High Power Impulse Magnetron Sputtering (HiPIMS)
High Power Impulse Magnetron Sputtering (HiPIMS)
High Power Impulse Magnetron Sputtering (HiPIMS)
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<strong>High</strong> <strong>Power</strong> <strong>Impulse</strong> <strong>Magnetron</strong> <strong>Sputtering</strong> (<strong>HiPIMS</strong>)<strong>HiPIMS</strong> - Electrons - summaryThe electron density depends on thetarget materialCr target gives higher density than TiVetushka and Ehiasarian (2008) JPD 41 015204The peak electron density travels awayfrom the target with fixed velocityGylfason et al. (2005) JPD 38 3417The electron energy distributionfunction (EEDF) during the pulse isMaxwellian-likeGudmundsson et al. (2009) JAP 105 123302After Bohlmark et al. (2005)
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