensor
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Using MCUs/DSPs to Increase Sensor
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6Communications for Smart SensorsBe
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Communications for Smart Sensors 12
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7Control TechniquesA machine is int
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Control Techniques 151Table 7.1Type
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Control Techniques 153otherwise tak
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Control Techniques 155consisting of
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Control Techniques 157Supplied byap
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Control Techniques 159InputX1Synaps
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Control Techniques 1617.6 Adaptive
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Control Techniques 163ObserverHB−
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Control Techniques 165linear-vector
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Control Techniques 1677.7.2 Combine
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Control Techniques 169Domain-type s
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Control Techniques 171[19] De Silva
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8Transceivers, Transponders, andTel
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Transceivers, Transponders, and Tel
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9MEMS Beyond Sensors“And these ot
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MEMS Beyond Sensors 203would not ex
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MEMS Beyond Sensors 205PyrexSilicon
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MEMS Beyond Sensors 207(a)IFluxIIMa
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MEMS Beyond Sensors 209InletThermop
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MEMS Beyond Sensors 211Figure 9.8 A
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MEMS Beyond Sensors 2139.3.2 Microo
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MEMS Beyond Sensors 215Over-range p
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MEMS Beyond Sensors 217+ 10°− 10
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MEMS Beyond Sensors 219achieved wit
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MEMS Beyond Sensors 221Methods for
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MEMS Beyond Sensors 223Figure 9.19
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MEMS Beyond Sensors 225[21] Tortone
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10Packaging, Testing, and Reliabili
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Packaging, Testing, and Reliability
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11Mechatronics and Sensing SystemsP
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12Standards for Smart SensingThe la
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Standards for Smart Sensing 275Netw
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Standards for Smart Sensing 277NCAP
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Standards for Smart Sensing 279Proc
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Standards for Smart Sensing 281PID
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Standards for Smart Sensing 283•
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Standards for Smart Sensing 285•
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Standards for Smart Sensing 287Tabl
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Standards for Smart Sensing 289perf
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Standards for Smart Sensing 2911 0
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Standards for Smart Sensing 293obje
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Standards for Smart Sensing 295Mult
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13The Implications of Smart SensorS
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The Implications of Smart Sensor St
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14The Next Phase of Sensing Systems
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The Next Phase of Sensing Systems 3
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Page 341 and 342: The Next Phase of Sensing Systems 3
Page 355 and 356: List of Acronyms and Abbreviations3
Page 357 and 358: List of Acronyms and Abbreviations
Page 373 and 374: Glossaryablationvaporization of mat
Page 375 and 376: Glossary 353buscalibrationconnectio
Page 377 and 378: Glossary 355end point straight line
Page 379 and 380: Glossary 357data transmission and p
Page 381 and 382: Glossary 359multiplexer device that
Page 383 and 384: Glossary 361repeatability the maxim
Page 385 and 386: Glossary 363spread spectrum techniq
Page 387 and 388: Glossary 365transducer a device con
Page 389 and 390: Selected BibliographyBooks and Jour
Page 391: Selected Bibliography 369Northeaste
Page 395 and 396: About the AuthorRandy Frank is a te
Page 397 and 398: Index4-to 20-mA signal transmitter,
Page 399 and 400: Index 377definitions, 119-20introdu
Page 401 and 402: Index 379HVAC, 318-19MCU with integ
Page 403 and 404: Index 381Linearization, 108Linear p
Page 405 and 406: Index 383in chemical measurements,
Page 407 and 408: Index 385Ratiometricity, 56Reactive
Page 409 and 410: Index 387IC fabrication, 19micromec
Page 411: Index 389Transducer-independent int
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