High Power Impulse Magnetron Sputtering (HiPIMS)
High Power Impulse Magnetron Sputtering (HiPIMS)
High Power Impulse Magnetron Sputtering (HiPIMS)
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<strong>High</strong> <strong>Power</strong> <strong>Impulse</strong> <strong>Magnetron</strong> <strong>Sputtering</strong> (<strong>HiPIMS</strong>)<strong>HiPIMS</strong> - Voltage - Current - timeFor longer pulses the initialpressure dependent currentpeak is followed by a secondphase that is power andmaterial dependentThe initial phase is dominatedby gas ions, whereas the laterphase has a strongcontribution fromself-sputteringFor some materials, thedischarge switches into amode of sustainedself-sputteringFrom Anders et al. (2007, 2008),JAP 102 113303 and JAP 103 039901
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