Understanding Smart Sensors - Nomads.usp

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Contentsxiii8.3.1 Surface Acoustical Wave Devices 1838.3.2 Radar 1838.3.3 Global Positioning System 1858.3.4 Remote Emissions Sensing 1868.3.5 Remote Keyless Entry 1878.3.6 Intelligent Transportation System 1888.3.7 RF-ID 1918.3.8 Other Remote Sensing 1928.3.9 Measuring RF Signal Strength 1928.4 Telemetry 1928.5 RF MEMS 1958.6 Summary 196References 1979 MEMS Beyond Sensors 2019.1 Introduction 2019.2 Micromachined Actuators 2039.2.1 Microvalves 2039.2.2 Micromotors 2039.2.3 Micropumps 2069.2.4 Microdynamometers 2089.2.5 Microsteam Engines 2109.2.6 Actuators in Other Semiconductor Materials 2109.3 Other Micromachined Structures 2119.3.1 Cooling Channels 2119.3.2 Microoptics 2139.3.3 Microgrippers 2149.3.4 Microprobes 2149.3.5 Micromirrors 2159.3.6 Heating Elements 2179.3.7 Thermionic Emitters 217
xivUnderstanding Smart Sensors9.3.8 Field Emission Displays 2199.3.9 Unfoldable Microelements 2199.3.10 Micronozzles 2219.3.11 Interconnects for Stacked Wafers 2229.3.12 Nanoguitar 2229.4 Summary 223References 22310 Packaging, Testing, and ReliabilityImplications of Smarter Sensors 22710.1 Introduction 22710.2 Semiconductor Packaging Applied to Sensors 22810.2.1 Increased Pin Count 23110.3 Hybrid Packaging 23110.3.1 Ceramic Packaging and Ceramic Substrates 23210.3.2 Multichip Modules 23210.3.3 Dual-Chip Packaging 23310.3.4 Ball Grid Array Packaging 23410.4 Packaging for Monolithic Sensors 23510.4.1 Plastic Packaging 23610.4.2 Surface-Mount Packaging 23610.4.3 Flip-Chip 23710.4.4 Wafer-Level Packaging 23810.5 Reliability Implications 23910.5.1 The Physics of Failure 24210.5.2 Wafer-Level Sensor Reliability 24310.6 Testing Smarter Sensors 24410.7 Summary 245References 24611 Mechatronics and Sensing Systems 24911.1 Introduction 249
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42 Understanding Smart SensorsAlumi
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46 Understanding Smart Sensors[21]
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The Nature of Semiconductor Sensor
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4Getting Sensor Information Into th
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5Using MCUs/DSPs to Increase Sensor
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Using MCUs/DSPs to Increase Sensor
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7Control TechniquesA machine is int
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Control Techniques 151Table 7.1Type
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Control Techniques 153otherwise tak
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Control Techniques 155consisting of
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Control Techniques 157Supplied byap
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Control Techniques 159InputX1Synaps
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Control Techniques 1617.6 Adaptive
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Control Techniques 163ObserverHB−
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Control Techniques 165linear-vector
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Control Techniques 1677.7.2 Combine
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Control Techniques 169Domain-type s
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Control Techniques 171[19] De Silva
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8Transceivers, Transponders, andTel
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Transceivers, Transponders, and Tel
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9MEMS Beyond Sensors“And these ot
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MEMS Beyond Sensors 203would not ex
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MEMS Beyond Sensors 205PyrexSilicon
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MEMS Beyond Sensors 207(a)IFluxIIMa
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MEMS Beyond Sensors 209InletThermop
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MEMS Beyond Sensors 211Figure 9.8 A
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MEMS Beyond Sensors 2139.3.2 Microo
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MEMS Beyond Sensors 215Over-range p
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MEMS Beyond Sensors 217+ 10°− 10
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MEMS Beyond Sensors 219achieved wit
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MEMS Beyond Sensors 221Methods for
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MEMS Beyond Sensors 223Figure 9.19
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MEMS Beyond Sensors 225[21] Tortone
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10Packaging, Testing, and Reliabili
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Packaging, Testing, and Reliability
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11Mechatronics and Sensing SystemsP
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12Standards for Smart SensingThe la
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Standards for Smart Sensing 275Netw
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Standards for Smart Sensing 277NCAP
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Standards for Smart Sensing 2911 0
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Standards for Smart Sensing 293obje
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Standards for Smart Sensing 295Mult
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13The Implications of Smart SensorS
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14The Next Phase of Sensing Systems
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The Next Phase of Sensing Systems 3
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List of Acronyms and Abbreviations3
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List of Acronyms and Abbreviations
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Glossaryablationvaporization of mat
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Glossary 353buscalibrationconnectio
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Glossary 355end point straight line
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Glossary 357data transmission and p
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Glossary 359multiplexer device that
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Glossary 361repeatability the maxim
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Glossary 363spread spectrum techniq
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Glossary 365transducer a device con
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Selected BibliographyBooks and Jour
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Selected Bibliography 369Northeaste
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Selected Bibliography 371Miscellane
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About the AuthorRandy Frank is a te
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Index4-to 20-mA signal transmitter,
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Index 377definitions, 119-20introdu
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Index 379HVAC, 318-19MCU with integ
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Index 381Linearization, 108Linear p
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Index 383in chemical measurements,
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Index 385Ratiometricity, 56Reactive
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Index 387IC fabrication, 19micromec
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Index 389Transducer-independent int
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