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202 Understanding Smart SensorsTable 9.1Micromechanical Structures in Silicon (After: [1])Cryogenic microconnectorsFiber-optic couplersFilm stress measurementFluidic componentsIC heatsinksInk jet nozzlesLaser beam deflectorsLaser resonatorsLight modulatorsMagnetographic print headsMembranesMEMS PC cardMicroalignersMicrobalancesMicrobolometer (IR detector)MicrochannelsMicrochromatographMicroenginesMicro-Fresnel lensMicrofusesMicrogearsMicrogripper/microtweezersMicrointerconnectsMicrointerferometerMicrolocksMicromachined laser diodesMicromanipulator/microhandlerMicromechanical memoryMicromicrophoneMicromirrorsMicromoldsMicromotorsMicropneumatic tablesMicropositionersMicroprobesMicropumpsMicroreactorMicrorelaysMicrorobotic armMicrorobotsMicro-SEMMicroscannersMicrospectroscopyMicrospeakersMicroswitchesMicrostimulatorMicrotipsMicrotransmissionsMicrovacuum tubesMicrovalvesMicrovalve arraysMicrowaveguideNerve regeneratorsPhotolithography masksPressure switchesPressure regulatorsrms convertersThermal print headsThermopileTorsion mirrorsVibrating microstructuresWind tunnel skin frictionsemiconductor batch processing has had for electrical engineering. Today’s$150-billion-plus semiconductor industry and resulting electronics industry
MEMS Beyond Sensors 203would not exist without batch processing technology. This chapter discusses afew of the areas that are being explored to indicate the variety and the extent ofMEMS technology. The MEMS field is progressing and expanding very fast.The examples given show the broad coverage of this new field. New actuatordesigns and new MEMS technologies are being developed rapidly. Readersinterested in the most recent developments are referred to the journals, books,and Web sites referenced in this chapter and at the end of the book.9.2 Micromachined ActuatorsActuators micromachined from silicon and other semiconductor materials useelectrostatic, electrothermal, thermopneumatic, electromagnetic, electroosmotic,electrohydrodynamic, shape memory alloy (SMA), thermoresponsivepolymers, and other means to provide motion. Table 9.2 is a comparison of thecapabilities of several actuators [2], ranging from existing products that provideunmatched performance compared to their macroscale counterparts to intriguinglab curiosities that require significant development to become practical.Examples of a silicon microvalve, micromotors, micropump, microdynamometer,microtransmission, and a microsteam engine, as well as actuators in alternativematerials, are discussed in this section.9.2.1 MicrovalvesOne area of MEMS actuators that has achieved production status is microvalves.Figure 9.1 shows one design, a silicon Fluistor (or fluidic transistor)microvalve that is approximately 5.5 mm by 6.5 mm by 2 mm [3]. 1 The bulkmicromachined cavity in the top section is filled with a control liquid. In theunactivated state, gases can flow through the valve. A voltage applied to theheating element on the diaphragm causes sufficient expansion of the liquid todeflect the diaphragm, close the valve seat, and restrict flow. The valve has adynamic range of 100,000 to 1, controlling gas flows from 4 mL per minute to4L per minute at a pressure of 20 psi.9.2.2 MicromotorsMicromotors are among the more interesting demonstrations of the futurepotential of MEMS. Several researchers have fabricated electrostatic and1. Fluistor is a trademark of Redwood Microsystems, Inc.
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Understanding Smart SensorsSecond E
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Library of Congress Cataloging-in-P
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ContentsPrefacexix1 Smart Sensor Ba
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Contentsix3.3.3 Hall Effect 603.3.4
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Contentsxi5.8 Summary 116References
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Contentsxiii8.3.1 Surface Acoustica
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Contentsxv11.1.1 Integration and Me
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Contentsxvii14.4.4 Electrostatic Me
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PrefaceThe number one challenge fac
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Prefacexxifor well over 6 years. A
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2 Understanding Smart Sensorsobserv
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4 Understanding Smart Sensorssmart
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6 Understanding Smart Sensorsto pro
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8 Understanding Smart Sensorsinclud
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10 Understanding Smart SensorsLevel
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12 Understanding Smart Sensorsuser
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14 Understanding Smart Sensorstechn
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16 Understanding Smart Sensorschang
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22 Understanding Smart Sensorssecon
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24 Understanding Smart SensorsSilic
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26 Understanding Smart SensorsSilic
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28 Understanding Smart SensorsSacri
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30 Understanding Smart Sensors2.4.3
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32 Understanding Smart Sensorsmeasu
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34 Understanding Smart SensorsIon+S
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36 Understanding Smart Sensorssidew
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38 Understanding Smart SensorsTable
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40 Understanding Smart Sensorsoptim
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42 Understanding Smart SensorsAlumi
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44 Understanding Smart SensorsThe f
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46 Understanding Smart Sensors[21]
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The Nature of Semiconductor Sensor
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4Getting Sensor Information Into th
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5Using MCUs/DSPs to Increase Sensor
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Using MCUs/DSPs to Increase Sensor
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6Communications for Smart SensorsBe
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7Control TechniquesA machine is int
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Page 187 and 188: Control Techniques 165linear-vector
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Page 231 and 232: MEMS Beyond Sensors 209InletThermop
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Page 237 and 238: MEMS Beyond Sensors 215Over-range p
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Page 245 and 246: MEMS Beyond Sensors 223Figure 9.19
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Page 251 and 252: Packaging, Testing, and Reliability
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12Standards for Smart SensingThe la
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Standards for Smart Sensing 275Netw
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Standards for Smart Sensing 277NCAP
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Standards for Smart Sensing 279Proc
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Standards for Smart Sensing 281PID
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Standards for Smart Sensing 283•
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Standards for Smart Sensing 285•
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Standards for Smart Sensing 287Tabl
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Standards for Smart Sensing 289perf
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Standards for Smart Sensing 2911 0
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Standards for Smart Sensing 293obje
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Standards for Smart Sensing 295Mult
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13The Implications of Smart SensorS
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The Implications of Smart Sensor St
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14The Next Phase of Sensing Systems
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The Next Phase of Sensing Systems 3
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List of Acronyms and Abbreviations3
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List of Acronyms and Abbreviations
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Glossaryablationvaporization of mat
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Glossary 353buscalibrationconnectio
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Glossary 355end point straight line
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Glossary 357data transmission and p
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Glossary 359multiplexer device that
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Glossary 361repeatability the maxim
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Glossary 363spread spectrum techniq
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Glossary 365transducer a device con
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Selected BibliographyBooks and Jour
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Selected Bibliography 369Northeaste
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Selected Bibliography 371Miscellane
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About the AuthorRandy Frank is a te
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Index4-to 20-mA signal transmitter,
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Index 377definitions, 119-20introdu
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Index 379HVAC, 318-19MCU with integ
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Index 381Linearization, 108Linear p
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Index 383in chemical measurements,
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Index 385Ratiometricity, 56Reactive
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Index 387IC fabrication, 19micromec
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Index 389Transducer-independent int
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