Understanding Smart Sensors - Nomads.usp

MEMS Beyond Sensors 209InletThermopneumaticchamberHeaterOutletHeater waferMembranewaferMembraneFlow channelChannel wafer(a)(b)Figure 9.5 Three thermopneumatic actuators providing peristaltic pumping action: (a) sideview and (b) end view.Figure 9.6 Microdynamometer fabricated with electroplated nickel. A single-pole-pair testdrive is at the bottom right. (Courtesy of University of Wisconsin.)allow a micromachine the force needed to move a 1-lb object. The gear isreversible and can increase as well as decrease speeds. Figure 9.7 shows an exampleof a surface micromachined gear set [11].