11.07.2015 Views

Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film

Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film

Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film

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110100901A5'IND80relative intensity706050403023 45 6 72'8 9 1011 1213 14 15 16 174'203'101'1020 30 40 50 60 70 80 90 100 110 120 130 140angle[degree]Fig. 3.45 the XRD result <strong>of</strong> Nb <strong>sputtering</strong> current 1A with annealing for 5 minutesTable 3.9 the description <strong>of</strong> the peaks <strong>of</strong> 1A with annealing for 5 minutes110100901.2A5'IND80relative intensity70605040302345 6 72'8 9 1011 1213 14 15 16 174'20101 1'3'020 30 40 50 60 70 80 90 100 110 120 130 140angle[degree]Fig. 3.46 the XRD result <strong>of</strong> Nb <strong>sputtering</strong> current 1.2A with annealing for 5 minutes66

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