High Power Impulse Magnetron Sputtering (HiPIMS)
High Power Impulse Magnetron Sputtering (HiPIMS)
High Power Impulse Magnetron Sputtering (HiPIMS)
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<strong>High</strong> <strong>Power</strong> <strong>Impulse</strong> <strong>Magnetron</strong> <strong>Sputtering</strong> (<strong>HiPIMS</strong>)<strong>HiPIMS</strong> - Voltage - Current - timeA schematic illustration of thedischarge current assumingsquare shaped voltage pulsesThe current is generallycharacterized by an initial peakfollowed by a more or lessstable current plateau (bottomcurrent curves)In other cases it shows aninitial peak followed by asecond increase of thedischarge current (top currentcurves)From Gudmundsson et al. (2012), JVSTA 30 030801