High Power Impulse Magnetron Sputtering (HiPIMS)
High Power Impulse Magnetron Sputtering (HiPIMS)
High Power Impulse Magnetron Sputtering (HiPIMS)
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<strong>High</strong> <strong>Power</strong> <strong>Impulse</strong> <strong>Magnetron</strong> <strong>Sputtering</strong> (<strong>HiPIMS</strong>)Application – Film DensityThe <strong>HiPIMS</strong> givesconsistently denser filmsThis illustrates how thebombarding ions transfermomentum to the surfaceallowing themicrostructure to bemodifiedFrom Samuelsson et al. (2010) SCT 202 591
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