Understanding Smart Sensors - Nomads.usp

MEMS Beyond Sensors 223Figure 9.19 Nanoguitar fabricated using E-beam lithography.which allows extremely fine patterns to be created. A 30-nm-wide wire suspendedacross a 2-mm gap has also been made using this approach. Thesenanomechanical devices are among the initial research to resolve physical questionsregarding motion and mechanical energy dissipation.9.4 SummaryMicromachining technology is used to produce micron-scale machines—movablestructures—that are independently fascinating. If they can be interconnectedfor use in a microsystem, such devices have the potential to create newindustries just as semiconductor technology has done. MEMS devices combinedwith sensors will provide new tools and improved performance for controlsystems.References[1] Bryzek, J., and J. R. Mallon, “Silicon Integrated Circuit Sensors and Actuators,” WesconProfessional Advancement Program Session 9, Nov. 14–15, 1989, San Francisco, pp.196–201.[2] Koeneman, P., et al., “Feasibility of Micro Power Supplies for MEMS,” J. MicromechanicalSystems, Vol. 6, No. 4, Dec. 1997, pp. 355–362.[3] Zdeblick, M., “A Revolutionary Actuator for Microstructures,” Sensors, Feb. 1993, pp.26–33.