11.07.2015 Views

Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film

Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film

Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film

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Table 3.12 the description <strong>of</strong> the peaks <strong>of</strong> 1.6A with annealing for 5 minutes1101009080341.8A5'INDrelative intensity706050403025 6 78 9 1011 1213 14 15 16 17201'102'13'020 30 40 50 60 70 80 90 100 110 120 130 140angle[degree]Fig. 3.49 the XRD result <strong>of</strong> Nb <strong>sputtering</strong> current 1.8A with annealing for 5 minutesTable 3.13 the description <strong>of</strong> the peaks <strong>of</strong> 1.8A with annealing for 5 minutesAccording to the XRD analysis <strong>of</strong> 5 minutes annealing example, there is no Sncrystal plane in all <strong>of</strong> the samples. But there is Nb crystal plane except the samplewith the Nb <strong>sputtering</strong> current <strong>of</strong> 1.4A. Only the sample with the Nb <strong>sputtering</strong>current <strong>of</strong> 1.0A has the great peak <strong>of</strong> the Nb crystal plane, which reason is that thethin film is not covered with cover layer. The marked peaks with black number are thecrystal plane <strong>of</strong> Nb 3 Sn, and that with red number is the crystal plane <strong>of</strong> Nb.68

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