High Power Impulse Magnetron Sputtering (HiPIMS)
High Power Impulse Magnetron Sputtering (HiPIMS)
High Power Impulse Magnetron Sputtering (HiPIMS)
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<strong>High</strong> <strong>Power</strong> <strong>Impulse</strong> <strong>Magnetron</strong> <strong>Sputtering</strong> (<strong>HiPIMS</strong>)<strong>HiPIMS</strong> - Electron density - summaryThe peak electron density is of theorder of 10 18 − 10 19 m −3Gudmundsson et al. (2001) APL 78 3427Gudmundsson et al. (2002) SCT 161 249A monotonic rise in plasma densitywith discharge gas pressureGudmundsson et al. (2002) SCT 161 249applied power Alami et al. (2005) PSST 14 525A linear increase in electron densitywith increased discharge currentAfter Bohlmark et al. (2005)Ehiasarian et al. (2008) JAP 104 083305
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