High Power Impulse Magnetron Sputtering (HiPIMS)
High Power Impulse Magnetron Sputtering (HiPIMS)
High Power Impulse Magnetron Sputtering (HiPIMS)
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<strong>High</strong> <strong>Power</strong> <strong>Impulse</strong> <strong>Magnetron</strong> <strong>Sputtering</strong> (<strong>HiPIMS</strong>)<strong>HiPIMS</strong> - Electron densityFrom Gylfason et al. (2005) JPD 38 3417Each peak travels with a fixed velocity through the chamberThe peaks travel with a velocity of 5.3 × 10 3 m/s at 1 mTorr,1.7 × 10 3 m/s at 5 mTorr, and 9.8 × 10 2 m/s at 20 mTorr