High Power Impulse Magnetron Sputtering (HiPIMS)
High Power Impulse Magnetron Sputtering (HiPIMS)
High Power Impulse Magnetron Sputtering (HiPIMS)
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<strong>High</strong> <strong>Power</strong> <strong>Impulse</strong> <strong>Magnetron</strong> <strong>Sputtering</strong> (<strong>HiPIMS</strong>)<strong>HiPIMS</strong> - Voltage - Current - timeThe bottom curve represents arange of low self-sputtering,Π ss < 0.1 and the dischargephysics in the plateau/runawayphase is dcMS-likeThe middle range of powerdensities, with 0.1 < Π ss < 1,represents partiallyself-sputtering dischargeThe top curve representsself-sputtering runaway whichrequires Π ss > 1 and aself-sputter yieldY ss > 1/(αβ t ) > 1From Gudmundsson et al. (2012), JVSTA 30 030801