Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film
Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film
Fig. 3.30 PyrometerFig. 3.31 measuring the temperature of the sample during annealingOnly the inductor annealing is used for obtaining the Nb 3 Sn thin film on Nbsample. The sample is fixed by Nb wire as shown in Fig.3.32. The temperature of thesample is about 1000℃ during the annealing.58
Fig. 3.32 fixing the sample with Nb wireFig. 3.33 heating the sample by the inductor3.3.3 Analysis result3.3.3.1 Tc measurementBecause the thin film is deposited on the Nb sample and the resistance of thesample is too small to measure it, we have to use the inductor T c measurement. Three59
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Fig. 3.30 PyrometerFig. 3.31 measuring the temperature <strong>of</strong> the sample during annealingOnly the inductor annealing is used for obtaining the Nb 3 Sn thin film on Nbsample. The sample is fixed by Nb wire as shown in Fig.3.32. The temperature <strong>of</strong> thesample is about 1000℃ during the annealing.58