High Power Impulse Magnetron Sputtering (HiPIMS)
High Power Impulse Magnetron Sputtering (HiPIMS)
High Power Impulse Magnetron Sputtering (HiPIMS)
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<strong>High</strong> <strong>Power</strong> <strong>Impulse</strong> <strong>Magnetron</strong> <strong>Sputtering</strong> (<strong>HiPIMS</strong>)<strong>HiPIMS</strong> - Ionization fractionGasless self-sputtering ofcopper has beendemonstratedAndersson and Anders (2009) PRL 102 045003This self-sputtering invacuum can deliverextraordinarily highmetal-ion currentThe usable ion currentincreased exponentiallywith increasing dischargevoltage
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