Understanding Smart Sensors - Nomads.usp

MEMS Beyond Sensors 225[21] Tortonese, M., et al., “Atomic Force Microscopy Using Piezoresistive Cantilever,” IEEE91CH2817-5 from Transducers ‘91, pp. 448–451.[22] Mignardi, M. A., “Digital Micromirror Array for Projection TV,” Solid State Technology,July 1994, pp. 63–68.[23] Gaitan, M., J. Kinard, and D. X. Huang, “Performance of Commercial CMOS FoundryCompatible Multijunction Thermal Converter,” 7th Internat’l Conf. on Solid State Sensorsand Actuators (Transducers ‘93), June 7–10, 1993, pp. 1012–1014.[24] Perng, D. C., D. A. Crewe, and A. D. Feinerman, “Micromachined Thermionic Emitters,”J. Micromechanics and Microengineering, Vol. 2, No. 1, Mar. 1992, pp. 25–30.[25] Derbyshire, K. “Beyond AMLCDs: Field Emission Displays?” Solid State Technology, Nov.1994, pp. 55–65.[26] Shimoyama, I., et al., “Insect-Like Microrobots With External Skeletons,” IEEE ControlSystems, Feb. 1993, pp. 37–41.[27] http://www-bsac.eecs.berkeley.edu/~yeh/sems.html[28] Friedberger, A., and R. S. Muller, “Improved Surface Micromachined Hinges forFold-Out Structures,” J. Microelectromechanical Systems, Vol. 7, No. 3, Sept. 1998,pp. 315–319.[29] Hunter, I. W., and S. Fafontaine, “A Comparison of Muscle With Artificial Actuators,”Technical Digest IEEE Solid-State Sensor and Actuator Workshop, June 22–25, 1992, HiltonHead, SC, pp. 178–185.[30] Brown, C., “Force Arrays Mimic Natural Motion,” Electronic Engineering Times, June 20,1994, pp. 41, 49.[31] Farooqui, M. M., and A. G. R. Evans, “Microfabrication of Submicron Nozzles in SiliconNitride,” J. Microelectromechanical Systems, Vol. 1, No. 2, June 1992, pp. 86–88.[32] Markstein, H., “Vertical Wafer Integration Optimizes Memory Density,” Electronic Packaging& Production, Jan. 1995, p. 30.[33] http://www.news.cornell.edu/science/July97/guitar.ltb.htn