Understanding Smart Sensors - Nomads.usp

264 Understanding Smart Sensorssame functions at the same processing rate as the neuromorphic sensor wouldrequire approximately 100W. The neuromorphic device consumes only 50mW, or nearly 1/2,000 of the power. That is a dramatic demonstration of thedifference that smart sensors will contribute to future systems.11.4.2 Multiple Types of SensorsA variety of sensors have been fabricated on a single chip to detect damage andperformance degradation caused during semiconductor assembly and packagingoperations [12]. The sensors were designed using CMOS technology commonto many IC manufacturing facilities. Sensors on the chip include iondetector, moisture sensor, electrostatic discharge detector, strain gauge formeasuring shear forces, edge damage detector, corrosion detector, as well asheaters for corrosion, acceleration, and thermal modeling.Figure 11.7 is another example of an integrated multiple-sensor chip thatutilizes the pyroelectric and piezoelectric effects in zinc oxide thin films [13].64-elementpyroelectricinfraredimagerAccelerometersSurface-acousticwave chemicalvapor sensorsIntegratedanemometerDiagnosticstructures64-elementtactile sensorarrayCharge-coupleddevice imageDiscrete pyroelectricradiation detectorsand heat of reactionsensorFigure 11.7 Multiple-type integrated sensor. (After: [13].)