High Power Impulse Magnetron Sputtering (HiPIMS)
High Power Impulse Magnetron Sputtering (HiPIMS)
High Power Impulse Magnetron Sputtering (HiPIMS)
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<strong>High</strong> <strong>Power</strong> <strong>Impulse</strong> <strong>Magnetron</strong> <strong>Sputtering</strong> (<strong>HiPIMS</strong>)<strong>HiPIMS</strong> - Ionization fractionConventional dcmagnetron discharge -Pre-ionization - violetargon discharge<strong>HiPIMS</strong> dischargeaveraged over severalpulses - green dischargecharacteristic of Cu vaporThe Cu + lines are onlyobserved in <strong>HiPIMS</strong> modeFrom Va˘sina et al. (2007) PSST 16 501