Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film
Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film
110100901A5'IND80relative intensity706050403023 45 6 72'8 9 1011 1213 14 15 16 174'203'101'1020 30 40 50 60 70 80 90 100 110 120 130 140angle[degree]Fig. 3.45 the XRD result of Nb sputtering current 1A with annealing for 5 minutesTable 3.9 the description of the peaks of 1A with annealing for 5 minutes110100901.2A5'IND80relative intensity70605040302345 6 72'8 9 1011 1213 14 15 16 174'20101 1'3'020 30 40 50 60 70 80 90 100 110 120 130 140angle[degree]Fig. 3.46 the XRD result of Nb sputtering current 1.2A with annealing for 5 minutes66
Table 3.10 the description of the peaks of 1.2A with annealing for 5 minutes110100901.4A5'IND80relative intensity706050403023 45 6 7 9 1011 1213 14 16 178 1520101020 30 40 50 60 70 80 90 100 110 120 130 140angle[degree]Fig. 3.47 the XRD result of Nb sputtering current 1.4A with annealing for 5 minutesTable 3.11 the description of the peaks of 1.4A with annealing for 5 minutes1101009080341.6A5'INDrelative intensity706050403025 6 78 9 1011 1213 14 15 16 174'201011' 2'3'020 30 40 50 60 70 80 90 100 110 120 130 140angle[degree]Fig. 3.48 the XRD result of Nb sputtering current 1.6A with annealing for 5 minutes67
- Page 23 and 24: 775°C. From the same diagram, it i
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Table 3.10 the description <strong>of</strong> the peaks <strong>of</strong> 1.2A with annealing for 5 minutes110100901.4A5'IND80relative intensity706050403023 45 6 7 9 1011 1213 14 16 178 1520101020 30 40 50 60 70 80 90 100 110 120 130 140angle[degree]Fig. 3.47 the XRD result <strong>of</strong> Nb <strong>sputtering</strong> current 1.4A with annealing for 5 minutesTable 3.11 the description <strong>of</strong> the peaks <strong>of</strong> 1.4A with annealing for 5 minutes1101009080341.6A5'INDrelative intensity706050403025 6 78 9 1011 1213 14 15 16 174'201011' 2'3'020 30 40 50 60 70 80 90 100 110 120 130 140angle[degree]Fig. 3.48 the XRD result <strong>of</strong> Nb <strong>sputtering</strong> current 1.6A with annealing for 5 minutes67
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