Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film

IndexINDEX .................................................................................................................................................VIIINTRODUCTION ..................................................................................................................................1CHAPTER 1 AN INTRODUCTION OF SUPERCONDUCTOR CAVITY......................................21.1 THE NECESSARY OF SUPERCONDUCTOR RF ACCELERATOR ..............................................................21.2 THE PERFORMANCE OF THE NEEDED SUPERCONDUCTOR CAVITY .....................................................41.3 THE NECESSARY OF NB 3 SN SUPERCONDUCTOR THIN FILM...............................................................7CHAPTER 2 INTRODUCTION: HOW TO SPUTTER NB THIN FILM .....................................202.1 TECHNIQUE OF THE VACUUM .........................................................................................................202.2 NB THIN FILM ON SAPPHIRE ...........................................................................................................262.2.1 Sputtering configuration .......................................................................................................262.2.2 Deposition parameter............................................................................................................292.2.3 Analysis and results...............................................................................................................302.2.3.1 Thickness measurement .................................................................................................................302.2.3.2 Tc measurement..............................................................................................................................312.2.3.3 XRD analysis .................................................................................................................................352.3 DISCUSSION...................................................................................................................................40CHAPTER 3 MULTILAYER DEPOSITION OF NB 3 SN.................................................................413.1 TECHNIQUE OF DEPOSITION...........................................................................................................413.2 DEPOSITION ON SAPPHIRE .............................................................................................................423.2.1 Deposition parameter............................................................................................................423.2.2 Vacuum annealing .................................................................................................................433.2.2.1 The technique description of lamp annealing.................................................................................443.2.2.2 Analysis result ................................................................................................................................473.3 DEPOSITION ON NB SAMPLE ..........................................................................................................543.3.1 Deposition parameter............................................................................................................563.3.2 Annealing with inductor........................................................................................................563.3.3 Analysis result .......................................................................................................................593.3.3.1 Tc measurement..............................................................................................................................593.3.3.2 XRD analysis .................................................................................................................................653.4 CONCLUSION.................................................................................................................................72VII