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332 Understanding Smart Sensors[21] Harris, R., M. F. Maseeh, and S. D. Senturia, “Automatic Generation of a 3-D Model of aMicrofabricated Structure,” Technical Digest of IEEE Solid-State Sensor and Actuator Workshop,Hilton Head Island, SC, June 4–7, 1990, pp. 36–41.[22] Travis, B., “MEMS Sensors and Mechanical Gadgets Enter the Mainstream,” EDN, May21, 1998, pp. 77–87.[23] Gilbert, J. R., and S. F. Bart, “Enabling the Design and Use of MEMS Sensors,” Sensors,Apr. 1998, pp. 34–37.[24] Goering, R., “Darpa Program Seeds Mixed-Technology CAD,”http://www.eet.com/news/97/938news/seeds.html, Jan. 20, 1997.[25] Najafi, K., “Smart Sensor,” J. Micromechanics and Microengineering, June 1991, pp.86–102.[26] Juds, S. M., “Towards a Definition of Smart Sensors,” Sensors, July 1991, pp. 2–3.
List of Acronyms and Abbreviations3C-SiCA/DA/FA-busACKADCADPCMADSAFMAHDLAlALUAMRAANSIAPIepitaxial silicon carbideanalog to digitalair-fuel ratioAutomotive Bit-Serial Universal Interface SystemacknowledgeA/D converteradaptive differential pulse code modulationautomatic driver sensoratomic force microscopeanalog hardware description languagealuminumarithmetic logic unit; the unit of a computing system containingcircuits that perform arithmetic and logicaloperationsAutomatic Meter Reading AssociationAmerican National Standards Instituteapplication programming interface333
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Understanding Smart SensorsSecond E
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Library of Congress Cataloging-in-P
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ContentsPrefacexix1 Smart Sensor Ba
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Contentsix3.3.3 Hall Effect 603.3.4
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Contentsxi5.8 Summary 116References
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Contentsxiii8.3.1 Surface Acoustica
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Contentsxv11.1.1 Integration and Me
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Contentsxvii14.4.4 Electrostatic Me
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PrefaceThe number one challenge fac
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Prefacexxifor well over 6 years. A
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2 Understanding Smart Sensorsobserv
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4 Understanding Smart Sensorssmart
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6 Understanding Smart Sensorsto pro
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8 Understanding Smart Sensorsinclud
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10 Understanding Smart SensorsLevel
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12 Understanding Smart Sensorsuser
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14 Understanding Smart Sensorstechn
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16 Understanding Smart Sensorschang
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18 Understanding Smart Sensorstechn
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20 Understanding Smart Sensors Surf
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22 Understanding Smart Sensorssecon
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24 Understanding Smart SensorsSilic
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26 Understanding Smart SensorsSilic
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28 Understanding Smart SensorsSacri
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30 Understanding Smart Sensors2.4.3
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32 Understanding Smart Sensorsmeasu
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34 Understanding Smart SensorsIon+S
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36 Understanding Smart Sensorssidew
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38 Understanding Smart SensorsTable
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40 Understanding Smart Sensorsoptim
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42 Understanding Smart SensorsAlumi
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44 Understanding Smart SensorsThe f
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46 Understanding Smart Sensors[21]
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This Page Intentionally Left Blank
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The Nature of Semiconductor Sensor
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4Getting Sensor Information Into th
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Getting Sensor Information Into the
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5Using MCUs/DSPs to Increase Sensor
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Using MCUs/DSPs to Increase Sensor
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6Communications for Smart SensorsBe
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Communications for Smart Sensors 12
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7Control TechniquesA machine is int
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Control Techniques 151Table 7.1Type
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Control Techniques 153otherwise tak
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Control Techniques 155consisting of
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Control Techniques 157Supplied byap
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Control Techniques 159InputX1Synaps
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Control Techniques 1617.6 Adaptive
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Control Techniques 163ObserverHB−
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Control Techniques 165linear-vector
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Control Techniques 1677.7.2 Combine
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Control Techniques 169Domain-type s
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Control Techniques 171[19] De Silva
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8Transceivers, Transponders, andTel
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Transceivers, Transponders, and Tel
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9MEMS Beyond Sensors“And these ot
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MEMS Beyond Sensors 203would not ex
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MEMS Beyond Sensors 205PyrexSilicon
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MEMS Beyond Sensors 207(a)IFluxIIMa
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MEMS Beyond Sensors 209InletThermop
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MEMS Beyond Sensors 211Figure 9.8 A
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MEMS Beyond Sensors 2139.3.2 Microo
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MEMS Beyond Sensors 215Over-range p
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MEMS Beyond Sensors 217+ 10°− 10
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MEMS Beyond Sensors 219achieved wit
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MEMS Beyond Sensors 221Methods for
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MEMS Beyond Sensors 223Figure 9.19
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MEMS Beyond Sensors 225[21] Tortone
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10Packaging, Testing, and Reliabili
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Packaging, Testing, and Reliability
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11Mechatronics and Sensing SystemsP
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Mechatronics and Sensing Systems 25
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12Standards for Smart SensingThe la
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Standards for Smart Sensing 275Netw
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Standards for Smart Sensing 277NCAP
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Standards for Smart Sensing 279Proc
Page 303 and 304: Standards for Smart Sensing 281PID
Page 305 and 306: Standards for Smart Sensing 283•
Page 307 and 308: Standards for Smart Sensing 285•
Page 309 and 310: Standards for Smart Sensing 287Tabl
Page 311 and 312: Standards for Smart Sensing 289perf
Page 313 and 314: Standards for Smart Sensing 2911 0
Page 315 and 316: Standards for Smart Sensing 293obje
Page 317 and 318: Standards for Smart Sensing 295Mult
Page 319 and 320: 13The Implications of Smart SensorS
Page 321 and 322: The Implications of Smart Sensor St
Page 333 and 334: 14The Next Phase of Sensing Systems
Page 335 and 336: The Next Phase of Sensing Systems 3
Page 353: The Next Phase of Sensing Systems 3
Page 357 and 358: List of Acronyms and Abbreviations
Page 373 and 374: Glossaryablationvaporization of mat
Page 375 and 376: Glossary 353buscalibrationconnectio
Page 377 and 378: Glossary 355end point straight line
Page 379 and 380: Glossary 357data transmission and p
Page 381 and 382: Glossary 359multiplexer device that
Page 383 and 384: Glossary 361repeatability the maxim
Page 385 and 386: Glossary 363spread spectrum techniq
Page 387 and 388: Glossary 365transducer a device con
Page 389 and 390: Selected BibliographyBooks and Jour
Page 391 and 392: Selected Bibliography 369Northeaste
Page 393 and 394: Selected Bibliography 371Miscellane
Page 395 and 396: About the AuthorRandy Frank is a te
Page 397 and 398: Index4-to 20-mA signal transmitter,
Page 399 and 400: Index 377definitions, 119-20introdu
Page 401 and 402: Index 379HVAC, 318-19MCU with integ
Page 403 and 404: Index 381Linearization, 108Linear p
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Index 383in chemical measurements,
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Index 385Ratiometricity, 56Reactive
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Index 387IC fabrication, 19micromec
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Index 389Transducer-independent int
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