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Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film

Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film

Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film

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1101009080341.4A10'INDrelative intensity706050403025 6 7 8 9 1011 1213 14 15 16 17201011' 2'020 30 40 50 60 70 80 90 100 110 120 130 140angle[degree]Fig. 3.52 the XRD result <strong>of</strong> Nb <strong>sputtering</strong> current 1.4A with annealing for 10 minutesTable 3.16 the description <strong>of</strong> the peaks <strong>of</strong> 1.4A with annealing for 10 minutes1101009080341.6A10'INDrelative intensity706050403025 6 7 8 9 1011 1213 14 15 16 173'202'1011'020 30 40 50 60 70 80 90 100 110 120 130 140angle[degree]Fig. 3.53 the XRD result <strong>of</strong> Nb <strong>sputtering</strong> current 1.6A with annealing for 10 minutesTable 3.17 the description <strong>of</strong> the peaks <strong>of</strong> 1.6A with annealing for 10 minutes70

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