Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film

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3.3.1 Deposition parameterThe deposition parameters of the multilayer of thin film on the Nb sample are thesame with that on the sapphire sample, which is shown in Table 3.8.Table 3.8 The parameters of multilayer deposition on NbRun N1 N2 N3 N4 N5Total Time(min) 12 12 12 12 12Nb voltage(V) 343 338 341 356 330buffer current(A) 0.8 0.8 0.8 0.8 0.8layer time(min) 1 1 1 1 1Nb voltage(V) 344 358 360 375 372multilayercurrent(A) 1.0 1.2 1.4 1.6 1.8Sn Voltage(V) 493 497 521 506 489Current(A) 0.15 0.15 0.15 0.15 0.15time (min) 10 10 10 10 10Nb voltage(V) 121* 334 331 332 323over current(A) 0.8 0.8 0.8 0.8 0.8layer time(min) 1 1 1 1 1Ar Gas pressure(mbar) 5*10 -3 5*10 -3 5*10 -3 5*10 -3 5*10 -3Base pressure(mbar) 4.3*10 -8 4.8*10 -8 1.8*10 -8 3.0*10 -8 1.5*10 -8* The leakage water induce the short circuit and low output voltage3.3.2 Annealing with inductorAnnealing with lamp needs long time to increase the temperature. The ramp ofthe temperature is very steep when the inductor is used. The inductor annealing needsto input the AC current into the coil. As shown in Fig. 3.28. The coil will induce theelectromagnetic field in the vacuum chamber space. When we put the sample or thecavity, the eddy current will be induced in the metal and the eddy current will heat themetal quickly.56
Fig. 3.28 the inductor coilDuring the annealing, the temperature is measured by the pyrometer. Thepyrometer measures the temperature of the annealing sample through the glasswindow as shown in Fig. 3.30. Because the spectrum of the photon emitted form thesample at the different temperature is different, we can measure the temperature bythe spectrum.The maximum of the input power of the inductor is about 10KW, and we fix thefrequency of the input AC current at 80KHz.Fig.3.29 the inductor annealing chamber57
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UNIVERSITÀ DEGLISTUDI DI PADOVAFac
Page 7 and 8:
IndexINDEX ........................
Page 9 and 10:
IntroductionThe superconductor acce
Page 11 and 12:
Fig. 1.1 Disc-loaded traveling-wave
Page 13 and 14: In Type-II superconductors, vortex
Page 15 and 16: needed for preventing the supercond
Page 17 and 18: The B1 crystal structure has a cubi
Page 19 and 20: NbN cavities literature, is often h
Page 21 and 22: superconducting magnet construction
Page 23 and 24: 775°C. From the same diagram, it i
Page 25 and 26: two types of electrons at the Fermi
Page 27 and 28: Of course, there are some other kin
Page 29 and 30: as shown in Fig.2.3. The four opera
Page 31 and 32: Fig.2.8 turbomolecular pumpFig. 2.9
Page 33 and 34: Fig. 2.14 The chamber covered with
Page 35 and 36: Fig. 2.17 the gasket and the magnet
Page 37 and 38: shown in Fig. 2.21 and Fig. 2.22. T
Page 39 and 40: Fig. 2.26 The interface of the surf
Page 41 and 42: Fig. 2.30 put the sample into the T
Page 43 and 44: Fig. 2.34 the performance of the th
Page 45 and 46: 1008038.5°{110}69.6°{211}sample1s
Page 47 and 48: 2dsinθ= nλ (2.3)Fig.2.44 the diff
Page 49 and 50: Chapter 3 Multilayer deposition of
Page 51 and 52: 1 minute. The time of depositing mu
Page 53 and 54: chamber 1 and is connected to the s
Page 55 and 56: 3.2.2.2 Analysis resultⅠ The thic
Page 57 and 58: In order to detect the component of
Page 59 and 60: measure the RRR. So the resistance
Page 61 and 62: 110100903480relative Intensity70605
Page 63: frequency of the cavity which is in
Page 67 and 68: Fig. 3.32 fixing the sample with Nb
Page 69 and 70: second transition temperature is th
Page 71 and 72: source is the bulk Nb sample. Altho
Page 73 and 74: of 1A in the Fig. 3.37 and Fig. 3.4
Page 75 and 76: Table 3.10 the description of the p
Page 77 and 78: 1101001.0A10'-IND3 45 6 7 9 1011 12
Page 79 and 80: 1101009080341.8A10'INDrelative inte
Page 81 and 82: Reference1. A. Godeke, Nb3Sn FOR RA
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Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film

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