Understanding Smart Sensors - Nomads.usp

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206 Understanding Smart SensorsTop viewRotorStatorsA A 1PolysiliconFixed axleSilicon nitrideSilicon dioxideCross sectionFigure 9.2 Electrostatic micromotor. (After: [4].)9.2.3 MicropumpsA miniature peristaltic pump has been designed, fabricated, and tested. Thepump consists of three silicon wafers bonded together, as shown in Figure 9.5,to produce a flow channel, membrane, and heater [8]. Silicon fusion bondingwas used to bond the wafers containing those elements. The heaters are suspendedin a thermopneumatic fluid and sequentially activated from left toright. The flow channel is fabricated by a proprietary etching technique toclosely match the contour of the bulging silicon nitride membrane. Heating thefluid deflects the membrane that displaces the liquid. The deflected membraneseals the channel to prevent backflow. Performance of the micropump has beenpredicted to be 7 mL per minute at 15 psi. Pumps that can displace preciseamounts of liquid have applications in medicine for automatic insulin dispensing,as well as in manufacturing for precise process control and reduced materialcost.
MEMS Beyond Sensors 207(a)IFluxIIMagnetic coreConductorCurrent IFlux(b)Figure 9.3 (a) Magnetic micromotor, and (b) multilevel meander coil. (Courtesy of GeorgiaInstitute of Technology.)
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Understanding Smart SensorsSecond E
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Library of Congress Cataloging-in-P
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ContentsPrefacexix1 Smart Sensor Ba
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Contentsix3.3.3 Hall Effect 603.3.4
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Contentsxi5.8 Summary 116References
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Contentsxiii8.3.1 Surface Acoustica
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Contentsxv11.1.1 Integration and Me
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Contentsxvii14.4.4 Electrostatic Me
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PrefaceThe number one challenge fac
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Prefacexxifor well over 6 years. A
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2 Understanding Smart Sensorsobserv
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4 Understanding Smart Sensorssmart
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6 Understanding Smart Sensorsto pro
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8 Understanding Smart Sensorsinclud
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10 Understanding Smart SensorsLevel
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12 Understanding Smart Sensorsuser
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14 Understanding Smart Sensorstechn
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16 Understanding Smart Sensorschang
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18 Understanding Smart Sensorstechn
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20 Understanding Smart Sensors Surf
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22 Understanding Smart Sensorssecon
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24 Understanding Smart SensorsSilic
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26 Understanding Smart SensorsSilic
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28 Understanding Smart SensorsSacri
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30 Understanding Smart Sensors2.4.3
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32 Understanding Smart Sensorsmeasu
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34 Understanding Smart SensorsIon+S
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36 Understanding Smart Sensorssidew
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38 Understanding Smart SensorsTable
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40 Understanding Smart Sensorsoptim
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42 Understanding Smart SensorsAlumi
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44 Understanding Smart SensorsThe f
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46 Understanding Smart Sensors[21]
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The Nature of Semiconductor Sensor
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4Getting Sensor Information Into th
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Getting Sensor Information Into the
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5Using MCUs/DSPs to Increase Sensor
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Using MCUs/DSPs to Increase Sensor
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6Communications for Smart SensorsBe
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7Control TechniquesA machine is int
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Control Techniques 151Table 7.1Type
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Control Techniques 153otherwise tak
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Page 181 and 182: Control Techniques 159InputX1Synaps
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Page 185 and 186: Control Techniques 163ObserverHB−
Page 187 and 188: Control Techniques 165linear-vector
Page 189 and 190: Control Techniques 1677.7.2 Combine
Page 191 and 192: Control Techniques 169Domain-type s
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Page 195 and 196: 8Transceivers, Transponders, andTel
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Page 231 and 232: MEMS Beyond Sensors 209InletThermop
Page 233 and 234: MEMS Beyond Sensors 211Figure 9.8 A
Page 235 and 236: MEMS Beyond Sensors 2139.3.2 Microo
Page 237 and 238: MEMS Beyond Sensors 215Over-range p
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Page 241 and 242: MEMS Beyond Sensors 219achieved wit
Page 243 and 244: MEMS Beyond Sensors 221Methods for
Page 245 and 246: MEMS Beyond Sensors 223Figure 9.19
Page 247 and 248: MEMS Beyond Sensors 225[21] Tortone
Page 249 and 250: 10Packaging, Testing, and Reliabili
Page 251 and 252: Packaging, Testing, and Reliability
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12Standards for Smart SensingThe la
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Standards for Smart Sensing 275Netw
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Standards for Smart Sensing 277NCAP
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Standards for Smart Sensing 279Proc
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Standards for Smart Sensing 281PID
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Standards for Smart Sensing 283•
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Standards for Smart Sensing 285•
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Standards for Smart Sensing 287Tabl
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Standards for Smart Sensing 289perf
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Standards for Smart Sensing 2911 0
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Standards for Smart Sensing 293obje
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Standards for Smart Sensing 295Mult
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13The Implications of Smart SensorS
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The Implications of Smart Sensor St
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14The Next Phase of Sensing Systems
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The Next Phase of Sensing Systems 3
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List of Acronyms and Abbreviations3
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List of Acronyms and Abbreviations
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Glossaryablationvaporization of mat
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Glossary 353buscalibrationconnectio
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Glossary 355end point straight line
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Glossary 357data transmission and p
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Glossary 359multiplexer device that
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Glossary 361repeatability the maxim
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Glossary 363spread spectrum techniq
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Glossary 365transducer a device con
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Selected BibliographyBooks and Jour
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Selected Bibliography 369Northeaste
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Selected Bibliography 371Miscellane
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About the AuthorRandy Frank is a te
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Index4-to 20-mA signal transmitter,
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Index 377definitions, 119-20introdu
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Index 379HVAC, 318-19MCU with integ
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Index 381Linearization, 108Linear p
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Index 383in chemical measurements,
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Index 385Ratiometricity, 56Reactive
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Index 387IC fabrication, 19micromec
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Index 389Transducer-independent int
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