High Power Impulse Magnetron Sputtering (HiPIMS)
High Power Impulse Magnetron Sputtering (HiPIMS)
High Power Impulse Magnetron Sputtering (HiPIMS)
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<strong>High</strong> <strong>Power</strong> <strong>Impulse</strong> <strong>Magnetron</strong> <strong>Sputtering</strong> (<strong>HiPIMS</strong>)<strong>HiPIMS</strong> - Charged particle transportIt has been observed thatthe electron cross-Btransport in <strong>HiPIMS</strong>discharges is much fasterthan classical collisiontheory predictsThe diffusion coefficient isroughly a factor 5 greaterthan what Bohm diffusionwould predictFrom Lundin et al. (2011) PSST 20 045003Brenning et al. (2009) PRL 103 225003Lundin et al. (2011) PSST 20 045003
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