Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film

of 1A in the Fig. 3.37 and Fig. 3.42 may be that the thin film is without the Nb coverlayer. About the other curve, the shielding effect is clear compare with the Fig. 3.37,which is that the higher Nb sputtering current, the more shielding effect, but thehigher Nb sputtering current the lower transition temperature of Nb 3 Sn.17.817.6Tc-Nb3Sn-10minTc-Nb3Sn-5min17.4Tc-Nb3Sn[K]17.217.016.816.616.416.20.9 1.0 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 1.9current[A]Fig. 3.44 comparing the Nb 3 Sn Tc with the different annealing timeThe T c of Nb 3 Sn, Nb and NbO x of the sample annealed for 10 minutes are shownin Fig. 3.43. The T c of NbO x and Nb should depend on the property of the bulk Nb,which is same with the sample annealed for 5 minutes. The Tc of Nb 3 Sn shoulddepend on the parameters of the sputtering and the annealing. However, the parameterof annealing has little effect on the T c as shown in Fig.3.44. Comparing with Fig.3.19,the T c of 1A should be lower than that of 1.2A. The reason of the abnormal result maybe the absentation over layer of 1A sample.3.3.3.2 XRD analysisThe XRD analysis method is same with that in Chapter 2. We do the annealingexperiment for 5 minutes and 10 minutes.65