Understanding Smart Sensors - Nomads.usp

312 Understanding Smart SensorsSimilarly, computing, communications, and other technologies will be combinedwith several or all of the topics that have been discussed in this book tocreate new control products. Those new products may require the combinationsof several enabling technologies that are in the process of achieving manufacturingstatus. Aggressive semiconductor industry roadmaps, heavyinvestment in R&D for sensors, and the large number of participants in sensortechnology and manufacturing promise a variety of competitive products, withthe focus on the smart aspects of these sensors.Many industry experts are actively trying to define the next “killer” applicationsfor MEMS technology. In fact, several conferences on the commercializationof microsystems have been held for experts to share ideas in that area. Asshown in Table 14.1, product evolution has encompassed decades to full commercializationphase for today’s successes [1]. Smart sensors in gas, bio/chemical,and rate sensor products are among the EMS devices that are still in theevolution phase.MEMS technology, which forms the basis of the smart sensors discussedin this book, has been called disruptive to industry according to a recent study[2]. “Disruptive” technology upsets the status quo in an industry. In the case ofMEMS, the market pull is bringing process-technology and packaging companiesinto the regime of IC manufacturers. The study was funded by theNational Science Foundation (NSF) and Semiconductor Equipment andTable 14.1Timetable of Evolution of MEMS/MST Products (After: [1])ProductDiscoveryProductEvolutionCost Reduction/ApplicationExpansionFullCommercializationPressure sensors 1954–1960 1960–1975 1975–1990 1990Accelerometers 1974–1985 1985–1990 1990–1997 1997Gas sensors 1986–1994 1994–1998 1998–2005 2005Valves 1980–1988 1988–1996 1996–2004 2004Nozzles 1972–1984 1984–1990 1990–2002 2002Photonics/displays 1980–1986 1986–1996 1996–2004 2004Bio/chemical sensors 1980–1994 1994–1999 1999–2002 2002RF 1994–1998 1998–2001 2001–2005 2005Rate sensors 1982–1990 1990–1998 1998–2002 2002Microrelays 1982–1992 1992–1998 1998–2004 2004