Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film
Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film
Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film
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1101001.0A10'-IND3 45 6 7 9 1011 1213 14 16 179080relative intensity706050 24030201018 152'3'1'020 30 40 50 60 70 80 90 100 110 120 130 140Angle[degree]Fig. 3.50 the XRD result <strong>of</strong> Nb <strong>sputtering</strong> current 1.0A with annealing for 10 minutesTable 3.14 the description <strong>of</strong> the peaks <strong>of</strong> 1.0A with annealing for 10 minutes110100901.2A10'IND3 45 6 7 9 1011 1213 14 16 1780relative intensity706050 240301'201018 152'3'020 30 40 50 60 70 80 90 100 110 120 130 140angle[degree]Fig. 3.51 the XRD result <strong>of</strong> Nb <strong>sputtering</strong> current 1.2A with annealing for 10 minutesTable 3.15 the description <strong>of</strong> the peaks <strong>of</strong> 1.2A with annealing for 10 minutes69